Room temperature bonding in air for heterogeneous optical integration

2020 Fiscal Year Final Research Report

• Project/Area Number: 18K18863
• Research Category: Grant-in-Aid for Challenging Research (Exploratory)
• Allocation Type: Multi-year Fund
• Review Section: Medium-sized Section 21:Electrical and electronic engineering and related fields
• Research Institution: Kyushu University
• Principal Investigator: Takigawa Ryo 九州大学, システム情報科学研究院, 准教授 (80706846)
• Project Period (FY): 2018-06-29 – 2021-03-31
• Keywords: 大気低温接合

Outline of Final Research Achievements

In this study, room temperature bonding of metal ultra-thin films in air is investigated for heterogeneous optical microsystem. Surface activation process of metal ultra-thin film in air is proposed. Based on acquired knowledge, room temperature bonding of oxide materials in air using Au ultra-thin film is demonstrated. These results show the potentials for fabricating future low-cost bonding machines.

Free Research Field

実装・集積

Academic Significance and Societal Importance of the Research Achievements

本成果は、真空・大気下における金属薄膜の表面活性化状態と接合メカニズム把握に繋がり学術的な価値は高い。また、大規模な真空引き装置を必要としない将来の簡便な大気中プロセス実現に寄与する可能性があり産業的にも価値があると考えられる。