Nano structure fabrication by Self-assembling ability

2009 Fiscal Year Final Research Report

• Project/Area Number: 18063015
• Research Category: Grant-in-Aid for Scientific Research on Priority Areas
• Allocation Type: Single-year Grants
• Review Section: Science and Engineering
• Research Institution: Nara Institute of Science and Technology
• Principal Investigator: YUKIHARU Uraoka Nara Institute of Science and Technology, 物質創成科学研究科, 教授 (20314536)
• Co-Investigator(Kenkyū-buntansha): YAMAMOTO Shin-Ichi 龍谷大学, 理工学部, 教授 (70399260)
• Co-Investigator(Renkei-kenkyūsha): IKEDA Atsuchi 奈良先端科学技術大学院大学, 物質創成科学研究科, 准教授 (90274505) ; HATAYAMA Tomoaki 奈良先端科学技術大学院大学, 物質創成科学研究科, 助教 (90304162) ; YANO Hiroshi 奈良先端科学技術大学院大学, 物質創成科学研究科, 助教 (40335485)
• Project Period (FY): 2006 – 2009
• Keywords: 生体超分子 / 自己組織化 / 半導体デバイス / メモリ / シリコン薄膜 / 結晶化 / ディスプレイ

Research Abstract

We proposed new semiconductor fabrication process using bio supla molecule or organic materials. We demonstrate excellent performance in floating gate memory, resistive memory and thin film transistor by using unique feature such as nano scaling uniformity or self assembling properties. This method is promising for the devices in post scaling era.

Research Products

• [Journal Article] APPLIED PHYSICS LETTERS (2009)
  • Author(s): Emi Machida, Yukiharu Uraoka, Takashi Fuyuki, Ryohei Kokawa, Takeshi Ito, Hiroshi Ikenoue
  • Journal Title: 94 Pages: 182104
  • Peer Reviewed
• [Journal Article] Applied hysics Express (2009)
  • Author(s): K. Ohara, I. Yamashita, T. Yaegashi, M. Moniwa, H. Yoshimaru, Y. Uraoka
  • Journal Title: 2 Pages: 095001
  • Peer Reviewed
• [Journal Article] (2009)
  • Author(s): Y. Tojo, A. Miura, Y. Uraoka, T. Fuyuki, I. Yamashita
  • Journal Title: Jpn. J. Appl. Phys. 48 Pages: 04C190-1-5
  • Peer Reviewed
• [Journal Article] (2009)
  • Author(s): M. Fujii, Y. Uraoka, T. Fuyuki, J.S. Jung, J.Y. Kwon
  • Journal Title: Jpn. J. Appl. Phys. 48 Pages: 04C091-1-6
  • Peer Reviewed
• [Journal Article] (2009)
  • Author(s): A. Miura, R. Tanaka, Y. Uraoka, N. Matsukawa, I, Yamashita
  • Journal Title: Nanotechnology 20 Pages: 125702-1-9
  • Peer Reviewed
• [Journal Article] (2009)
  • Author(s): C. Huang, M. Igarashi, M. Wone, Y. Uraoka, T. Fuyuki, M. Takeguchi, I. Yamashita, S. Samukawa
  • Journal Title: Jap. J. Appl. Phys. 48 Pages: 04C187-1-6
  • Peer Reviewed
• [Journal Article] (2009)
  • Author(s): A. Kitiyanan, A. Ogane, A. Tani, T. Hatayama, H. Yano, Y. Uraoka, T. Fuyuki
  • Journal Title: J. Appl. Phys. 106 Pages: 043717
  • Peer Reviewed
• [Journal Article] (2008)
  • Author(s): T. Nakamura, H. Kuraseko, K. Hanazawa, H. Koaizawa, Y. Uraoka, T. Fuyuki, A. Mimura
  • Journal Title: Appl. Phys. Lett. 93 Pages: 241503
  • Peer Reviewed
• [Journal Article] (2008)
  • Author(s): S. Yamamoto, K. Kobayashi, H. Yamada, H. Yoshioka, Y. Uraoka, T. Fuyuki, M. Okuda, I. Yamashita
  • Journal Title: Journal of Scann Pobe Microsc vol.3 Pages: 1-6
  • Peer Reviewed
• [Journal Article] Compositional Changes in Co-Ferritin Nanoparticles Induced by Ion Bombardment as Determined by Kelvin Probe Force Microscopy in High Vacuum (2008)
  • Author(s): S. Yamamoto, H. Yoshioka, Y. Uraoka, T. Fuyuki, M. Okuda, I. Yamashita
  • Journal Title: Jpn. J. Appl. Phys. Vol.47,No.8 Pages: 6160-6163
