Fabrication of nanoholes in the ceramic substrates by reactive solid-state dewetting of metal thin films

2020 Fiscal Year Final Research Report

• Project/Area Number: 18K04895
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 28030:Nanomaterials-related
• Research Institution: Konan University
• Principal Investigator: Naito Muneyuki 甲南大学, 理工学部, 教授 (10397721)
• Project Period (FY): 2018-04-01 – 2021-03-31
• Keywords: ナノホール / 金属ナノ粒子 / 透過電子顕微鏡

Outline of Final Research Achievements

In the present study, we investigated the formation process of nanoholes in the thermally-oxidized Si substrate using atomic force microscopy in combination with cross-sectional transmission electron microscopy. The nanoholes were obtained by thermal annealing-induced depression of metal nanoparticles which are formed by the solid-state dewetting of metal thin films. The length and diameter of nanoholes increase with increasing annealing time and sizes of nanoparticles, respectively. In addition, it was confirmed that the crystal structure of nanoparticles affects the diameter size. These results indicate that the length and diameter of nanoholes can be controlled by the annealing conditions and appropriate choice of metal nanoparticles.

Free Research Field

材料工学

Academic Significance and Societal Importance of the Research Achievements

固体材料に形成されたナノホールは、ナノ空間における化学反応場やナノツール作製のモールド材などとしての利用が期待されている。ナノホール形成に金属ナノ粒子を用いる本手法は、従来のナノホール作製法と比較してプロセスの簡素化・低コスト化が期待できるが、形成されるナノホールのサイズ制御が課題とされる。本研究で得られたナノホール径およびナノホール長制御に関する知見は、ナノホールの高次構造制御に寄与すると考えらえる。