Surface Forces between Multi-layers in Nano-scale and Application to MEMS/NEMS

2008 Fiscal Year Final Research Report

• Project/Area Number: 18360078
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Design engineering/Machine functional elements/Tribology
• Research Institution: Tottori University
• Principal Investigator: MATSUOKA Hiroshige Tottori University, 大学院・工学研究科, 准教授 (10314569)
• Co-Investigator(Kenkyū-buntansha): FUKUI Shigehisa 鳥取大学, 大学院・工学研究科, 教授 (40273883)
• Project Period (FY): 2006 – 2008
• Keywords: ナノ複合膜 / 表面・界面物性 / ナノマシン / 機械要素 / 超精密計測 / ヘッド・ディスク・インターフェース / 原子間力顕微鏡 / ナノトライボロジー

Research Abstract

複数の任意の物質で構成されるナノ複合膜間の表面間相互作用の特性解明とその応用を目指し、理論的取扱い手法, 計測手法を開発するとともに、実際の微小機械、具体的には、磁気ディスクのヘッド・ディスク・インターフェース(HDI)および原子間力顕微鏡(AFM)のカンチレバー振動の特性解析に応用し、それらの挙動に与える影響を明らかにした。

Research Products

• [Journal Article] A new evaluation method of surface energy of ultra-thin film (2009)
  • Author(s): H. Matsuoka, K. Ono and S. Fukui
  • Journal Title: Microsyst Technol (Published online) Pages: DOI10.1007/s00542-008-0762-5
  • Peer Reviewed
• [Journal Article] Three-dimensional deformation analyses of the ultra-thin liquid film surface (Linearized analyses for the steady state) (2009)
  • Author(s): S. Fukui, K. Hitomi, S. Shimizu, F. Saeki and H. Matsuoka
  • Journal Title: Microsyst Technol (Published online) Pages: DOI10.1007/s00542-008-0764-3
  • Peer Reviewed
• [Journal Article] Dynamic analysis schemes for flying head sliders over discrete track media (2008)
  • Author(s): S. Fukui, T. Kanamaru and H. Matsuoka
  • Journal Title: IEEE Trans. on Magnetics Vol.44, Pt.2 Pages: 3671-3674
  • Peer Reviewed
• [Journal Article] Linearized Analyses of Deformation of the Ultra-thin Lubricant Films under Gas Pressures by the Long Wave Equation (2007)
  • Author(s): S. Fukui, S. Shimizu, K. Yamane, and H. Matsuoka
  • Journal Title: Microsyst Technol Vol.13(Online First : DOI 10.1007/s00542-006-0359-9) Pages: 1339-1345
  • Peer Reviewed
• [Presentation] Lubricant Deformation Analyses Caused by Gas Stresses and Surface Tension (2009)
  • Author(s): F. Saeki, S. Fukui and H. Matsuoka
  • Organizer: Asia Pacific Magnetic Recording Conference
  • Place of Presentation: Singapore
  • Year and Date: 20090100
• [Presentation] A new evaluation method of surface energy of ultra-thin film (2008)
  • Author(s): H. Matsuoka, K. Ono and S. Fukui
  • Organizer: ASME Information Storage and Processing Systems Conference
  • Place of Presentation: Santa Clara, CA
  • Year and Date: 20080616-17
• [Presentation] Three-dimensional deformation analyses of the ultra-thin liquid film surface (Linearized analyses for the steady state) (2008)
  • Author(s): S. Fukui, K. Hitomi, S. Shimizu, F. Saeki and H. Matsuoka
  • Organizer: ASME Information Storage and Processing Systems Conference
  • Place of Presentation: Santa Clara, CA
  • Year and Date: 20080616-17
• [Presentation] A new contact model for head disk interface (HDI) with ultra-thin liquid film and ultra-small spacing (2008)
  • Author(s): H. Matsuoka, H. Kokumai and S. Fukui
  • Organizer: Digest of Intermag Europe(HO-13)
  • Place of Presentation: Madrid
  • Year and Date: 20080000
• [Presentation] Dynamic analysis schemes for flying head sliders over discrete track media (2008)
  • Author(s): S. Fukui, T. Kanamaru and H. Matsuoka
  • Organizer: Digest of Intermag Europe(GF-05)
  • Place of Presentation: Madrid
  • Year and Date: 20080000
• [Presentation] Experimental study on effects of contact angle on static and dynamic characteristics of a liquid meniscus bridge in macroscopic scale (2007)