  • Peer Reviewed
• [Journal Article] Analysis of Anomalous Charge-Pumping Characteristics on 4H-SiC MOSFETs (2008)
  • Author(s): D. Okamoto, H. Yano, T. Hatayama, Y. Uraoka, T. Fuyuki
  • Journal Title: IEEE Transaction Electron Device Vol.55,No.8 Pages: 2013-2020
  • Peer Reviewed
• [Journal Article] (2008)
  • Author(s): M. Fujii, H. Yano, T. Hatayama, Y. Uraoka, T. Fuyuki, J. Sim Jung
  • Journal Title: J. Yeon Kwon, Jpn. J. Appl. Phys. Vol.47,No.8 Pages: 6236-6240
  • Peer Reviewed
• [Journal Article] Non-volatile flash memory with discrete bionanodt floating gate assembled by protein template (2008)
  • Author(s): A. Miura, R. Tsukamoto, S. Yoshii, I. Yamashita, Y. Uraoka, T. Fuyuki
  • Journal Title: Nanotechnology 19(208) Pages: 255201
  • Peer Reviewed
• [Journal Article] Floating nanodot gate memory fabrication with biomineralized nanodot as charge storage node (2008)
  • Author(s): A. Miura, Y. Uraoka, T. Fuyuki, S. Kumagai, S. Yoshii, N. Matsukawa, I. Yamshita
  • Journal Title: Journal of Applied Physics Vol.103,No.7 Pages: 074503-1-10
  • Peer Reviewed
• [Journal Article] Fabrication of Poly-Si Thin-Film Transistors on Quartz Fiber (2007)
  • Author(s): Yuta Sugawara, Yukiharu Uraoka, Hiroshi Yano, Tomoaki Hatayama, Takashi Fuyuki
  • Journal Title: Aplied Physics Ltter 91 Pages: 203518
  • Peer Reviewed
• [Journal Article] Compositional Changes Induced by Ion Bombardment in Ferrtin Nanoparticles (2007)
  • Author(s): S. Yamamoto, H. Yoshioka, Y. Uraoka, T. Fuyuki, M. Okuda, I. Yamashita
  • Journal Title: Journal of Physics 61 Pages: 1276-1281
  • Peer Reviewed
• [Journal Article] Low-temperature poly-Si TFT flash memory w ith ferritin (2007)
  • Author(s): Kazunori Ichikawa, Yukiharu Uraoka, Prakaipetch, Punchaipetch, Hiroshi Yano, Tomoaki Hatayama, Takashi Fuyuki, Ichiro Yamashita
  • Journal Title: Jpn. J. Appl. Phys. Vol.46,No.34 Pages: L804-L806
  • Peer Reviewed
• [Journal Article] bionaodot mmonolayer array fabrication for nonvolatile memory application (2007)
  • Author(s): A. Miura, Y. Uraoka, T. Fuyuki, S. Kumagai, S. Yoshii, N. Matsukawa, I. Yamshita
  • Journal Title: Surface Science Letters 601 Pages: 81-85
  • Peer Reviewed
• [Journal Article] Effects of Dot Density and Dot Size on Charge Injection Characteristics in Nanodot Array Produced by Protein Supramolecules (2007)
  • Author(s): K. Yamada, S. Yoshii, S. Kumagai, A. Miura, Y. Uraoka, T. Fuyuki, I. Yamashita
  • Journal Title: Jpn J. Appl. Phys Vol.46,No.11 Pages: 7549-7553
  • Peer Reviewed
• [Journal Article] Low temperature poly-Si Thin Film Transistors flash memory with Si nanocrystal dot (2007)
  • Author(s): Kazunori Ichikawa, Yukiharu Uraoka, Hiroshi Yano, Tomoaki Hatayama, Takashi Fuyuki, Eiji Takahashi, Tsukasa Hayashi, Kiyoshi Ogata
  • Journal Title: Jpn. J. Appl. Phys. Lett. Vol.46,No.27 Pages: L661-L663
  • Peer Reviewed
• [Journal Article] Reliability of low temperature poly-Si Thin Film Transistors with ultrathin gate oxide (2007)
  • Author(s): Hitoshi Ueno, Yuta Sugawara, Hiroshi Yano, Tomoaki Hatayama, Yukiharu Uraoka, Takashi Fuyuki, Tadashi Serikawa
  • Journal Title: pn. J. Appl. Phys. Vol.46,No.7A
  • Peer Reviewed
• [Journal Article] Thermal Degradation Under Pulse Operation in Low-Temperature p-channel Poly-Si Thin Film Transistors (2007)
