2007 Fiscal Year Final Research Report Summary
Study of aberration assessment using multiple Bragg reflection image
| Project/Area Number |
18560027
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | National Institute for Materials Science |
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Principal Investigator |
KOJI Kimoto National Institute for Materials Science, Advanced Nano Characterization Center, Chief Researcher (90354399)
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| Project Period (FY) |
2006 – 2007
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| Keywords | Transmission Electron Microscopy / aberration / Objective lens / High spatial resolution |
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| Research Abstract |
Transmission electron microscopy (TEM) is an indispensable tool for recent advanced material science. The one of the major advantages in TEM is its high spatial resolution, and the aberration of the objective lens is the most important to realize its high spatial resolution. There are lots of aberration coefficients; e.g., focus, coma aberration, 2-fold astigmatism, spherical aberration, 3-fold astigmatism. The optimization of low-order aberration is required to realize required high spatial resolution. Recent developments of spherical aberration corrector show that the assessment of aberration coefficients is the key technology.
In the present study, we proposed the use of the Bragg reflections for the assessment of objective lens aberrations. In the case of conventional procedure, such as Zemlin tableau, the intentional beam tilting is necessary ; however, we utilized the crystalline specimen as the beam splitter. Thus, the conventional intentional beam tilting is not required in our methods. We proposed a new method for the assessment of aberration in STEM probe forming lens, i.e., STEM objective lens, which is applied for a patent. From the viewpoint of instrumentation for the assessment of the aberrations, microscope stability is important, and we made many efforts to stabilize our instrument. In the related study, we published 3 original papers and 1 review. The developed method is applicable to the high spatial resolution STEM and electron energy-loss spectroscopy observation, to minimize the effect of aberration of the objective lens.
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