2007 Fiscal Year Final Research Report Summary
Clarifying the Photonic, Electronic, and Acoustic Characteristics of Quantum-sized Silicon for Functional Integration
| Project/Area Number |
18206039
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (A)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Electron device/Electronic equipment
|
|---|
| Research Institution | Tokyo University of Agriculture and Technology |
|---|
Principal Investigator |
KOSHIDA Nobuyoshi Tokyo University of Agriculture and Technology, Institute of Symbiotic Science and Technology, Professor (50143631)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
BERNARD Gelloz National University Corporation Tokyo University of Agriculture and Technology, Graduate School, Institute of Symbiotic Science and Technology, Research Associate (40343157)
|
|---|
| Project Period (FY) |
2006 – 2007
|
| Keywords | Nanosilicon / Quantum confinement / Silicon photonics / Electroluminescence / Ballistic electron emission / Hydrogen generation / Ultrasound emitter / Functional integration |
|---|
| Research Abstract |
Photonic, electronic, and acoustic properties of quantum-sized silicon have been studied for their characterizations and device applications toward the functional integration. The results and significances are summarized as follows.
(1) Development of photonic devices based on enhanced luminescence
- It was confirmed by combination of anneal with surface passivation that both the efficiency and the stability were much improved, and then the evidence of energy transfer in nanosilicon was clearly detected by analyses of photoexcitation-relaxation process.
- Process technologies for stable blue luminescence, optical cavity, photoconduction, nanowire, and 3-dimensional periodic nanostructure were developed as components of silicon photonics.
(2) Applications of ballistic electron emitter
- The usefulness of nanosilicon ballistic electron emitter as means of negative ion source and hydrogen gas generation was shown by operation in air and in pure water, respectively.
- The applicability in vacuum was also demonstrated by the use as planar cold cathode for parallel electron-beam lithography and ultra-high-sensitivity image sensing.
(3) Improved ultrasonic emission and device applications
- The appropriate design and driving techniques compatible with efficient and stable ultrasonic emission from nanosilicon device were developed on a basis of systematic analyses.
- Due to the flat frequency response, the nanosilicon emitter was successfully applied to sound source for studies on bio-acoustic communication and digital information transmission.
(4) Implementation of functional integration
- The device concept and process flow were given for monolithic integration of photonic, electronic, and acoustic functions into silicon substrate.
- Actuality of this approach was demonstrated by prototyping two devices : sound-emissive electroluminescent diode and surface-emitting device with ballistic excitation mechanism.
|
-
-
[Journal Article] Development of a super-high sensitive image sensor using 640×480 pixel active-matrix high-efficency electrion emission device.2008
Author(s)
N. Negishi, T. Sato, Y. Matsuba, R. Tanaka, T. Nakada, K. Sakemura, Y. Okuda, A. Watanabe, T. Yoshikawa, K. Ogasawara, M. Nanba, S. Okazaki, K. Tanioka. N. Egami, and N. Koshida
-
Journal Title
J. Vac. Sci. Technol. B 26
Pages: 711-715
Description