  • Author(s): Shinichiro Hashimoto, Yukiharu Uraoka, Takashi Fuyuki, Yukihiro Morita
  • Journal Title: IEEE/T-ED Vol.54,No.2 Pages: 297
  • Peer Reviewed
• [Journal Article] Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing for High Performance Thin Film Transistors (2007)
  • Author(s): Yuta Sugawara, Yukiharu Uraoka, Hiroshi Yano, Tomoaki Hatayama, Takashi Fuyuki, Akio Mimura
  • Journal Title: IEEE EDL Vol.28,No.5 Pages: 395
  • Peer Reviewed
• [Presentation] (2009)
  • Author(s): Hiroshi Ikenoue, Emi Machida, Yukiharu Uraoka, Takeshi Ito, Ryohei Kokawa
  • Organizer: THE PROCEEDINGS OF AM-FPD '09
  • Place of Presentation: Nara Centennial Hall, Nara
  • Year and Date: 20090701-20090703
• [Presentation] (2009)
  • Author(s): Takehiko Yamashita, Yuta Sugawara, Yukiharu Uraoka
  • Organizer: M-FPD '09
  • Place of Presentation: Nara
  • Year and Date: 20090701-20090703
• [Presentation] Pulsed Green Laser Anneling Crystallization of Double-Layered Silicon Thin Films (2009)
  • Author(s): Y. Sugawara, H. Yano, T. Hatayama, Y. Uraoka, T. Fuyuki
  • Organizer: 5th International TFT Conference
  • Place of Presentation: Paris France
  • Year and Date: 20090300
• [Presentation] (2009)
  • Author(s): M. Fujii, T. Fuyuki, J. Jung, J. Kwon, Y. Uraoka
  • Organizer: IMID 2009
  • Place of Presentation: Digest, Seoul Korea
  • Year and Date: 2009-10-14
• [Presentation] (2009)
  • Author(s): Y. Tojo, A. Miura, T. Fuyuki, I. Yamashita, Y. Uraoka
  • Organizer: IMID 2009
  • Place of Presentation: Seoul Korea
  • Year and Date: 2009-10-14
• [Presentation] (2009)
  • Author(s): K. Ohara, I. Yamashita, Y. Uraoka
  • Organizer: SSDM
  • Place of Presentation: Sendai
  • Year and Date: 2009-10-08
• [Presentation] (2009)
  • Author(s): K. Yumi, Y. Uraoka
  • Organizer: Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials
  • Place of Presentation: Sendai
  • Year and Date: 2009-10-07
• [Presentation] (2009)
  • Author(s): Y. Iwasaki, H. Yano, T. Hatayama, Y. Uraoka, T. Fuyuki
  • Organizer: SSDM
  • Place of Presentation: Sendai
  • Year and Date: 2009-10-07
• [Presentation] (2009)
  • Author(s): Makoto Igarashi, Chi-Hsien Huang, Maju Tomura, Masaki Takeguchi, Susumu Horita, Yukiharu Uraoka, Takashi Fuyuki, Ichiro Yamashita, Takashi Morie, Seiji Samukawa1
  • Organizer: SSDM
  • Place of Presentation: Sendai
  • Year and Date: 2009-10-07
• [Presentation] Floating gate memory based on ferritin nanodots with high-K gate dielectrics (2008)
  • Author(s): K. Ohara, Y. Uraoka, T. Fuyuki, I. Yamashita, T. Yaegashi, M. Moniwa, M. YOshimaru
  • Organizer: SSDM
  • Place of Presentation: Tsukuba
  • Year and Date: 2008-09-08
• [Presentation] Controlled reduction of BioNanoDot for Better Charge Strage Characteristics of BND Flash Memory (2008)
  • Author(s): Yosuke Tojo, A. Miura, Y. Uraoka, T. Fuyuki, I. Yamashita
  • Organizer: SSDM
  • Place of Presentation: Tsukuba
  • Year and Date: 2008-09-08
• [Presentation] Threshold Voltage Shift in Ga2O3-In2O3-ZnO(ZIGO) Thin Film Transitors under Constant Voltage Stress (2008)
  • Author(s): M. Fujii, H. Yano, T. Hatayama, Y. Uraoka, T. Fuyuki, J. Jung, J. Kwon, T. Nakanishi, M. Kimura
  • Organizer: SSDM
  • Place of Presentation: Tsukuba
