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2007 Fiscal Year Final Research Report Summary

3D microscopy based on optical frequency comb by RF control

Research Project

Project/Area Number 18360164
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionTokyo University of Agriculture and Technology

Principal Investigator

KUROKAWA Takashi  Tokyo University of Agriculture and Technology, Institute of Symbiotic Science and Technology, Professor (40302913)

Co-Investigator(Kenkyū-buntansha) SHIODA Tatsutoshi  Tokyo University of Agriculture and Technology, Institute of Symbiotic Science and Technology, Assistant Professor (10376858)
TAKEDA Mitsuo  The University of Electro-Communications, Department of Information & Communication Engineering, Professor (00114926)
Project Period (FY) 2006 – 2007
Keywordsmicroscopy / optical frequency comb / interferometer / OCT / 干渉計 / トモグラフィ
Research Abstract

In our previous report, the optical frequency comb generator consisting of two phase modulators in tandem we used generated the narrow bandwidth of the comb spectrum, only 2 nm, and resulted in the limited resolution up to 300μm. And some noises of many side-lobes appeared around the interferometric peaks due to a rectangular frequency comb spectrum. Furthermore, it took a long time for the data acquisition because the point-to-point scanning was used in a fiber-optic interferometer.
To improve the performance of our previous system, we introduced new functions of a broad band frequency comb and a line-type image sensor to realize a frequency comb-based interferometric microscope. One of the improvements in the proposed system is that a broadband frequency comb spectrum of over 10 nm was obtained by combining a waveguide type-frequency comb generator^<6-8)> consisting of the phase modulator installed in the Fabry-Perot cavity and a subsequent wavelength equalizer^<9)>. The depth resolut … More ion is finally improved up to 35 μm, and the side-lobes in the interferometric signals also disappeared. Another important improvement is to realize a high-speed observation of three-dimensional images by the use of a line type-image sensor for capturing a line image in a horizontal direction at a time.
The measurement resolution narrowed finally to 35 μm by introducing the waveguide-type frequency comb generator and the wavelength equalizer. Furthermore, introducing the line image sensor can obtain the simultaneous measurement of the whole horizontal cross sectional image of the interferometric signal. We successfully demonstrated the 3 dimensional surface profilometry of a Japanese 10-yen coin and observation of a cross sectional tomography image of transparent thin films by varying the comb frequency interval without mechanical shift. The dynamic range in the depth direction was about 1.1 mm and the measurement resolution was 35μm. The standard deviation of seven times thickness measurements was 5μm. Less

  • Research Products

    (33 results)

All 2008 2007 2006 2005

All Journal Article (8 results) (of which Peer Reviewed: 4 results) Presentation (24 results) Patent(Industrial Property Rights) (1 results) (of which Overseas: 1 results)

  • [Journal Article] 1 MHz-resolution spectroscopy based on light frequency sweeping using a single-sideband optical modulator2007

    • Author(s)
      T. Shioda, T. Yamamoto, T. Sugimoto, Y. Tanaka, K. Higuma, and T. Kurokawa
    • Journal Title

      Japanese Journal of Applied Physics 46

      Pages: 3626-3629

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Frequency-comb-based Interference Microscope with a Line-type Image Sensor2007

    • Author(s)
      S. Choi, T. Shioda, Y. Tanaka, and T. Kurokawa
    • Journal Title

      Japanese Journal of Applied Physics 46

      Pages: 6842-6847

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Application of Faraday rotator reflector and Faraday rotator transmitter to prorilometry and tomography2007

    • Author(s)
      T. Shioda, D. Moteki, S. Choi, Y. Tanaka and T. Kurokawa
    • Journal Title

      Japanese Journal of Applied Physics 46

      Pages: 6848-6852

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] 1 MHz-resolution spectroscopy based on light frequency sweeping using a single-sideband optical modulator2007

    • Author(s)
      T., Shioda, T., Yamamoto, T., Sugimoto, Y., Tanaka, K., Higuma, T., Kurokawa
    • Journal Title

      Japanese Journal of Applied Physics 46 6A)

      Pages: 3626-3629

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Frequency-comb-based Interference Microscope with a Line-type Image Sensor2007

    • Author(s)
      S., Choi, T., Shioda, Y., Tanaka, T., Kurokawa
    • Journal Title

      Japanese Journal of Applied Physics 46 10A)