「研究成果報告書概要(和文)」より
Peer Reviewed
-
-
-
-
-
-
[Journal Article] Development of a super-high sensitive image sensor using 640×480 pixel active-matrix high-efficency electrion emission device2008
Author(s)
N., Negishi, T., Sato, Y., Matsuba, R., Tanaka, T., Nakada, K., Sakemura, Y., Okuda, A., Watanabe, T., Yoshikawa, K., Ogasawara, M., Nanba, S., Okazaki, K., Tanioka, N., Egami, N., Koshida
-
Journal Title
J. Vac. Sci. Technol B. 26
Pages: 711-715
Description
「研究成果報告書概要(欧文)」より
-
-
-
-
-
-
-
-
[Journal Article] Development of a high-resolution active-matrix electron emitter array for application to high-sensitivity image sensing.2007
Author(s)
N. Negishi, Y. Matsuba, R. Tanaka, T. Nakada, K. Sakemura, Y. Okuda, A. Watanabe, T. Yoshikawa, K. Ogasawara, M. Nanba, S. Okazaki, K. Tanioka, N. Egami, and N. Koshida
-
Journal Title
J. Vac. Sci. Technol. B 25
Pages: 661-666
Description
「研究成果報告書概要(和文)」より
Peer Reviewed
-
-
-
-
-
-
-
-
-
[Journal Article] Low Voltage and High Speed Operation of 640X480 Pixel Ac-tive-matrix HEED(High-efficiency Electron Emission Device)Array for HARP Image Sensor.2007
Author(s)
Y. Okuda, T. Sato, Y. Matsuba, R. Tanaka, T. Nakada, K. Sakemura, N. Negishi, A. Watanabe, T. Yoshikawa, K. Ogasawara, M. Nanba, S. Okazaki, K. Tanioka, N. Egami, A. Kobayashi, and N. Koshida
-
Journal Title
Proc. Int. Display Workshop IDW07
Pages: 2165-2168
Description
「研究成果報告書概要(和文)」より
Peer Reviewed
-
-
-
-
[Journal Article] Energy transfer in porous-silicon / laser-dye composite evidenced by polarization memory of photoluminescence2007
Author(s)
A., Chouket, H., Elhouichet, M., Oueslati, H., Koyama, B., Gelloz, N., Koshida
-
Journal Title
Appl. Phys. Lett 91
Pages: 211902/1-211902/3
Description
「研究成果報告書概要(欧文)」より
-
-
[Journal Article] Maternal approaches to pup ultrasonic vocalizations produced by a nanocrystalline silicon thermo-acoustic emitter.2007
Author(s)
A., Uematsu, T, Kikusui, T., Kihara, T., Harada, M., Kato, K., Nakano, O., Murakami, N., Koshida, Y., Takeuchi, Y., Mori
-
Journal Title
Brain Research 1163
Pages: 91-99
Description
「研究成果報告書概要(欧文)」より
-
-
[Journal Article] 1-inch 256×192 Pixel HARP Image Sensor with Active-matrix HEED (in Japanese)2007
Author(s)
M., Namba, K., Miyakawa, T., Watabe, S., Okabe, K., Tanioka, N., Egami, R., Tanaka, T., Nakada, K., Sakemura, Y., Okuda, N., Negishi, A., Watanabe, T., Yoshikawa, K., Ogasawara, A., Kobayashi, K., Ogusu, N., Koshida
-
Journal Title
J. Inst. Image and TV Eng 61
Pages: 387-392
Description
「研究成果報告書概要(欧文)」より
-
[Journal Article] Development of a high-resolution active-matrix electron emitter array for application to high-sensitivity image sensing2007
Author(s)
N., Negishi, Y., Matsuba, R., Tanaka, T., Nakada, K., Sakemura, Y., Okuda, A., Watanabe, T., Yoshikawa, K., Ogasawara, M., Nanba, S., Okazaki, K., Tanioka, N., Egami, N., Koshida
-
Journal Title
J. Vac. Sci. Technol B 25
Pages: 661-666
Description
「研究成果報告書概要(欧文)」より
-
-
-
-
-
[Journal Article] New design principle and Fabrication Process of Silicon 3-dimensional Photonic Crystal Structures2007
Author(s)
D., Hippo, K., Urakawa, Y., Kawata, Y., Tsuchiya, H., Mizuta, N., Koshida, S., Oda
-
Journal Title
Jpn. J. Appl. Phys 46
Pages: 633-637
Description
「研究成果報告書概要(欧文)」より
-
-
-
-
[Journal Article] Synthesis and Optical Properties of Silicon Oxide Nanowires2007
Author(s)
Bernard, Gelloz, Yannick, Coffinier, Billel, Salhi, Nobuyoshi, Koshida, Gilles, Patriarche, Rabah, Boukherroub
