Development of hybrid thin film materials for converging mico-wave electric and magnetic field with driving at more than 10 GHzelectric and magnetic field with driving at more than 10 GHz

2008 Fiscal Year Final Research Report

• Project/Area Number: 18560319
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electronic materials/Electric materials
• Research Institution: Sojo University
• Principal Investigator: MUNAKATA Makoto Sojo University, 情報学部, 教授 (10183112)
• Co-Investigator(Kenkyū-buntansha): AOKI Shinnichi 崇城大学, 情報学部, 教研 (70175727)
• Project Period (FY): 2006 – 2008
• Keywords: 10GHz超 / マイクロ波 / 電磁界収束材料 / 磁性膜 / 誘電体膜 / 集積回路

Research Abstract

10GHz超のマイクロ波の電磁界を収束する材料の開発を目的として,CoFeBおよびCoFe磁性薄膜を回転電極型スパッター法により試作した.その結果,10GHz超の高周波透磁率特性を有する磁性膜を得,さらにこれを誘電体(ポリイミド膜,SiO2膜)と積層した結果,誘電率特性と透磁率特性のハイブリッド効果すなわち電磁界収束効果が確認された.これによって,マイクロ波集積回路(MMIC)における伝送線路の短縮化,アンテナその他のLC素子の集積化を実現する電磁界束材料の設計・製作が十分に可能であることが明らかにされた.