      Pages: 6842-6847

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Application of Faraday rotator reflector and Faraday rotator transmitter to prorilometry and tomography2007

    • Author(s)
      T., Shioda, D., Moteki, S., Choi, Y., Tanaka, T., Kurokawa
    • Journal Title

      Japanese Journal of Applied Physics 46 10A)

      Pages: 6848-6852

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Frequency-comb-based interferometer for profilometry and tomography2006

    • Author(s)
      S. Choi, M. Yamamoto, D Moteki, T. Shioda, Y. Tanaka, and T. Kurokawa
    • Journal Title

      Optics Letters 31

      Pages: 1976-1978

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Frequency-comb-based interferometer for profilometry and tomography2006

    • Author(s)
      S., Choi, M., Yamamoto, D., Moteki, T., Shioda, Y., Tanaka, T. Kurokawa
    • Journal Title

      Optics Letters 31 13)

      Pages: 1976-1978

    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] supercontinuum frequency comb generation by optical pulse synthesizer and its application to interferometry2008

    • Author(s)
      N., Tamura, S., Choi, T., Shioda, Y., Tanaka, T., Kurokawa
    • Organizer
      Annual Meeting of JSAP, 29a-ZB-16
    • Place of Presentation
      Chiba
    • Year and Date
      20080300
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] 光パルスシンセサイザを用いたSCコム光の発生と干渉計測への応用2008

    • Author(s)
      田村、崔、塩田、田中、黒川
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日大理工学部(千葉)
    • Year and Date
      2008-03-29
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 光周波数コムを用いた3次元顕微鏡(招待講演)2007

    • Author(s)
      崔、黒川
    • Organizer
      計測自動制御学会中部支部光波応用技術研究会
    • Place of Presentation
      名古屋大学
    • Year and Date
      20071200
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 3D microscopy using optical frequency comb (Invited paper)2007

    • Author(s)
      S., Choi, T., Kurokawa
    • Organizer
      The Society of Instrument and Control Engineers, Chubu Chapter
    • Place of Presentation
      Koha-oyo-gijutsu-kenkyukai Nagoya Univ.
    • Year and Date
      20071200
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] 25 GHz繰り返しコム光の短光パルス整形によるスーパーコンティニウム光発生2007

    • Author(s)
      崔、河辺、塩田、田中、黒川
    • Organizer
      日本光学会年次学術講演会(OPJ2007)
    • Place of Presentation
      大阪
    • Year and Date
      20071100
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 25 GHz supercontinuum frequency comb generation by optical pulse shaping2007

    • Author(s)
      S., Choi, R., Kobe, T., Shioda, Y., Tanaka, T., Kurokawa
    • Organizer
      Optics Photonics Japan 2007 (OPJ2007), 26aD5
    • Place of Presentation
      Osaka
    • Year and Date
      20071100
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Frequency comb based interference microscope with a linetype image sensor2007

    • Author(s)
      S., Choi, T., Shioda, Y., Tanaka, T., Kurokawa
    • Organizer
      CLEO-PR2007, ThG1-5
    • Place of Presentation
      Seoul
    • Year and Date
      20070800
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] High-resolution spectroscopy using optical phase modulator and heterodyne-detection2007

    • Author(s)
      T., Shioda, T., Mori, T., Sugimoto, Y., Tanaka, T., Kurokawa
    • Organizer
      CLEO-PR2007, WG3-6
    • Place of Presentation
      Seoul
    • Year and Date
      20070800
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] 光周波数コムとリニア・イメージセンサを用いた3次元計測2007

    • Author(s)
      崔、板垣、茂手木、塩田、田中、黒川
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      神奈川
    • Year and Date
      20070300
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Frequency comb based interference microscope with a linetype image sensor2007

    • Author(s)
      S. Choi, T. Shioda, Y. Tanaka, T. Kurokawa
    • Organizer
      OLEO-PR2007
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      2007-08-30
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] High-resolution spectroscopy using optical phase modulator and heterodyne-detection2007

    • Author(s)
      T. Shioda, T. Mori, T. Sugimoto, Y. Tanaka, T. Kurokawa
    • Organizer
      CLEO-PR2007
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      2007-08-29
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] 周波数コムとライセンサを用いた形状計測2006

    • Author(s)
      崔、塩田、田中、黒川
    • Organizer
      21世紀COEプログラム第3回合同シンポジウム
    • Place of Presentation
      東京
    • Year and Date
      20061200
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Optical metrology using frequency comb and line-type image sensor2006