-
Journal Title
Mater. Res. Soc. Symp. Proc. Vol. 958, L05
Pages: 10-15
Description
「研究成果報告書概要(欧文)」より
-
[Journal Article] Low Voltage and High Speed Operation of 640X480 Pixel Ac-tive-matrix HEED (High-efficiency Electron Emission Device) Array for HARP Image Sensor2007
Author(s)
Y., Okuda, T., Sato, Y., Matsuba, R., Tanaka, T., Nakada, K., Sakemura, N., Negishi, A., Watanabe, T., Yoshikawa, K., Ogasawara, M., Nanba*, S., Okazaki, K., Tanioka, N., Egami, A., Kobayashi, N., Koshida
-
Journal Title
Proc. Int. Display Workshop
Pages: 2165-2168
Description
「研究成果報告書概要(欧文)」より
-
-
-
-
-
-
[Journal Article] Fabrication of active-matrix high-efficiency electron emission device and its application to high-sensitivity image sensing.2006
Author(s)
N. Negishi, R. Tanaka, T. Nakada, K. Sakemura, Y. Okuda, H. Satoh, A. Watanabe, T. Yoshikawa, K. Ogasawara, M. Nanba, S. Okazaki, K. Tanioka, N. Egami, and N. Koshida
-
Journal Title
J. Vac. Sci. Technol. B 24
Pages: 1021-1025
Description
「研究成果報告書概要(和文)」より
Peer Reviewed
-
-
-
-
-
-
-
-
[Journal Article] Reproduction of mouse-pup ultrasonic vocalizations by nanocrystalline silicon thermoacoustic emitter2006
Author(s)
T., Kihara, T., Harada, M., Kato, K., Nakano, O., Murakami, T., Kikusui, N., Koshida
-
Journal Title
Appl. Phys. Lett 88
Pages: 043902-04
Description
「研究成果報告書概要(欧文)」より
-
-
-
-
-
-
-
[Journal Article] Fabrication of active-matrix high-efficiency electron emission device and its application to high-sensitivity image sensing.2006
Author(s)
N., Negishi, R., Tanaka, T., Nakada, K., Sakemura, Y., Okuda, H., Satoh, A., Watanabe, T., Yoshikawa, K., Ogasawara, M., Nanba, S., Okazaki, K., Tanioka, N., Egami, N., Koshida
-
Journal Title
J. Vac. Sci. Technol. B 24
Pages: 1021-1025
Description
「研究成果報告書概要(欧文)」より
-
-
-
-
-
-
[Presentation] Mechanism of one-directional nano etching in silicon using magnetic-field-assisted anodization2008
Author(s)
D., Hippol, K., Urakawa, Y., Tsuchiya, H., Mizuta, N., Koshida, S., Oda
Organizer
Int. Conf. on Porous Semiconductors Sci. Technol
Place of Presentation
Mallorca, Spain
Year and Date
2008-03-13
Description
「研究成果報告書概要(欧文)」より
-
[Presentation] Polarization memory in enhanced photoluminescence of porous silicon as a trace of energy transfer to embedded laser dye molecules2008
Author(s)
A., Chouket, H., Koyama, B., Gelloz, H., Elhouichet, M., Oueslati, N., Koshida
Organizer
Int. Conf. on Porous Semiconductors Sci. Technol
Place of Presentation
Mallorca, Spain
Year and Date
2008-03-13
Description
「研究成果報告書概要(欧文)」より
-
-
-
-
-
[Presentation] Low Voltage and High Speed Operation of 640X480 Pixel Ac-tive-matrix HEED(High-efficiency Electron Emission Device)Array for HARP Image Sensor.2007
Author(s)
Y. Okuda, T. Sato, Y. Matsuba, R. Tanaka, T. Nakada, K. Sakemura, N. Negishi, A. Watanabe, T. Yoshikawa, K. Ogasawara, M. Nanba, S. Okazaki, K. Tanioka, N. Egami, A. Kobayashi, and N. Koshida
Organizer
Int. Display Workshop Sapporo 2007
Place of Presentation
Sapporo, Japan
Year and Date
2007-12-06
Description
「研究成果報告書概要(和文)」より
-
-
-
-
-
-
-
-
-
-
-
-
-
[Presentation] Development of a high-resolution active-matrix electron emitter array for application to high-sensitivity image sensing(Invited).2007
Author(s)
N. Negishi, Y. Matsuba, R. Tanaka, T. Nakada, K. Sakemura, Y. Okuda, A. Watanabe, T. Yoshikawa, K. Ogasawara, M. Nanba, S. Okazaki, K. Tanioka, N. Egami, and N. Koshida
Organizer
Int. Vac. Nanoelectron. Conf.
