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2008 Fiscal Year Final Research Report

Investigation of Dominant Mechanical Parameters on Function and Life Time of Thin Multi-Layered Structures

Research Project

  • PDF
Project/Area Number 18206013
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionTokyo Institute of Technology

Principal Investigator

KISHIMOTO Kikuo  Tokyo Institute of Technology, 大学院・理工学研究科, 教授 (30111652)

Co-Investigator(Kenkyū-buntansha) INOUE Hirotsugu  東京工業大学, 大学院・理工学研究科, 准教授 (90193606)
URAGO Masataka  慶応義塾大学, 大学院・システムデザイン・マネージメント科, 准教授 (50302948)
OMIYA Masaki  慶応義塾大学, 理工学部, 専任講師 (30302938)
Project Period (FY) 2006 – 2008
Keywords界面強度 / 薄膜 / ナノインデンターション / マルチピール試験 / 結合力モデル
Research Abstract

半導体デバイスやマクロセンサーなどのマイクロシステムは種々の材料から構成される多層薄膜構造体であることが特徴である. 本研究では, このような多層薄膜構造体の機能・寿命特性を支配する表面・界面の力学場パラメータを明らかにすることを目的として, 従来のナノインデンテーション試験, マルチステージピール試験のよるはく離過程の観察・評価に加えて, 多軸駆動型はく離法を新たに開発し, 界面特性を精度良く評価できる手法を提示するとともに, 界面強度特性を結合力モデルによって考慮した有限要素解析を行い, はく離進展の挙動を明らかにしている.

  • Research Products

    (23 results)

All 2009 2008 2007 Other

All Journal Article (10 results) (of which Peer Reviewed: 8 results) Presentation (12 results) Remarks (1 results)

  • [Journal Article] 界面強度評価の現状と課題2009

    • Author(s)
      岸本喜久雄
    • Journal Title

      第53回材料強度と破壊総合シンポジウム論文集 Vol.53

      Pages: 71-88

  • [Journal Article] 異方性を考慮した界面結合モデルによる粘着テープのはく離進展解析2008

    • Author(s)
      増田良太, 井上裕嗣, 岸本喜久雄
    • Journal Title

      計算数理工学論文集 Vol.8

      Pages: 25-30

    • Peer Reviewed
  • [Journal Article] Peeling rate dependency of delamination behavior of adhesives, Advanced Materials Research2008

    • Author(s)
      Ryota Masuda, Hirotsugu Inoue, Kikuo Kishimoto
    • Journal Title

      Advanced Materials Research Vols.33-37

      Pages: 339-344

    • Peer Reviewed
  • [Journal Article] Effect of Nickel Pad Metallization Thickness on Fatigue Failure of BGA Lead-Free Solder Joint2008

    • Author(s)
      Masaki Omiya, Takeshi Miyazaki, Kikuo Kishimoto, Masazumi Amagi
    • Journal Title

      IEEE Tranzaction on Components and Packaging Technologies Vol.31

      Pages: 734-740

    • Peer Reviewed
  • [Journal Article] 界面き裂の支配力学パラメータと界面強度評価試験(総説)2007

    • Author(s)
      岸本喜久雄, 大宮正毅, 上月謙太郎
    • Journal Title

      日本接着学会誌 Vol.43

      Pages: 31-39

  • [Journal Article] Crack Formation of Ceramic Thin Film on Polymer Substrate2007

    • Author(s)
      M. Omiya, K. Kishimoto
    • Journal Title

      Key Engineering Materials Vols. 353-358

      Pages: 307-310

    • Peer Reviewed
  • [Journal Article] Study of Delamination of Thin Film Coating on Cyclic Nano-Indentation Test2007

    • Author(s)
      K. Kozuki, M. Omiya, K. Kishimoto and H.Inoue
    • Journal Title

      Key Engineering Materials Vols. 353-358

      Pages: 1842-1845

    • Peer Reviewed
  • [Journal Article] Non-destructive Evaluation of a Delamination in Laminates by Lamb Wave Propagation2007

    • Author(s)
      Zhenghua QIAN, Feng JIN, Zikun Wang, Kikuo KISHIMOTO
    • Journal Title

      Key Engineering Materials Vols. 353-358

      Pages: 2345-2348

    • Peer Reviewed
  • [Journal Article] Effect of peel rate on interfacial strength2007

    • Author(s)
      Ryota MASUDA, Masaki OMIYA, Hirotsugu INOUE, Kikuo KISHIMOTO
    • Journal Title

      Key Engineering Materials Vols 345-346

      Pages: 185-188

    • Peer Reviewed
  • [Journal Article] Mixed-mode interfacial fracture toughness for thermal barrier coating2007

