Induced Charge Evaluation for the Development of Particle Detectors Fabricated on Silicon Carbide

2008 Fiscal Year Final Research Report

• Project/Area Number: 18360458
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Nuclear engineering
• Research Institution: Japan Atomic Energy Agency
• Principal Investigator: OHSHIMA Takeshi Japan Atomic Energy Agency, 量子ビーム応用研究部門, 研究主幹 (50354949)
• Co-Investigator(Kenkyū-buntansha): ONODA Shinobu 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究職 (30414569)
• Co-Investigator(Renkei-kenkyūsha): ITOH Hisayoshi 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究主席 (40354930) ; KAMIYA Tomihiro 独立行政法人日本原子力研究開発機構, 放射線高度利用施設部, 研究主幹 (70370385) ; SATOH Takahiro 独立行政法人日本原子力研究開発機構, 放射線高度利用施設部, 研究職 (10370404) ; NAKANO Itsuo 岡山大学, 自然科学研究所, 教授 (90133024)
• Project Period (FY): 2006 – 2008
• Keywords: 放射線理工学 / 耐放射線性検出器

Research Abstract

耐放射線性炭化ケイ素(SiC)粒子検出器開発に必要な基礎データとして、ベータ線、アルファ線及びイオン入射により、SiCダイオードに発生する電荷の収集効率(CCE)を調べた。アルファ線等では、ほぼ100%のCCEを観測しSiCの検出器応用の有効性を実証した。一方、Niのような重イオンではSiCの物性に起因するCCEの低下が見出された。更に、電子線等により損傷を加えたSiCダイオードのCCE低下を調べ、優れた耐性を明らかにした。