Place of Presentation
Chicago, USA
Year and Date
2007-07-11
Description
「研究成果報告書概要(和文)」より
-
-
[Presentation] Development of a super-high sensitive image sensor using 640×480 pixel active-matrix high-efficency electrion emission device (Invited)2007
Author(s)
N., Negishi, T., Sato, Y., Matsuba, R., Tanaka, T., Nakada,. Sakemura, Y., Okuda, A., Watanabe, T., Yoshikawa, K., Ogasawara, M., Nanba, S., Okazaki, K., Tanioka, N., Egami, N., Koshida
Organizer
Int. Vac. Nanoelectron. Conf
Place of Presentation
Chicago, USA
Year and Date
2007-07-11
Description
「研究成果報告書概要(欧文)」より
-
-
-
-
-
-
-
-
-
-
[Presentation] Synthesis and optical properties of silicon oxide nanowires2006
Author(s)
B., Gelloz, Y., Coffinier, B., Salhi, N., Koshida, G., Patriarche, R., Boukherroub
Organizer
Mater. Res. Soc. Int. Symp.
Place of Presentation
Boston, USA.
Year and Date
2006-11-30
Description
「研究成果報告書概要(欧文)」より
-
-
-
-
-
-
[Presentation] Development of an active-matrix "HEED" cold cathode and its application to animage sensor.2006
Author(s)
R. Tanaka, Y. Matsuba, T. Nakada, K. Sakemura, N. Negishi, Y. Okuda, H. Sato, A. Watanabe T. Yoshikawa, K. Ogasawara, M. Nanba, S. Okazaki, K. Tanioka, N. Egami, and N. Koshida.
Organizer
Int. Symp. on Discharges and Electrical Insulation in Vacuum
Place of Presentation
Matsue, Japan
Year and Date
2006-09-20
Description
「研究成果報告書概要(和文)」より
-
[Presentation] Development of an active-matrix "HEED" cold cathode and its application to an image sensor.2006
Author(s)
R., Tanaka, Y., Matsuba, T., Nakada, K., Sakemura, N., Negishi, Y., Okuda, H., Sato, A., Watanabe, T., Yoshikawa, K., Ogasawara, M., Nanba, S., Okazaki, K., Tanioka, N., Egami, N., Koshida
Organizer
Int. Symp. on Discharges and Electrical Insulation in Vacuum
Place of Presentation
Matsue, Japan
Year and Date
2006-09-20
Description
「研究成果報告書概要(欧文)」より
-
-
-
-
-
-
-
-
-
[Presentation] Development of a high-resolution active-matrix electron emitter array for application to high-sensitivity image sensing.2006
Author(s)
N. Negishi, Y. Matsuba, R. Tanaka, T. Nakada, K. Sakemura, K. Sakemura, Y. Okuda, A. Watanabe, T. Yoshikawa, K. Ogasawara, M. Nanba, S. Okazaki, K. Tanioka, N. Egami, N. Koshida
Organizer
Int. Vacuum Nanoelectronics Conf.
Place of Presentation
Guilin, China
Year and Date
2006-07-20
Description
「研究成果報告書概要(和文)」より
-
-
[Presentation] Development of a high-resolution active-matrix electron emitter array for application to high-sensitivity image sensing2006
Author(s)
N., Negishi, Y., Matsuba, R., Tanaka, T., Nakada, K., Sakemura, K., Sakemura, Y., Okuda, A., Watanabe, T., Yoshikawa, K., Ogasawara, M., Nanba, S., Okazaki, K., Tanioka, N., Egami, N., Koshida
Organizer
Int. Vacuum Nanoelectronics Conf.
Place of Presentation
Guilin, China
Year and Date
2006-07-20
Description
「研究成果報告書概要(欧文)」より
-
-
-
-
[Presentation] Fabrication of silicon 3D photonic crystal structures in 100nm scale using double directional etchings method.2006
Author(s)
D., Hippo, K., Urakawa, Y., Kawata, Y., Tsuchiya, H., Mizuta, N., Koshida, S., Oda
Organizer
Conference on Lasers and Electro-Optics'06
Place of Presentation
Los Angeles, USA.
Year and Date
2006-05-23
Description
「研究成果報告書概要(欧文)」より
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