    • Author(s)
      S., Choi, T., Shioda, Y., Tanaka, T., Kurokawa
    • Organizer
      21 century COE program, 3rd joint symposium
    • Place of Presentation
      EUC
    • Year and Date
      20061200
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Frequency Comb-based Interferometry Using a Line-type Image Sensor2006

    • Author(s)
      S. Choi, T. Sugimoto, D. Moteki, T. Shioda, Y. Tanaka, and T. Kurokawa,
    • Organizer
      12th Microoptics Conference
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      20060900
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Effect of Fraday Rotator Elements in Fiber-optic Interferometer2006

    • Author(s)
      D. Moteki, T. Shioda, Y. Tanaka, and T. Kurokawa
    • Organizer
      12th Microoptics Conference
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      20060900
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Frequency Comb-based Interferometry Using a Line-type Image Sensor2006

    • Author(s)
      S., Choi, T., Sugimoto, D., Moteki, T., Shioda, Y., Tanaka, T., Kurokawa
    • Organizer
      12th Microoptics Conference, 2006, H-3
    • Place of Presentation
      Seoul
    • Year and Date
      20060900
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Effect of fraday rotator elements in fiber-optic interferometer2006

    • Author(s)
      D., Moteki, T., Shioda, Y., Tanaka, T., Kurokawa
    • Organizer
      12th Microoptics Conference, P-19
    • Place of Presentation
      Seoul
    • Year and Date
      20060900
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] 光周波数コム光源を用いた形状計測と膜厚測定2006

    • Author(s)
      崔、杉本、茂手木、塩田、田中、黒川
    • Organizer
      第37回光波センシング技術研究会
    • Place of Presentation
      東京
    • Year and Date
      20060600
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] ファラデー回転素子による光ファイバ干渉計の計測精度の向上2006

    • Author(s)
      茂手木、塩田、田中、黒川
    • Organizer
      第37回光波センシング技術研究会
    • Place of Presentation
      東京
    • Year and Date
      20060600
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Interferometry for profilometry and tomography using frequency comb generator2006

    • Author(s)
      S., Choi, T., Sugimoto, D., Moteki, T., Shioda, Y., Tanaka, T., Kurokawa
    • Organizer
      37th meeting on lightwave sensing technology, LST37-6
    • Place of Presentation
      Tokyo
    • Year and Date
      20060600
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Improvement of measurement accuracy by the use of Faraday rotator element in optical fiber interferometer2006

    • Author(s)
      D., Moteki, T., Shioda, Y., Tanaka, T., Kurokawa
    • Organizer
      37th meeting on lightwave sensing technology, LST37-9
    • Place of Presentation
      Toky
    • Year and Date
      20060600
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Interferometer for profilometry and tomography using waveguide-type frequency combgenerator2006

    • Author(s)
      S. Choi, D. Moteki, T. Sugimoto, T. Shioda, Y. Tanaka, and T. Kurokwa
    • Organizer
      CLEO/QELS2006
    • Place of Presentation
      Long Beach
    • Year and Date
      20060500
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Interferometer for profilometry and tomography using waveguide-type frequency comb generator2006

    • Author(s)
      S., Choi, D., Moteki, T., Sugimoto, T., Shioda, Y., Tanaka, and T., Kurokwa
    • Organizer
      CLEO/QELS2006, CMY7
    • Place of Presentation
      Long Beach
    • Year and Date
      20060500
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Interferometry using a frequency comb generator and line-type image sensor2006

    • Author(s)
      S., Choi, Y., Itagaki, D., Moteki, T., Shioda, Y., Tanaka, T., Kurokawa
    • Organizer
      Annual Meeting of JSAP, 28p-S-14
    • Place of Presentation
      Kanagawa
    • Year and Date
      20060300
    • Description
      「研究成果報告書概要(欧文)」より
  • [Patent(Industrial Property Rights)] 形状測定方法、形状測定装置および周波数コム光発生装置2005

    • Inventor(s)
      黒川隆志, 田中洋介, 塩田達俊
    • Industrial Property Rights Holder
      東京農工大学
    • Industrial Property Number
      PCT/JP2005/015309
    • Filing Date
      2005-08-17
    • Description
      「研究成果報告書概要(和文)」より
    • Overseas

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Published: 2010-02-04  

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