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2008 Fiscal Year Final Research Report

Reduction of resistance of ZnO film by the microwave surface wave hydrogen plasma

Research Project

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Project/Area Number 18560025
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionToyo University

Principal Investigator

KASHIWAGI Kunihiro  Toyo University, 工学部, 教授 (30058094)

Co-Investigator(Kenkyū-buntansha) YOSHIDA Yasuhiko  東洋大学, 工学部, 教授 (80134500)
Project Period (FY) 2006 – 2008
Keywords低抵抗ZnO薄膜 / 透明導電膜 / マイクロ波表面波 / H_2 プラズマ / P型ZnO
Research Abstract

通常ZnOは化学量論比上の結合では、透明で高い電気的絶縁性を持っている。イオンプレーティング法で形成されたZnO膜にマイクロ波表面波(1000W)で励起したH_2 プラズマを30(sec)程度照射する事で、膜の可視領域における光学的透過率を下げることなく、また他の種々な金属元素をドープすることなく電気的な抵抗率を~10^<-3>(Ωcm)まで下げる事ができた。よってZnOの透明導電膜としての新しい応用が可能である。

  • Research Products

    (30 results)

All 2008 2007 2006 Other

All Journal Article (12 results) (of which Peer Reviewed: 12 results) Presentation (18 results)

  • [Journal Article] Optical Thin Film Coating Having High Damage Resistance in Near-Sttoichiometric MgO-Doped LiTAO_32008

    • Author(s)
      R.TATENO, K.KASHIWAGI
    • Journal Title

      Japanese Journal of Applied Physics 20(6)

      Pages: 6784-6786

    • Peer Reviewed
  • [Journal Article] Ultraviolet irradiation Effect on and Depth Profiles in X-ray Photoelectron Spectra of Poly(vinylphyridine)Thin Film2008

    • Author(s)
      S.NISHIYAMA, M.TAJIMA, Y.YOSHIDA (5), et.al.
    • Journal Title

      Japanese Journal of Applied Physics 47(1)

      Pages: 432-437

    • Peer Reviewed
  • [Journal Article] Microstructure and randaom magnetic anisotropy in Fe-Ni based nanocrystalline thin filmas2008

    • Author(s)
      S.THOMAS, S.H.Al-HARTHI, Y.YOSHIDA(6), et.al.
    • Journal Title

      Journal of Physics D : Applied Physics 41(15)

      Pages: 155009-155009/8

    • Peer Reviewed
  • [Journal Article] Evidence for polaron codduction in nanostructured manganese ferrite2008

    • Author(s)
      E.Veena GOPALAN, K.A.MALINI, Y.YOSHIDA(5), et.al.
    • Journal Title

      Journal of Physics D : Applied Physics 41(18)

      Pages: 185005/1-185005/9

    • Peer Reviewed
  • [Journal Article] Strain induced anomalous re shift in mesoscopic iron oxide prepared by a novel technique2008

    • Author(s)
      T.N.NARAYANAN, D.S.KUMAR, Y.YOSHIDA, M.R.ANANTHARAMAN
    • Journal Title

      Bulletin of Materials Science 31(5)

      Pages: 759-766

    • Peer Reviewed
  • [Journal Article] Plasma Polymerization of Manganese Chloride Tetraphenylporphyrin and Evaluation of the Thin Film2007

    • Author(s)
      A. SHOJI, N.TSUKADA, D. S. KUMAR, K. KASHIWAGI, Y. YOSHIDA
    • Journal Title

      Journal Photopolymer Science and Technology 20(2)

      Pages: 241-244

    • Peer Reviewed
  • [Journal Article] Characterization and Properties of the Plasma Polymer Films prepared from Carbon Dioxide and 1,3-Butadiene2007

    • Author(s)
      A.SHOJI, K.NAKAMURA, KMURATA, K.KASHIWAGI(8) ,Y.YOSHIDA (9) et.al.
    • Journal Title

      Journal Photopolymer Science and Technology 20(6)

      Pages: 817-822

    • Peer Reviewed
  • [Journal Article] Theroelectric properties of Cu_2O thin films2007

    • Author(s)
      S.UMAHASHI, K.KASHIWAGI, H.MORITA, A.KUROKOUCHI, K.WADA
    • Journal Title

      Proc. of the 9th International Symposium on Suputtering & Plasma Processes(ISSP 2007)