Research Products

• [Journal Article] Reduction of Effective Carrier Density and Charge Collection Efficiency in SiC Devices due to Radiations (2009)
  • Author(s): S. Onoda, N. Iwamoto, T. Hirao, K. Kawano, K. Kojima, T. Ohshima
  • Journal Title: American Institute of Physics Conference Proceedings 1099 Pages: 1010-1013
  • Peer Reviewed
• [Journal Article] Charge Collection Properties of 6H-SiC Diodes by Wide Variety of Charged Particles up to Several Hundreds MeV (2009)
  • Author(s): S. Onoda, N. Iwamoto, M. Murakami, T. Ohshima, T. Hirao, K. Kojima, K. Kawano, I. Nakano
  • Journal Title: Materials Science Forum 615-617 Pages: 861-864
  • Peer Reviewed
• [Journal Article] Transient Response to High Energy Heavy Ions in 6H-SiC n+p Diodes (2009)
  • Author(s): S. Onoda, T. Ohshima, T. Hirao, S. Hishiki, N. Iwamoto, K. Kojima, K. Kawano
  • Journal Title: Materials Science Forum 600-603 Pages: 1039-1042
  • Peer Reviewed
• [Journal Article] Degradation of Charge Collection Efficiency for 6H-SiC Diodes by Electron Irradiation (2009)
  • Author(s): N. Iwamoto, S. Onoda, S. Hishiki, T. Ohshima, M. Murakami, I. Nakano, K. Kawano
  • Journal Title: Materials Science Forum 600-603 Pages: 1043-1046
  • Peer Reviewed
• [Journal Article] NIEL Analysis of Charge Collection Efficiency in Silicon Carbide Diodes Damaged by Gamma-Rays, Electrons and Protons (2008)
  • Author(s): T. Ohshima, S. Onoda, N. Iwamoto, K. Kojima, K. Kawano
  • Journal Title: Proc. the 8th International Workshop on Radiation Effects on Semiconductor Devices for Space Applications Pages: 175-178
• [Journal Article] Impact of Auger Recombination on Charge Collection of a 6H-SiC Diode by Heavy Ions (2007)
  • Author(s): S. Onoda, T. Ohshima, T. Hirao, K. Mishima, S. Hishiki, N. Iwamoto, K. Kawano
  • Journal Title: IEEE Transactions on Nuclear Science 54 Pages: 2706-2713
  • Peer Reviewed
• [Journal Article] Decrease of Charge Collection due to Displacement Damage by Gamma Rays in a 6H-SiC Diode (2007)
  • Author(s): S. Onoda, T. Ohshima, T. Hirao, K. Mishima, S. Hishiki, N. Iwamoto, K. Kojima, K. Kawano
  • Journal Title: IEEE Transactions on Nuclear Science 54 Pages: 1953-1960
  • Peer Reviewed
• [Journal Article] Decrease in Ion Beam Induced Charge of 6H-SiC Diodes (2007)
  • Author(s): S. Onoda, N. Iwamoto, T. Ohshima, T. Hirao, K. Kawano
  • Journal Title: Proc. of the 26th Sympo. on Mater. Sci. and Engineer. Res. Center of Ion Beam Tech. Hosei Univ. Pages: 35-40
• [Journal Article] Charge Collection Efficiency of 6H-SiC Diodes Damaged by Electron Irradiation (2007)
  • Author(s): N. Iwamoto, T. Ohshima, S. Onoda, S. Hishiki, M. Murakami, I. Nakano, K. Kawano
  • Journal Title: Proc. of the 26th Sympo. on Mater. Sci. and Engineer. Res. Center of Ion Beam Tech. Hosei Univ. Pages: 27-30
• [Journal Article] Degradation of Charge Collection Efficiency Obtained for 6H-SiC n+p Diodes Irradiated with Gold Ions (2007)
  • Author(s): T. Ohshima, T. Satoh, M. Oikawa, S. Onoda, S. Hishiki, T. Hirao, T. Kamiya, T. Yokoyama, A. Sakamoto, R. Tanaka, I Nakano, G. Wagner, H. Itoh
  • Journal Title: Materials Science Forum 556-557 Pages: 913-916
  • Peer Reviewed
• [Journal Article] Transient Currents Generated by Heavy Ions With Hundreds of MeV (2006)
  • Author(s): S. Onoda, T. Hirao, J. S. Laird, K. Mishima, K. Kawano, H. Itoh
  • Journal Title: IEEE Transactions on Nuclear Science 53 Pages: 3731-3737
  • Peer Reviewed
• [Journal Article] Analysis of Transient Current in SiC Diodes Irradiated with MeV Ions (2006)
  • Author(s): S. Onoda, T. Ohshima, T. Hirao, S. Hishiki, K. Mishima, N. Iwamoto, T. Kamiya, K. Kawano
  • Journal Title: Proceedings of 7th International Workshop on Radiation Effects on Semiconductor Devices for Space Application Pages: 115-
  • Peer Reviewed
• [Journal Article] Observation of Charge Collection Efficiency of 6H-SiC n+p Diodes Irradiated with Au-Ions (2006)
  • Author(s): N. Iwamoto, T. Ohshima, T. Satoh, M. Oikawa, S. Onoda, S. Hishiki, T. Hirao, T. Kamiya, T. Yokoyama, A. Sakamoto, R. Tanaka, I. Nakano, G. Wagner, H. Itoh, K. Kawano
  • Journal Title: Proceedings of 7th International Workshop on Radiation Effects on Semiconductor Devices for Space Application Pages: 185-
  • Peer Reviewed
• [Journal Article] Comparative Study of Transient Current Induced in SiC p+n and n+p Diodes by Heavy Ion Microbeams
  • Author(s): T. Ohshima, N. Iwamoto, S. Onoda, T. Kamiya, K. Kawano
  • Journal Title: Nucl. Inst. Meth. B (in press)
  • Peer Reviewed
• [Presentation] NIEL Analysis of Charge Collection Efficiency in Silicon Carbide Diodes Damaged by Gamma-Rays, Electrons and Protons (2008)
  • Author(s): T. Ohshima, S. Onoda, N. Iwamoto, K. Kojima, K. Kawano
