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2007 Fiscal Year Final Research Report Summary

Development of High Accuracy Process Technique in 4-way System Diamond Pellets Grinding

Research Project

Project/Area Number 18560116
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionKanazawa Institute of Technology

Principal Investigator

ISHIKAWA Ken-ichi  Kanazawa Institute of Technology, College of Engineering, Professor (00064452)

Co-Investigator(Kenkyū-buntansha) UNEDA Michio  Kanazawa Institute of Technology, College of Engineering, Associate Professor (00298324)
Project Period (FY) 2006 – 2007
KeywordsMechanical machining / Material machining / High precision lapping / Diamond pellets
Research Abstract

Diamond pellets (DP) are expected to be effective tools for use in fixed abrasive lapping methods. However, there have been few previous reports of use of DP at low lapping speeds, e.g., in 4-way fixed abrasive lapping systems. Therefore, this study was performed to investigate the single DP lapping characteristics at low lapping speed. This study examined the correlations of amount of lapping and DP lapping distance with the following parameters: DP diameter, DP wear characteristics, lapping speed, lapping efficiency, and lapping time. The results indicated that there are no strongly correlations between the DP lapping distance and efficiency. However, a weak correlation was observed between DP wear and efficiency. Furthermore, this study presents a method for making optimal lapping plate/polishing cloth groove rates in the radius direction for the 4-way wafer system. A genetic algorithm is used for decreasing the deviation of relative friction distance at wafer surface. The maximum deviation of relative friction distance under each calculation conditions is used for optimizing fitting function at the genetic algorithm. The results are as follows:
(1) The lapping profiles of DP is depended on the cress sectional profile of DP.
(2) The maximum deviation remarkably decreases by optimizing the DP layout and decreasing of DP diameter
(3) The effectiveness about the optimization of DP layout were confirmed by a series of experimental examinations.

  • Research Products

    (14 results)

All 2008 2007 2006

All Journal Article (2 results) (of which Peer Reviewed: 1 results) Presentation (12 results)

  • [Journal Article] ダイヤモンドペレットを用いた固定砥粒研磨加工特性に関する研究2007

    • Author(s)
      畝田 道雄, 酒井 王, 石川 憲一, 諏訪部 仁
    • Journal Title

      砥粒加工学会誌 51

      Pages: 605-610

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Basic study on fixed abrasive lapping characteristics of diamond pellets2007

    • Author(s)
      Michio Uneda, Ou Sakai, Ken-ichi Ishikawa, Hitoshi Suwabe
    • Journal Title

      Journal of the Japan Society for Abrasive Technology 51, 10

      Pages: 605-610

    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Study on fixed abrasive lapping characteristics of diamond pellets and optimized simulation of layout method of pellet2008

    • Author(s)
      Michio Uneda, Ou Sakai, Ken-ichi Ishikawa, Hitoshi Suwabe
    • Organizer
      Proceedings of Spring Meeting of the Japan Society for Precision Engineering
    • Place of Presentation
      Meiji University
    • Year and Date
      2008-03-25
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] ダイヤモンドペレットによる固定砥粒研磨加工特性とそれに基づくペレットの最適配置シミュレーションに関する研究2008

    • Author(s)
      畝田 道雄, 酒井 王, 石川 憲一, 諏訪部 仁
    • Organizer
      2008年度精密工学会春季大会学術講演会講演論文集
    • Place of Presentation
      明治大学
    • Year and Date
      2008-03-17
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] ダイヤモンドペレットを用いた固定砥粒研磨加工特性に関する基礎的研究2007

    • Author(s)
      畝田 道雄, 酒井 王, 石川 憲一, 諏訪部 仁
    • Organizer
      2007年度砥粒加工学会学術講演会講演論文集
    • Place of Presentation
      東京工業大学
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Basic study on fixed abrasive lapping characteristics of diamond pellets2007

    • Author(s)
      Michio Uneda, Ou Sakai, Ken-ichi Ishikawa, Hitoshi Suwabe
    • Organizer
      Proceedings of Meeting of the Japan Society for Abrasive Technology
    • Place of Presentation
      Tokyo Institute of Technology
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] ダイヤモンドペレットによる固定砥粒研磨加工特性に関する基礎研究2007

    • Author(s)
      畝田 道雄, 酒井 王, 石川 憲一, 諏訪部 仁
    • Organizer
      砥粒加工学会北信越ハイテク加工研究分科会2007年度研究・開発成果発表会講演論文集
    • Place of Presentation
      金沢工業大学
    • Year and Date
      2007-07-06
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Basic study on fixed abrasive lapping characteristics of diamond pellets2007

    • Author(s)
      Michio Uneda, Ou Sakai, Ken-ichi Ishikawa, Hitoshi Suwabe
    • Organizer
      Proceedings of Meeting of the Hokushinetu Research Committee on High Processing Technology
    • Place of Presentation
      Kanazawa Institute of Technology
    • Year and Date
      2007-07-06
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] ダイヤモンドペレットによる定圧研削加工特性に関する研究-研削量と研削距離の相関-2007

    • Author(s)
      畝田 道雄, 酒井 王, 石川 憲一, 諏訪部 仁
    • Organizer
      2007年度精密工学会春季大会学術講演会講演論文集
    • Place of Presentation
      芝浦工業大学
    • Year and Date
      2007-03-20
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Study on Grinding Characteristics of Diamond Pellets-Relation between Grinding Profile and Grinding Distance-2007

    • Author(s)
      Michio Uneda, Ou Sakai, Ken-ichi Ishikawa, Hitoshi Suwabe
    • Organizer
      Proceedings of Spring Meeting of the Japan Society for Precision Engineering
    • Place of Presentation
      Shibaura Institute of Technology
    • Year and Date
      2007-03-20
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] ダイヤモンドペレットによる定圧研削加工特性に関する研究2006

    • Author(s)
      畝田 道雄, 酒井 王, 石川 憲一, 諏訪部 仁
    • Organizer
      2006年度精密工学会秋季大会学術講演会講演論文集
    • Place of Presentation
      宇都宮大学
    • Year and Date
      2006-09-20
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Study on Grinding Characteristics of Diamond Pellets2006

    • Author(s)
      Michio Uneda, Ou Sakai, Ken-ichi Ishikawa, Hitoshi Suwabe
    • Organizer
      Proceedings of Fall Meeting of the Japan Society for Precision Engineering
    • Place of Presentation
      Utsunomiya University
    • Year and Date
      2006-09-20
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] ダイヤモンドペレットによる研削加工特性に関する基礎的研究2006

    • Author(s)
      畝田 道雄, 酒井 王, 石川 憲一, 諏訪部 仁
    • Organizer
      砥粒加工学会北信越ハイテク加工研究分科会2006年度研究・開発成果発表会講演論文集
    • Place of Presentation
      金沢工業大学
    • Year and Date
      2006-07-07
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Basic Study on Grinding Characteristics of Diamond Pellets2006

    • Author(s)
      Michio Uneda, Ou Sakai, Ken-ichi Ishikawa, Hitoshi Suwabe
    • Organizer
      Proceedings of Meeting of the Hokushinetu Research Committee on High Processing Technology
    • Place of Presentation
      Kanazawa Institute of Technology
    • Year and Date
      2006-07-07
    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2010-02-04  

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