  • Year and Date: 2008-09-08
• [Presentation] New Synthesis Method using Microwave Thermo Catalysis for Inorganic EL Displays (2008)
  • Author(s): Mami Fujii, Hiroshi Yano, Tomoaki Hatayama, Yukiharu Uraoka, Takashi Fuyuki, Nobuyoshi Taguchi, R. Sugie, N. Muraki
  • Organizer: AMFPD
  • Place of Presentation: Tokyo
  • Year and Date: 2008-07-02
• [Presentation] (2008)
  • Author(s): M. Ochi, Y. Sugawara, A. Miura, Y. Uraoka, T. Fuyuki, T. Yaegashi, S. Kawabata, M. Yoshimaru
  • Organizer: AMFPD
  • Place of Presentation: Tokyo
  • Year and Date: 2008-07-02
• [Presentation] Degradation in Ga2O3-In2O3-ZnO Thin Film Transistors under Constant Voltage Stress (2008)
  • Author(s): M. Fujii, H. Yano, T. Hatayama, Y. Uraoka, T. Fuyuki, J. Jung, J. Kwon, T. Nakanishi, M. Kimura
  • Organizer: AMFPD
  • Place of Presentation: Tokyo
  • Year and Date: 2008-07-02
• [Presentation] Low temperature poly-Si TFT flash memory with Ferritin Protein (2008)
  • Author(s): K. Ichikawa, P. Punchaipetch, H. Yano, T. Hatayama, Y. Uraoka, T. Fuyuki, I. Yamashita, T. Yaegashi, S. Kawabata, M. Yoshimau
  • Organizer: AMFPD
  • Place of Presentation: Tokyo(招待講演)
  • Year and Date: 2008-07-02
• [Presentation] Floating gate memory devices based on ferritin nanodots on high-k gate dielectrics (2008)
  • Author(s): Kosuke Ohara, Atsushi Miura, Yukiharu Uraoka, Takashi Fuyuki, Ichiro Yamashita, Toshitake Yaegashi, Seiji Kawabata, Masaki Yoshimaru
  • Organizer: IMFEDK
  • Place of Presentation: Osaka
  • Year and Date: 2008-05-23
• [Presentation] Charging-discharging behavior of the bio-nano-core floating gate MOS capacitor (2008)
  • Author(s): Yosuke Tojo, Atsushi Miura, Yukiharu Uraoka, Takashi Fuyuki, I. YamashitaToshitake Yaegashi, Seiji Kawabata, Masaki Yoshimaru
  • Organizer: IMFEDK
  • Place of Presentation: Osaka
  • Year and Date: 2008-05-23
• [Presentation] (2008)
  • Author(s): Mami Fujii, Hiroshi Yano, Tomoaki Hatayama, Yukiharu Uraoka, Takashi Fuyuki, Ji Sim Jung, Jang Yeon Kwon, Takashi Nakanishi, Mutsumi Kimura
  • Organizer: IMFEDK
  • Place of Presentation: Osaka
  • Year and Date: 2008-05-23
• [Presentation] Acceleration of Crystal Growth by Pulse Rapid Anneaking using Ni ferritin (2008)
  • Author(s): M. Ochi, Y. Sugawara, H. Yano, T. Hatayama, Y. Uraoka, T. Fuyuki, I. Yamashita
  • Organizer: The 4th International TFT Conference
  • Place of Presentation: Seoul Korea
  • Year and Date: 2008-01-25
• [Presentation] Improvement in Al2O3/Si Interfacial Characteristics by High Pressure Water Annealing (2008)
  • Author(s): H. Itoh, Y, Sugawara, H. Yano, T. Hatayama, Y. Uraoka, T. Fuyuki
  • Organizer: The 4th International TFT Conference
  • Place of Presentation: Seoul Korea
  • Year and Date: 2008-01-25
• [Presentation] Low Temperature Poly-Si TFT Nonvolatile Memory using Ferrtin Protein (2008)
  • Author(s): Y. Uraoka
  • Organizer: The 4th International TFT Conferenc
  • Place of Presentation: Seoul Korea
  • Year and Date: 2008-01-25
• [Presentation] Green Laser Anneling Double-Layered X'tallization for System on Panerl (2008)
  • Author(s): Y. Sugawara, H. Yano, T. Hatayama, Y. Uraoka, T. Fuyuki, A, Mimura
  • Organizer: The 4th International TFT Conference
  • Place of Presentation: Seoul Korea
  • Year and Date: 2008-01-25
