2007 Fiscal Year Final Research Report Summary
Micro-cooler on the wafer
| Project/Area Number |
18560203
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Thermal engineering
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| Research Institution | Kyushu University |
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Principal Investigator |
KUBOTA Hiromi Kyushu University, Faculty of Engineering, Assistant Professor (10117103)
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| Co-Investigator(Kenkyū-buntansha) |
TAKATA Yasuyuki Kyushu University, Faculty of Engineering, Professor (70171444)
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| Project Period (FY) |
2006 – 2007
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| Keywords | Micro Device / Refrigerator / Wafer |
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| Research Abstract |
Joule-Thompson micro-cooler was fabricated firstly on a silicon wafer using photo-fabrication technology and the fundamental performance was measured using ethylene as a refrigerant. Since the result, in which the excellent thermal conductivity of a silicon wafer had the bad influence on the fundamental performances, was obtained, Joule-Thompson micro-cooler was fabricated on the photo-sensitive glass using same photo-fabrication technology and the fundamental performances was also measured. However, the improvement on the performance by reduction of the heat invasion to the cooling unit was not confirmed nevertheless the photo-sensitive glass was used. This might be because of the reduction of the cross sectional area of a channel due to invasion of the water-glass to a channel in case of adhesion of a photo-sensitive glass heat exchanger by water glass. Moreover, the size and form after etching were different for the heat exchangers using photo-sensitive glass and silicone. In order to consider strictly the difference in the heat exchanger performance by the quality of the material, it is necessary to arrange factors other than the quality of the materials, such as a size, as much as possible, and to compare them. Moreover, improvement in the accuracy of glass heat exchanger fabrication is indispensable on the whole. Next, the heat exchanger which has a micro channel like a micro-cooler shows different thermal conductivity characteristics from the usual size heat exchanger, due to the size effect of the channel. The heat exchanger which has a micro channel was modeled and numerical analysis of the heat flow was conducted. It turns out that the mass flow rate at the time of the present experiment is too large as a result, and it seems that the temperature effectiveness will improve if a mass flow rate is decreased and the thermal conductivity of a heat exchanger material is made small.
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[Presentation] Study of Joul-Thomson micro-cooler2007
Author(s)
T., Tachikawa, H., Kubota, et. al.
Organizer
Power and Energy System Division/The Japanese Society of Mechanical Engineering
Place of Presentation
Tokyo Univ. of Marine Science and Technology
Year and Date
20070614-15
Description
「研究成果報告書概要(欧文)」より