      Pages: 467

    • Peer Reviewed
  • [Journal Article] The surface modification effect by irradiation of a surface wave excited hydrogen plasma onto zinc oxide films2006

    • Author(s)
      T.NAKAYAMA, Y.SATA, K.KASHIWAGI, et.al.
    • Journal Title

      Proc. Of the XXIIth International Symposium on Discharges and Electrical Insulation in Vacuum

      Pages: 569-571

    • Peer Reviewed
  • [Journal Article] Change of Zinc Oxide Thin Film Resistively by Irradiation of Hydrogen Plasma Produced by Microwave Surface Wave2006

    • Author(s)
      T.NAKAYAMA, Y.SATA, K.KASHIWAGI, et.al.
    • Journal Title

      Proc. Of the 6^<th> International Symposium on Microwave Effect/Appplication

      Pages: 213-216

    • Peer Reviewed
  • [Journal Article] Surface modification of plasma polymerized silicon resin films produced at different gas atmospheres2006

    • Author(s)
      A. SHOJI, T. FUKUSHIMA, D. S. KUMAR, K. KASHIWAGI ,Y. YOSHIDA
    • Journal Title

      Journal of Photopolymer Science and Technology 19(2)

      Pages: 241-244

    • Peer Reviewed
  • [Journal Article] The surface modification effect by irradiation of a surface wave excited hydrogen plasma onto zinc oxide thin films2006

    • Author(s)
      T. NAKAYAMA,T.TAKIZAWA, Y. SAKAMOTO, K.KASHIWAGI
    • Journal Title

      Proc. Of the XXII International Symposium on Discharges and Electrical Insulation in Vacuum

      Pages: 569-571

    • Peer Reviewed
  • [Presentation] Effect of Plasma Exposure on the ZnO Film2008

    • Author(s)
      Y.KONDO, Y.SATA, K. KASHIWAGI, Y. YOSHIDA
    • Organizer
      The IUMRS International Conference in ASIA 2008
    • Place of Presentation
      Nagoya Congress Center, Nagoya
    • Year and Date
      2008-12-09
  • [Presentation] Optical Thin Film with High Damage Resistance for Nd : YAG Laser Device2007

    • Author(s)
      R.TATENO and K.KASHIWAGI
    • Organizer
      13^<th> Microoptics Conference (Sponcered by The Japan Society of Applied Physics)
    • Place of Presentation
      Takamatsu
    • Year and Date
      20071028-31
  • [Presentation] Effect of the microwave surface wave H_2 plasma surface treatment on ZnO film2007

    • Author(s)
      Y.SATA, K.KASHIWAGI, Y.YOSHIDA, T.TAKIZAWA, Y.SAKAMOTO
    • Organizer
      5^<th> International Symposium on Bioscience and Nanotechnology
    • Place of Presentation
      Kawagoe
    • Year and Date
      20071004-05
  • [Presentation] Theroelectric properties of Cu2O thin films (2)2007

    • Author(s)
      S. UMAHASHI, K.KASHIWAGI, Y.YOSHIDA
    • Organizer
      5^<th> International Symposium on Bioscience and Nanotechnology
    • Place of Presentation
      Kawagoe
    • Year and Date
      20071004-05
  • [Presentation] マイクロ波表面波水素プラズマによる表面改質効果( The Surface modification effect by irradiation of a surface wave excited hydrogen MW plasma.)2007

    • Author(s)
      滝沢力、坂本雄一、柏木邦宏、佐田洋平
    • Organizer
      第1回日本電磁波エネルギーシンポジウム(2C10)
    • Place of Presentation
      仙台
    • Year and Date
      20070925-27
  • [Presentation] ZnO薄膜の導電性に関する水素プラズマ照射効果2007

    • Author(s)
      佐田洋平、中山貴道、柏木邦宏、滝沢力、坂本雄一
    • Organizer
      第115回表面技術協会講演大会要旨集(279)
    • Year and Date
      20070300
  • [Presentation] ZnO薄膜へのH2 マイクロ波表面波プラズマによる表面改質効果(2)2007

    • Author(s)
      佐田洋平、中山貴道、滝沢力、柏木邦宏、坂本雄一
    • Organizer
      春季「第53回応用物理学会関係連合講演会」
    • Year and Date
      20070300
  • [Presentation] ZnO薄膜の導電性に関する水素プラズマ照射効果2007

