Power-autonomous microelectronics with in-chip energy harvester

2020 Fiscal Year Final Research Report

• Project/Area Number: 18H01490
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 21060:Electron device and electronic equipment-related
• Research Institution: The University of Tokyo
• Principal Investigator: TOSHIYOSHI HIROSHI 東京大学, 生産技術研究所, 教授 (50282603)
• Project Period (FY): 2018-04-01 – 2021-03-31
• Keywords: MEMS / エナジーハーベスタ / 振動発電 / エレクトレット / 半導体 / マイクロマシン / マイクロマシニング / シリコン

Outline of Final Research Achievements

New technologies on power-autonomous microelectronics have been studied using MEMS vibrational energy harvester to as an energy source to retrieve electrical power from the environmental vibrations. Intermittent operation of electronics including chip-microcomputer, FRAM memory and timer-IC is confirmed using the developed energy harvester. Wireless monitoring system for environmental temperature and humidity is developed as an application of power-autonomous electronics.

Free Research Field

MEMS

Academic Significance and Societal Importance of the Research Achievements

半導体微細加工技術の進展に伴ってエレクトロニクス素子のチップ小型化は急速な勢いで進んでいるが、それに電力を供給する側は依然として電源アダプタ・電池を使い続けている。そこで本研究ではＭＥＭＳ技術によって超小型エナジーハーベスタを構成し、環境振動から得たエネルギーで電力を自給自足するエレクトロニクス技術を構築し、ＩｏＴの発展に貢献する。