  • Author(s): H. Matsuoka, S. Fukui, K. Inada and K. Ishihara
  • Organizer: Proceedings of the STLE/ASME International Joint Tribology Conference (IJTC2007)
  • Place of Presentation: San Diego, California, USA
  • Year and Date: 20071022-24
• [Presentation] Deformation characteristics of the ultrathin liquid film surface considering the effects of polar endgroups (2007)
  • Author(s): S. Fukui, S. Shimizu, K. Yamane and H. Matsuoka
  • Organizer: Proceedings of the STLE/ASME International Joint Tribology Conference (IJTC2007)
  • Place of Presentation: San Diego, California, USA
  • Year and Date: 20071022-24
• [Presentation] Molecular gas-film lubrication analyses under fixed finite-width slider- A comparison between the CIP method and linearized analyses (2006)
  • Author(s): T. Kanamaru, K. Yamane, H. Mastuoka and S. Fukui
  • Organizer: Proceedings of The Third Asia International Conference on Tribology
  • Place of Presentation: Kanazawa, JAPAN
  • Year and Date: 20061016-19
• [Presentation] Experimental study on vibration transfer characteristics of a liquid meniscus bridge (2006)
  • Author(s): K. Inada, H. Mastuoka and S. Fukui
  • Organizer: Proceedings of The Third Asia International Conference on Tribology
  • Place of Presentation: Kanazawa, JAPAN
  • Year and Date: 20061016-19
• [Presentation] Time evolution analyses of ultra-thin liquid film surface by the long wave equation (Influences by initial/boundary configurations and physical parameters of the liquid surface) (2006)
  • Author(s): S. Shimizu, K. Yamane, H. Mastuoka and S. Fukui
  • Organizer: Proceedings of The Third Asia International Conference on Tribology
  • Place of Presentation: Kanazawa, JAPAN
  • Year and Date: 20061016-19
• [Presentation] A data correction method for the dynamic measurements by the optical lever AFM (Effect for concentrated mass and spring at the cantilever end) (2006)
  • Author(s): S. Suyama, H. Mastuoka and S. Fukui
  • Organizer: Proceedings of The Third Asia International Conference on Tribology
  • Place of Presentation: Kanazawa, JAPAN
  • Year and Date: 20061016-19
• [Presentation] A data correction method for the dynamic measurements by the optical lever AFM (2006)
  • Author(s): H. Matsuoka, S. Suyama, Y. Hoshina and S. Fukui
  • Organizer: ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2006)
  • Place of Presentation: Santa Clara, CA(S17-03)
  • Year and Date: 20060621-23
• [Presentation] Experimental study on dynamic characteristics of a liquid meniscus bridge (2006)
  • Author(s): H. Matsuoka, K. Inada, A. Yamaguchi and S. Fukui
  • Organizer: ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2006)
  • Place of Presentation: Santa Clara, CA(S02-05)
  • Year and Date: 20060621-23
• [Presentation] Linearized analyses of deformation of the ultra-thin lubricant films under gas pressures by the long wave equation (2006)
  • Author(s): S. Fukui, S. Shimizu, K. Yamane and H. Matsuoka
  • Organizer: ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2006)
  • Place of Presentation: Santa Clara, CA(S14-01)
  • Year and Date: 20060621-23
• [Remarks]
  • URL: http://www.damp.tottori-u.ac.jp/~lab2/index_j.html
• [Remarks] ASME Information Storage and ProcessingSystems (ISPS) Division, Best Tribology and Head-Disk Interface Track Paper Award (米国機械学会 情報ストレージ・処理システム部門セッション優秀論文賞)受賞者 : 松岡広成、小野克典、福井茂壽受賞日 : 2008年6月16日受賞論文 : A New Evaluation Method ofSurface Energy of Ultra-thin Film
• [Remarks] 船井情報科学振興賞受賞者 : 松岡広成受賞日 : 2009年4月18日受賞対象 : 液体超薄膜の力学特性の解明と超高密度記録への応用
• [Remarks] 日本機械学会船井特別賞受賞者 : 福井茂壽受賞日 : 2009 年3 月24 日受賞対象 : 分子流体潤滑理論の構築とその情報ナノシステム作動性解析への展開