• [Presentation] Crystallization of Double-Layerd silicon Thin Film by Solid Green Laser Annealing for High Performance Thin Film Transistor (2007)
  • Author(s): Y. Sugawara, Y. Uraoka, H. Yano, T. Hatayama, T. Fuyuki, A, Mimura
  • Organizer: AMFPD '07
  • Place of Presentation: Hyogo
  • Year and Date: 20070711-20070725
• [Presentation] Enhancement of crystal growth rate of Bio-Nano Crystallization by Pulsed Rapid Thermal Annealing (2007)
  • Author(s): Masahiro Ochi, Yasuhiro Nanjo, Yuta Sugawara, Yukiharu Uraoka, Takashi Fuyuki, Mitsuhiro Okuda, Ichiro Yamashita
  • Organizer: SSDM
  • Place of Presentation: Tsukuba
  • Year and Date: 2007-09-18
• [Presentation] Reduction of a Ferritin Core Embedded in Silicon Oxide Film for An Application to Floating Gate Memory (2007)
  • Author(s): akashi Matsumura, Atsushi Miura, Yukiharu Uraoka, Takashi Fuyuki, Shigeo Yoshii, Ichiro Yamashita
  • Organizer: SSDM
  • Place of Presentation: Tsukuba
  • Year and Date: 2007-09-18
• [Presentation] Fablication of Poly-Si Film by Continuous Localized Thermal CVD on Flexible Quarts Substrate (2007)
  • Author(s): T. Nakamura, Y. Uraoka
  • Organizer: AMFPD '07
  • Place of Presentation: Hyogo
  • Year and Date: 2007-07-11
• [Presentation] Low Temperature Poly-Si TFT Flash Memory with Ferritin Protein (2007)
  • Author(s): K. Ichikawa, Y. Uraoka, T. Fuyuki, I. yamashita
  • Organizer: AMFPD '07
  • Place of Presentation: Hyogo
  • Year and Date: 2007-07-11
• [Presentation] Characterization of electronic properties of single bionanodot (2007)
  • Author(s): R. Tanaka, A. Miura, Y. Uraoka, T. Fuyuki, I. Yamashita
  • Organizer: The proceeding of the 3rd International TFT Conference
  • Place of Presentation: Rome
  • Year and Date: 2007-01-25
• [Presentation] Low Temperature poly-Si TFT Flash memory with Si nano crystal dot (2007)
  • Author(s): K. Ichikawa, H. Yano, T. Hatayama, Y. Uraoka, T. Fuyuki
  • Organizer: The proceeding of the 3rd International TFT Conference
  • Place of Presentation: Rome
  • Year and Date: 2007-01-25
• [Presentation] micro-PCD Measurement of Double-Layered poly-Si Thin Films Crystallization by Solid Green Lazer Annealing (2007)
  • Author(s): Y. Sugawara, Y. Uraoka, H. Yano, T. Hatayama, T. Fuyuki
  • Organizer: The proceeding of the 3rd International TFT Conference
  • Place of Presentation: Rome
  • Year and Date: 2007-01-25
• [Presentation] Improvement in Si/SiO2 properties using atmospheric pressure plasma (2007)
  • Author(s): T. Miyamoto, Y. Sugawara, Y. Uraoka, T. Fuyuki, H. Kuroda, K. Takashima
  • Organizer: The proceeding of the 3rd International TFT Conference
  • Place of Presentation: Rome
  • Year and Date: 2007-01-25
• [Presentation] Relaibility for Joule Effect in LTPS-TFT with very thin gate oxide (2007)
  • Author(s): H. Ueno, Y. Sugawara, Y. Uraoka, T. Fuyuki, T. Serikawa
  • Organizer: The proceeding of the 3rd International TFT Conferenc
  • Place of Presentation: Rome
  • Year and Date: 2007-01-25
• [Presentation] Enlargement of Grain size poly-Si suing Ferritin Protein with Ni Nano particles (2007)
  • Author(s): Y. Nanjo, Y. Uraoka, T. Fuyuki, M. Okuda, I. Yamashita
  • Organizer: The proceeding of the 3rd International TFT Conference
  • Place of Presentation: Rome
  • Year and Date: 2007-01-25