Single-shot 3D nano surface profilometry by using wide field laser scanning interferometer

2020 Fiscal Year Final Research Report

• Project/Area Number: 18H01360
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 18040:Machine elements and tribology-related
• Research Institution: Niigata University
• Principal Investigator: NITTA ISAMI 新潟大学, 自然科学系, 教授 (30159082)
• Project Period (FY): 2018-04-01 – 2021-03-31
• Keywords: 広視野計測 / レーザ走査干渉計 / 広視野レーザ顕微鏡 / ワンショット干渉計測 / 金属成膜参照板 / 振動 / ロバスト / ナノ計測

Outline of Final Research Achievements

The principal investigator has realized a laser scanning interferometer with a field of view about 400 times that of existing equipment. We have also developed a new single-shot measurement method that can determine the shape of a sample with nano-accuracy from a single interferogram by forming a metal thin film on the reference plate.
Interference measurements are generally vulnerable to vibration and are performed in an environment that eliminates vibration as much as possible. Therefore, despite the high measurement accuracy, the interferometry could not be applied on the machine tool table. In this study, we showed that the new single-shot measurement method has excellent vibration resistance.

Free Research Field

機械工学

Academic Significance and Societal Importance of the Research Achievements

市販の顕微干渉計は光学顕微鏡をベースとしているために視野が限定的である．これに対して，既開発の広視野レーザ顕微鏡は約400倍視野が広い．干渉計として使用すれば，400倍広い領域のナノ形状計測が可能である．最近開発した新規ワンショット計測法を組み合わせることで，振動に対してロバストな形状計測手法が確立できる．
本研究では，新規ワンショット計測法の振動に対するロバスト性を実験により確認した．本成果は，干渉法を机上計測に適用できることを明らかにした．