    • Author(s)
      M. Arai, Y. Okajima, K. Kishimoto
    • Journal Title

      Engineering Fracture Mechanics 74

      Pages: 2055-2069

    • Peer Reviewed
  • [Presentation] ナノスケール領域の材料力学2008

    • Author(s)
      岸本喜久雄
    • Organizer
      ナノプローブテクノロジー167委員会,第49回研究会資料
    • Place of Presentation
      横浜(17-24)
    • Year and Date
      20080124-25
  • [Presentation] Evaluation of the Interfacial Strength by the Indentation Method2008

    • Author(s)
      Kikuo Kishimoto, Kentaro Kozuki, Masaki Omiya
    • Organizer
      The Eighth International Conference on Fundamentals of Fracture
    • Place of Presentation
      Hong Kong(28-29)
    • Year and Date
      20080103-07
  • [Presentation] ナノインデンテーション試験法によるPI薄膜/Si基板構造体の界面強度評価2008

    • Author(s)
      上月謙太郎, 岸本喜久雄, 大宮正毅
    • Organizer
      第4回マイクロマテリアルシンポジウム講演論文集
    • Place of Presentation
      東京(71-76)
    • Year and Date
      2008-09-23
  • [Presentation] Effect of UV-ray irradiation on the Crack Formation of PET/ITO film2007

    • Author(s)
      Masaki Omiya, Kikuo Kishimoto
    • Organizer
      The 4th Japan-Taiwan Workshop on Mechanical and Aerospace Engineering
    • Place of Presentation
      箱根(151-155)
    • Year and Date
      20071029-31
  • [Presentation] Finite Element Analyses of Peel Test for Thin Film Adhesion2007

    • Author(s)
      Ryota MASUDA, Hirotsugu INOUE, Kikuo KISHIMOTO
    • Organizer
      The 4th Japan-Taiwan Workshop on Mechanical and Aerospace Engineering
    • Place of Presentation
      箱根(224-227)
    • Year and Date
      20071029-31
  • [Presentation] Interfacial Strength Evaluation for Thin Film Coating Systems by Nanoindentation Test2007

    • Author(s)
      K. Kozuki, M. Omiya, K. Kishimoto
    • Organizer
      The 4th Japan-Taiwan Workshop on Mechanical and Aerospace Engineering
    • Place of Presentation
      箱根(329-331)
    • Year and Date
      20071029-31
  • [Presentation] ITO薄膜のき裂形成に及ぼすPET 基材の塑性変形の影響2007

    • Author(s)
      大宮正毅, 岸本喜久雄
    • Organizer
      日本機械学会M&M2007 材料力学カンファレンス
    • Place of Presentation
      東京(155-156)
    • Year and Date
      20071024-26
  • [Presentation] 溶射条件を考慮した遮熱コーティングの残留応力解析2007

    • Author(s)
      荒井正行, 和田英志, 岸本喜久雄
    • Organizer
      日本機械学会M&M2007材料力学カンファレンス
    • Place of Presentation
      東京(177-178)
    • Year and Date
      20071024-26
  • [Presentation] Delamination Behavior of Hard Film on Soft Substrate During Nano- and Micro-Indentation2007

    • Author(s)
      Kozuki, K., Omiya, M., Kishimoto, K.
    • Organizer
      MicroNano Reliability
    • Place of Presentation
      Berlin(133)
    • Year and Date
      20070902-05
  • [Presentation] UV-ray Irradiation Effects on Channeling Crack Formation of Ceramic Thin Film on Polymer Substrate MicroNano Reliability2007

    • Author(s)
      Omiya, M., Kishimoto, K.
    • Place of Presentation
      Berlin(182)
    • Year and Date
      20070902-05
  • [Presentation] Peeling rate dependency of delamination behavior of adhesives2007

    • Author(s)
      Ryota MASUDA, Hirotsugu INOUE, Kikuo KISHIMOTO
    • Organizer
      FEOFS2007
    • Place of Presentation
      Urumqi, China(468)
    • Year and Date
      20070827-30
  • [Presentation] 界面強度に関するいくつかの話題(基調講演)2007

    • Author(s)
      岸本喜久雄
    • Organizer
      日本材料学会第56期学術講演会講演論文集
    • Place of Presentation
      名古屋(77-78)
    • Year and Date
      20070519-20
  • [Remarks]

    • URL

      http://www.titech.ac.jp/whoswho/Profiles/0026/0000080/profile.html

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Published: 2010-06-10   Modified: 2016-04-21  

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