Research Products

• [Journal Article] Effect of Interaction in the Magnetization Reversal Rel-axation of Superparamagnetic Granular CoFeB-SiO2 Films (2009)
  • Author(s): A.A.Timpheev,P.A.Grishin, and M.Munakata
  • Journal Title: Solid State Pheno-mina Vol.152 Pages: 213-216
  • Peer Reviewed
• [Journal Article] スパッター粒子堆積シュミレーショによるFeCoB膜の異方性磁界の検討 (2008)
  • Author(s): 宗像誠、今泉良一、大越正敏、槙孝一郎
  • Journal Title: MAG-08 Pages: 199-204
• [Journal Article] Fe65Co35薄膜の結晶配向と磁気特性The Papers of Technical Meeting on Magnetics,IEE Japan, (2008)
  • Author(s): 宗像誠、大越正敏、槙孝一郎
  • Journal Title: MAG-08 Pages: 88-94
• [Journal Article] 携帯電話用CoFeB磁性薄膜方向性結合器の大振幅信号伝送特 (2008)
  • Author(s): 水田創,佐藤敏郎,山沢清人,三浦義正,三宅裕子,秋江正則,上原裕二,宗像誠
  • Journal Title: J.Mag.Soc.Jpn Vol.32,N.3 Pages: 376-381
  • Peer Reviewed
• [Journal Article] 高異方性磁界CoFeB薄膜の磁壁移動特性 (2008)
  • Author(s): 渡辺剛,角保延寿,古野達也,大越正敏,宗像誠
  • Journal Title: J. Magn. Soc Jpn Vol.32,N.3 Pages: 370-373
  • Peer Reviewed
• [Journal Article] (2008)
  • Author(s): M. Takezawa,A. Shiota,1Y. Morimoto, JYamasaki, and M. Munakata
  • Journal Title: J.Appl. phys Vol.103,07E Pages: 723-726
• [Journal Article] Bを添加したCoFe膜の異方性磁界におけるRu下地層の効果The Papers of Technical Meeting on Magnetics, IEE Japan (2007)
  • Author(s): 宗像誠、,牛水紘貴、槙孝一郎、大越正敏
  • Journal Title: MAG-07 Pages: 46-50
• [Journal Article] CoFe 膜の異方性磁界におけるRu およびCu 下地層の影響,The Papers of Technical Meeting on Magnetics,IEE Japan (2007)
  • Author(s): 宗像誠, 青木振一、大越正敏、川崎仁晴、大島多美子、植松卓彦
  • Journal Title: MAG-07 Pages: 46-50
• [Journal Article] Characteristics of domain wall motion in CoFe films for GHz frequency application (2007)
  • Author(s): T. Watanabe, M. Munakata, and M. Ohkoshi
  • Journal Title: Phys.stat.sol (a)204,No.12 Pages: 3983-3986
• [Journal Article] Nano underlayer effecton the CoFe films for the GHz frequency use (2007)
  • Author(s): M.Munakata O.Zaima,S.I.Aoqui,M.Ohkoshi and H.Kawasaki
  • Journal Title: Transition of the Material ResearchSociety of Japan Vol.32-2 Pages: 485-488
  • Peer Reviewed
• [Journal Article] Perpendicular Magnetic Anisotropy in Ni/Pt Quadrilayers (2007)
  • Author(s): X.T.Gao, Y.Nagaiie, H.Kawasaki, S.I.Aoqui, M.Munakata, and M.Ohkoshi
  • Journal Title: J. Magn. Soc.Jpn Vol.31 Pages: 81-84
  • Peer Reviewed
• [Journal Article] Analysis of Directional Couplare Using Magnetic /Directional Hybride Transmission Line for Cellar Phone, IEEE Asia-Passific Micro- Wave Conf (2007)
  • Author(s): K.Takizawa, M.Nakazawa, T.Sato, K.Yamasawa, Y.Miura, Y.Miyake, M.Akie, Y.Uehara, M.Munakata
  • Journal Title: Proc.&Paper Pages: 1384-1387
• [Journal Article] Analysis of a Directional Coupler Using Magnetic/Dielectric Hybrid Transmission-Line for Cellular Phone,IEEE Asia-Pacific Microwave Conference (2006)
  • Author(s): K.Takizawa, M.Nakazawa, T.Sato, K.Yamasawa, Y.Miura, Y.Miyake, M.Akie, Y.Uehara, M.Munakata
  • Journal Title: proc..&Paper Vol.2 Pages: 1384-1387
  • Peer Reviewed
• [Journal Article] Suppression of Insertion Loss by Slit-patterning of Magnetic Film in a CoFeB/Polyimide Hybrid Thin-Film Coplanar-Line for a RF Impedance Matching Device (2006)
  • Author(s): H.Nakayama, T.Yamamoto, Y.Mizoguchi, M.Nakazawa, T.Sato, K.Yamasawa, Y.Miura,Y.Miyake, M.Akie, Y.Uehara, M.Munakata
  • Journal Title: J. Apple.phys Vol.99 Pages: 2344-2348
  • Peer Reviewed
• [Journal Article] The Influence of Intergranular Interaction on the Magnetization of the ensemble of Oriented Stoner-Wohlgarth nanoparticles
  • Author(s): A.A.Timpheev,P.A.Grishin, and M.Munakata
  • Journal Title: J.App.Phys Vol.105,083905 Pages: 1-6
  • Peer Reviewed
• [Presentation] 高異方性磁界を持つCoFeB膜の膜形成過程における入射スパッター粒子の検討 (2009)
  • Author(s): 今泉良一,宗像誠,大越正敏,槙孝一郎
  • Organizer: 電気学会全国大会
  • Place of Presentation: 北海道
  • Year and Date: 20090300
• [Presentation] スパッタ粒子堆積シュミレーションによるCoFeB膜の異方性磁界の検討 (2008)
  • Author(s): 宗像誠,今泉良一,大越正敏,槙孝一郎
  • Organizer: 電気学会マグネティックス研究会
  • Place of Presentation: 仙台
  • Year and Date: 20081200
• [Presentation] CoFe膜の高周波透磁率に及ぼす結晶配向影響 (2008)
  • Author(s): 宗像誠,大越正敏,槙孝一郎
  • Organizer: 日本磁気学会
  • Place of Presentation: 仙台
  • Year and Date: 20080900
• [Presentation] FeCo薄膜の結晶配向と磁気特性 (2008)
  • Author(s): 宗像誠,大越正敏,槙孝一郎
  • Organizer: 電気学会マグネティックス研究会
  • Place of Presentation: 富山
  • Year and Date: 20080800
• [Presentation] Effect of Interaction in the Magnetization Reversal Relaxation of Superparamagnetic Granular CoFeB-SiO2 Films (2008)