  • Organizer: The 8th International Workshop on Radiation Effects on Semiconductor Devices for Space Applications (RASEDA)
  • Place of Presentation: Tsukuba (Japan)
  • Year and Date: 20081215-17
• [Presentation] Charge Collection Properties of 6H-SiC Diodes by Wide Variety of Charged Particles up to Several Hundreds MeV (2008)
  • Author(s): S. Onoda, N. Iwamoto, M. Murakami, T. Ohshima, T. Hirao, K. Kojima, K. Kawano, I. Nakano
  • Organizer: 7th European Conference on Silicon Carbide and Related Materials (ECSCRM)
  • Place of Presentation: Barcelona(Spain)
  • Year and Date: 20080907-11
• [Presentation] 数百MeV 級高エネルギー重イオンによる6H-SiCダイオードの電荷収集効率の測定 (2008)
  • Author(s): 小野田忍、大島武、岩本直也、平尾敏雄、児島一聡、河野勝泰
  • Organizer: 008年秋季第69回応用物理学会学術講演会
  • Place of Presentation: 春日井(日本)
  • Year and Date: 20080902-05
• [Presentation] Reduction of Effective Carrier Density and Charge Collection Efficiency in SiC Devices due to Radiations (2008)
  • Author(s): S. Onoda, N. Iwamoto, T. Hirao, K. Kawano, K. Kojima, T. Ohshima
  • Organizer: 20th International Conference on the Application of Accelerators in Research and Industry (CAARI)
  • Place of Presentation: Fort Worth(USA)
  • Year and Date: 20080810-15
• [Presentation] Comparative Study of Transient Current Induced in SiC p+n and n+p Diodes by Heavy Ion Microbeams (2008)
  • Author(s): T. Ohshima, N. Iwamoto, S. Onoda, T. Kamiya, K. Kawano
  • Organizer: 11th International Conference on Nuclear Microprobe Technology and Applications (ICNMTA)
  • Place of Presentation: Debrecen(Hungary)
  • Year and Date: 20080720-25
• [Presentation] Degradation of Charge Collection Efficiency for 6H-SiC Diodes by Electron Irradiation (2007)
  • Author(s): N. Iwamoto, S. Onoda, S. Hishiki, T. Ohshima, M. Murakami, I. Nakano, K. Kawano
  • Organizer: Int. Conf. on Silicon Carbide and Related Materials 2007
  • Place of Presentation: Otsu (Japan)
  • Year and Date: 20071014-19
• [Presentation] Transient Response to High Energy Heavy Ions in 6H-SiC n+p diodes (2007)
  • Author(s): S. Onoda, T. Ohshima, T. Hirao, S. Hishiki, N. Iwamoto, K. Kojima, K. Kawano
  • Organizer: Int. Conf. on Silicon Carbide and Related Materials 2007
  • Place of Presentation: Otsu (Japan)
  • Year and Date: 20071014-19
• [Presentation] 電子線照射された6H-SiC pnダイオードの電荷収集効率 (2007)
  • Author(s): 岩本直也、小野田忍、菱木繁臣、大島武、村上允、中野逸夫、河野勝泰
  • Organizer: 2007年(平成19年)秋季第68回応用物理学会学術講演会
  • Place of Presentation: 北海道(日本)
  • Year and Date: 20070904-08
• [Presentation] 高エネルギー重イオンによるTIBIC測定技術の開発II (2007)
  • Author(s): 小野田忍、平尾敏雄、菱木繁臣、大島武
  • Organizer: 2007年(平成19年)秋季第68回応用物理学会学術講演会
  • Place of Presentation: 北海道(日本)
  • Year and Date: 20070904-08
• [Presentation] Decrease of Charge Collection Due to Displacement Damage by Gamma Rays in a 6H-SiC Diodes (2007)
  • Author(s): S. Onoda, T. Ohshima, T. Hirao, K. Mishima, S. Hishiki, N. Iwamoto, K. Kojima, K. Kawano
  • Organizer: 2007 IEEE Nuclear and Space Radiation Effects Conference
  • Place of Presentation: Hawaii (USA)
  • Year and Date: 20070723-27
• [Presentation] 電子線照射により損傷を導入した6H-SiCダイオードの電荷収集効率 (2007)
  • Author(s): N. Iwamoto, T. Ohshima, S. Onoda, S. Hishiki, M. Murakami, I. Nakano, K. Kawano
  • Organizer: 第26回法政大学イオンビーム工学研究所シンポジウム
  • Place of Presentation: 東小金井(日本)
  • Year and Date: 2007-12-13
• [Presentation] 6H-SiCダイオードにおけるイオンビーム誘起電荷量の低下 (2007)
  • Author(s): 小野田忍, 岩本直也, 大島武, 平尾敏雄,河野勝泰
  • Organizer: 第26回法政大学イオンビーム工学研究所シンポジウム
  • Place of Presentation: 東小金井(日本)
  • Year and Date: 2007-12-13
• [Presentation] Analysis of Transient Current in SiC Diodes Irradiated with MeV Ions (2006)
  • Author(s): S. Onoda, T. Ohshima, T. Hirao, S. Hishiki, K. Mishima, N. Iwamoto, T. Kamiya, K. Kawano
  • Organizer: 7th International Workshop on Radiation Effects on Semiconductor Devices for Space Application
  • Place of Presentation: Takasaki(Japan)
  • Year and Date: 20061200
• [Presentation] Observation of Charge Collection Efficiency of 6H-SiC n+p Diodes Irradiated with Au-Ions (2006)
  • Author(s): N. Iwamoto, T. Ohshima, T. Satoh, M. Oikawa, S. Onoda, S. Hishiki, T. Hirao, T. Kamiya, T. Yokoyama, A. Sakamoto, R. Tanaka, I. Nakano, G. Wagner, H. Itoh, K. Kawano
  • Organizer: 7th International Workshop on Radiation Effects on Semiconductor Devices for Space Application
  • Place of Presentation: Takasaki (Japan)
  • Year and Date: 20061200
• [Presentation] Transient Currents Generated by Heavy Ions With Hundreds of MeV (2006)
  • Author(s): S. Onoda, T. Hirao, J. S. Laird, K. Mishima, K. Kawano, H. Itoh
  • Organizer: 2006 IEEE Nuclear and Space Radiation Effects Conference
  • Place of Presentation: Florida(USA)
  • Year and Date: 20060717-21