    • Author(s)
      佐田洋平、近藤祐輔、柏木邦宏、吉田泰彦、滝沢力、坂本雄一
    • Organizer
      第68回応用物理学会学術講演会(、7a-H-2/II、p.665)
    • Place of Presentation
      札幌
    • Year and Date
      2007-09-07
  • [Presentation] Theroelectric properties of Cu_2O thin films2007

    • Author(s)
      S.UMAHASHI, K.KASHIWAGI, H.MORITA, A.KUROKOUCHI, K.WADA
    • Organizer
      The 9^<th> International Symposium on Suputtering & Plasma Processes(ISSP 2007)
    • Place of Presentation
      Kanazawa
    • Year and Date
      2007-09-06
  • [Presentation] 水素プラズマによる透明酸化亜鉛薄膜の抵抗変化2007

    • Author(s)
      中山貴道、滝沢力、柏木邦宏、佐田洋平、坂本雄一
    • Organizer
      日本電磁波エネルギー応用学会、国士舘大学世田谷キャンパス
    • Place of Presentation
      東京
    • Year and Date
      2007-01-22
  • [Presentation] Plasma polymerization of Tween2006

    • Author(s)
      Y. SASUGA, F. W. SHI, A. SHOJI, D. S. KUMAR, K. KASHIWAGI, Y. YOSHIDA
    • Organizer
      20", The 4^<th>International Symposium on Bioscience and Nanotechnology(P-48, p.81)
    • Place of Presentation
      OkinawaConvention Centre, Ginowan, Okinawa
    • Year and Date
      20061107-08
  • [Presentation] Effect of the microwave surface wave H2 plasma surface treatment on ZnO film2006

    • Author(s)
      Y.SATA, T.NAKAYAMA, K.KASHIWAGI, T.TAKIZAWA and Y.SAKAMOTO
    • Organizer
      The 4^<th> International Symposium on Bioscience and Nanotechnology(P-96)
    • Place of Presentation
      Okinawa Convention Centre, Ginowan, Okinawa
    • Year and Date
      20061107-08
  • [Presentation] Frequency Dependency of Au Thin Film for Bio-sensor by R.F. Ion-plating2006

    • Author(s)
      H.HASEGAWA, R.SUMI,K.KASHIWAGI
    • Organizer
      The 4^<th> International Symposium on Bioscienceand Nanotechnology(P-98)
    • Place of Presentation
      Okinawa Convention Centre, Ginowan, Okinawa
    • Year and Date
      20061107-08
  • [Presentation] Thermoelectric properties of Cu2O thin films2006

    • Author(s)
      H.HASEGAWA, R.SUMI, K.KASHIWAGI and H.IMAGAWA
    • Organizer
      The 4^<th> International Symposium on Bioscience and Nanotechnology(P-95)
    • Place of Presentation
      Okinawa Convention Centre, Ginowan, Okinawa
    • Year and Date
      20061107-08
  • [Presentation] Chage of Zinc Oxide Thin Film Resistively by Irradiation of Hydrogen Plasma Produced by Microwave Surface Wave2006

    • Author(s)
      T. NAKAYAMA,T.Takizawa, Y. SAKAMOTO, K.KASHIWAGI
    • Organizer
      第6回マクロ波効果・応用物理国際シンポジウム, ソフトピアジャパンセンター
    • Place of Presentation
      大垣市
    • Year and Date
      20061100
  • [Presentation] 水素プラズマZnO薄膜表面改質効果2006

    • Author(s)
      佐田洋平、中山貴道、柏木邦宏、滝沢力、坂本雄一
    • Organizer
      第67回応用物理学会学術講演会講演予稿集(590)
    • Place of Presentation
      立命館大学(びわこ、くさつキャンパス)
    • Year and Date
      20060829-0901
  • [Presentation] Frequency Dependency of Au Thin Film for Bio-sensor by R.F. Ion-plating2006

    • Author(s)
      H.HASEGAWA, R.SUMI, K.KASHIWAGI and H.IMAGAWA
    • Organizer
      8^<th> International Conference on Advanced Surface Engineering
    • Year and Date
      20060425-26
  • [Presentation]

    • Author(s)
      S.UMAHASHI, K.KASHIWAGI, H.MORITA, A.KUROKOUCHI , K.WADA

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Published: 2010-06-10   Modified: 2016-04-21  

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