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2018 Fiscal Year Research-status Report

Thermal stability improvement of diamond logic circuits for high-temperature application

Research Project

Project/Area Number 18K13806
Research InstitutionNational Institute for Materials Science

Principal Investigator

劉 江偉  国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, 独立研究者 (30732119)

Project Period (FY) 2018-04-01 – 2020-03-31
Keywordsdiamond / MOSFET / logic circuits
Outline of Annual Research Achievements

High annealing temperature operations for hydrogenated diamond (H-diamond) metal-oxide-semiconductor field-effect transistors (MOSFETs) are investigated. The SiO2 films are employed as oxide insulators for the H-diamond MOSFETs. After annealing at 500 deg. C for 60 min, although leakage current density of the SiO2/H-diamond MOS capacitor increases, good operations and distinct pinch-off characteristics are observed for the SiO2/H-diamond MOSFET with current output maximum, on/off ratio, and subthreshold swing of -2.6 mA/mm, 1.4×104, and 530 mV/dec, respectively. Stable electrical characteristics are confirmed for the annealed SiO2/H-diamond MOSFET after 35 cycles repeat measurements.

Current Status of Research Progress
Current Status of Research Progress

2: Research has progressed on the whole more than it was originally planned.

Reason

In this project, we propose to improve thermal stability of hydrogenated diamond (H-diamond) metal-oxide-semiconductor field-effect transistor (MOSFET) logic circuits for high-temperature applications. There are several reasons for poor thermal stability of diamond logic circuits, such as damage of ohmic contact, degradation of oxide insulators, and high requirements of device fabrication process at high-temperature. For first year of the project, we have improved the ohmic contact and developed a suitable oxide insulator to make the H-diamond MOSFETs operate well at annealing temperature as high as 500 deg. C for 60 min. Thus, we have achieved the FY2018's plan for this project. During FY2019, we attempt to make the H-diamond MOSFET logic circuits operate well at 500 deg. C.

Strategy for Future Research Activity

After finding the best ohmic contact metal for the H-diamond channel layer and making the H-diamond MOSFETs operate well after annealing at 500 deg. C for 60 min during FY2018, we will improve the thermal stability of H-diamond MOSFET logic circuits during FY2019. New fabrication process for the H-diamond MOSFET logic circuits will be developed. On the other hand, the SiO2 will be used as the oxide insulator for the MOSFET. Electrical properties such as breakdown voltage, gain value, and current output of the H-diamond MOSFET logic circuits after annealing will be investigated. Our research target during FY 2019 is to make the H-diamond logic circuits operate well at temperature higher than 500 deg. C.

Causes of Carryover

Since the price of diamond substrate purchased from EDP company is a little cheaper than that from Sumitomo company, around 31,525 JPY is left. During FY2019, I will use this budget to buy more diamond substrate.

  • Research Products

    (10 results)

All 2018 Other

All Journal Article (3 results) (of which Peer Reviewed: 3 results,  Open Access: 1 results) Presentation (6 results) (of which Int'l Joint Research: 1 results,  Invited: 4 results) Remarks (1 results)

  • [Journal Article] An overview of high-k oxides on hydrogenated-diamond for metal-oxide-semiconductor capacitors and field-effect transistors2018

    • Author(s)
      Jiangwei Liu, Yasuo Koide
    • Journal Title

      Sensors

      Volume: 18 Pages: 813-1-813-17

    • DOI

      10.3390/s18060813

    • Peer Reviewed / Open Access
  • [Journal Article] Annealing effects on hydrogenated diamond NOR logic circuits2018

    • Author(s)
      Jiangwei Liu, Hirotaka, Oosato, Meiyong Liao, Masataka Imura, Eiichiro Watanabe, Yasuo Koide
    • Journal Title

      Applied Physics Letters

      Volume: 112 Pages: 153501

    • DOI

      10.1063/1.5022590

    • Peer Reviewed
  • [Journal Article] A density functional study of the effect of hydrogen on electronic properties and band discontinuity at anatase TiO2/diamond interface2018

    • Author(s)
      Kongping Wu, Meiyong Liao, Liwen Sang, Jiangwei Liu, Masataka Imura, Haitao Ye, Yasuo Koide
    • Journal Title

      Journal of Applied Physics

      Volume: 123 Pages: 161599

    • DOI

      10.1063/1.5002176

    • Peer Reviewed
  • [Presentation] Depletion-/enhancement-mode hydrogenated-diamond MOSFETs and MOSFET logic circuits2018

    • Author(s)
      Jiangwei Liu, Yasuo Koide
    • Organizer
      E-MRS & MRS-J BILATERAL SYMPOSIUM
    • Invited
  • [Presentation] High-quality diamond epitaxial layer growth and electron devices application2018

    • Author(s)
      Yasuo Koide, Jiangwei Liu, Masataka Imura, Meiyong Liao
    • Organizer
      SSDM2018
    • Invited
  • [Presentation] Enhancement-mode hydrogenated diamond MOSFETs2018

    • Author(s)
      Jiangwei Liu, Meiyong Liao, Masataka Imura, Yasuo Koide
    • Organizer
      29th International Conference on Diamond and Carbon Materials
    • Invited
  • [Presentation] Logic circuits using depletion/Enhancement-modes H-diamond MOSFETs2018

    • Author(s)
      Yasuo Koide, Jiangwei Liu, Masataka Imura, Meiyong Liao
    • Organizer
      12th New Diamond and Nano Carbons Conference NDNC2018
    • Int'l Joint Research
  • [Presentation] Development of diamond MOSFET logic circuits2018

    • Author(s)
      Jiangwei Liu
    • Organizer
      半導体表面化学セミナー
    • Invited
  • [Presentation] ダイヤモンド論理回路チップの開発2018

    • Author(s)
      Jiangwei Liu, Yasuo Koide
    • Organizer
      SATテクノロジーショーケース2018
  • [Remarks] LIU, Jiangwei (劉 江偉)

    • URL

      https://samurai.nims.go.jp/profiles/liu_jiangwei

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Published: 2019-12-27  

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