  • Author(s): A.A.Timpheev, P.A.Grishin, and M. Munakata
  • Organizer: Moscow International Symposium Magnetism
  • Place of Presentation: Moscow
  • Year and Date: 20080600
• [Presentation] Crystalline orientation of Co35Fe65 thin film for the GHz frequency use with more than 10GHz (2008)
  • Author(s): M.Munakata, M.Masatoshi, K.Maki, M.Sonehara, K.Ikeda, T.Sato
  • Organizer: 6 thInternational Workshop on High Frequency Micromagnetic Devices and Maters
  • Place of Presentation: Madrid Spain
  • Year and Date: 20080500
• [Presentation] Magnetic domains and magnetization process of amorphous granular (CoFeB)-SiO2 thin films (2007)
  • Author(s): M. Takezawa,A. Shiota,Y. Morimoto, J. Yamasaki, and M. Munakata
  • Organizer: 3M conf.
  • Place of Presentation: Tampa, USA
  • Year and Date: 20071100
• [Presentation] CoFe膜の面内一軸異方性磁界に及ぼすRu,NiFe下地層の影響 (2007)
  • Author(s): 宗像誠,青木振一,大越正敏, 他3名
  • Place of Presentation: 東京
  • Year and Date: 20070900
• [Presentation] (Co-Fe-B)-(SiO2)グラニュラー薄膜の磁気観察 (2007)
  • Author(s): 塩田篤史,竹澤正晃,山崎二郎,宗像誠, 他1名
  • Organizer: 日本応用磁気学会
  • Place of Presentation: 東京
  • Year and Date: 20070900
• [Presentation] 高飽和磁化Co-Fe薄膜における地壁移動特性 (2007)
  • Author(s): 渡辺剛,大越正敏,宗像誠, 他2名
  • Organizer: 日本応用磁気学会
  • Place of Presentation: 東京
  • Year and Date: 20070900
• [Presentation] CoFeB磁性膜伝送線路方向性結合器の大振幅伝送特性 (2007)
  • Author(s): 水田創,佐藤敏郎,宗像誠, 他6名
  • Organizer: 日本応用磁気学会
  • Place of Presentation: 東京
  • Year and Date: 20070900
• [Presentation] Characteristics of domain wall motionin CoFe films for GHz frequency use (2007)
  • Author(s): T. Watanabe, M. Munakata, and M. Ohkoshi
  • Organizer: ISAMMA
  • Place of Presentation: Jeju, Korea
  • Year and Date: 20070500
• [Presentation] Coating effects of nano underlayer on the surface condition and crystalline structure of the CoFe magnetic thin film for the GHz frequency use (2007)
  • Author(s): M.Munakata, S.I.Aoqui, T.Ohshima, H.Kawasaki, and T.Uematsu
  • Organizer: European Materials Research Society Spring Meeting Q-XIV2(Symposium Q: Protective Coatings and Thin Films-07)
  • Place of Presentation: Strasbourg, France
  • Year and Date: 20070500
• [Presentation] Fabrication of Magnetic Thin Film Directional coupler for mobile phones (2007)
  • Author(s): K.Takizawa, M.Nakayama, K.Sugiura, S.Mizuta, A.Hashimoto, T.Sato, K.Yamasawa, Y.Miura, Y.Miyake, Y.Uehara, M.Munakata, M.Yagi
  • Organizer: 5 th International Workshop on High Frequency Micromagnetic Devices and Materials
  • Place of Presentation: Tammpa U.S.A
  • Year and Date: 20070300
• [Presentation] Bを添加したCoFe膜の異方性磁に おけるRu下地層の効果 (2007)
  • Author(s): 宗像誠、,牛水紘貴、槙孝一郎、大越正敏
  • Organizer: 電気学会マグネティックス研究会
  • Place of Presentation: 仙台
  • Year and Date: 20070000
• [Presentation] CoFe 膜の異方性磁界 (2007)
  • Author(s): 宗像誠, 青木振一, 大越正敏,川崎仁晴,大島多美子,植松卓彦
  • Organizer: 電気学会マグネティクス究会
  • Place of Presentation: 南紀白浜
  • Year and Date: 20070000
• [Presentation] Analysis of a Directional Coupler Using Magnetic /Dielectric Hybrid ansmission -Line for Cellular Phone (2006)
  • Author(s): K.Takizawa, M.Nakazawa, T.Sato, K.Yamasawa, Y.Miura, Y.Miyake, M.Akie, Y.Uehara,M.Munakata, M.Yagi
  • Organizer: IEEE Asia-PacifiMicrowave Conf
  • Year and Date: 20061200
• [Presentation] CoFeBの異方性磁界に及ぼすRu下地層の影響 (2006)
  • Author(s): 宗像誠,大越正敏,青木振一, ほか2名
  • Organizer: 日本応用磁気学会
  • Place of Presentation: 島根
  • Year and Date: 20060900
• [Presentation] 磁性薄膜/誘電体膜積層ハイブリッド伝送線路方向性結合器の特性解析 (2006)
  • Author(s): 中沢政博,佐藤敏郎,宗像誠, ほか2名
  • Organizer: 日本応用磁気学会
  • Place of Presentation: 島根
  • Year and Date: 20060900
• [Presentation] 磁気ハイブリッドカプラーの研究 (2006)
  • Author(s): 中村匡芳,辻本章,宗像誠
  • Organizer: 日本応用磁気学会
  • Place of Presentation: 島根
  • Year and Date: 20060900
• [Presentation] CoFeB金属磁性膜を用いたGHz薄膜スパイラル伝送線路デバイスの試作 (2006)
  • Author(s): 中山英俊,佐藤敏郎,宗像誠, 他9名
  • Organizer: 日本応用磁気学会
  • Place of Presentation: 島根
  • Year and Date: 20060900
• [Presentation] Magnetic Film/Polymide Dielectric Film Hybrid Transmission Line (2006)
  • Author(s): K.Takizawa, S.Mizuta, M.Nakazawa, T.Sato, K.Yamasawa, Y.Miura, Y.Miyake, M.Akie,.Uehara, M.Munakata, M.Yagi
  • Organizer: IEEE International Magnetic Conference
  • Place of Presentation: U.S.A
  • Year and Date: 20060500
• [Book] E.E.研究所報告,Vol.13,No1 (2007)
  • Author(s): 宗像誠(分筆)
  • Publisher: E.E.セミナー販売図書