2011 Fiscal Year Final Research Report
Molding multi-layered precise structures widely and seamlessly
Project/Area Number |
19106003
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Research Category |
Grant-in-Aid for Scientific Research (S)
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Allocation Type | Single-year Grants |
Research Field |
Production engineering/Processing studies
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Research Institution | The University of Tokyo |
Principal Investigator |
NAKAO Masayuki 東京大学, 大学院・工学系研究科, 教授 (90242007)
|
Co-Investigator(Kenkyū-buntansha) |
HAMAGUCHI Tetsuya 東京大学, 大学院・工学系研究科, 特任教授 (90345083)
TSUCHIYA Kensuke 東京大学, 生産技術研究所, 准教授 (80345173)
|
Project Period (FY) |
2007 – 2011
|
Keywords | ナノ・マイクロ加工 / 機械工作・生産工学 / 精密部品加工 / 超精密金型転写 |
Research Abstract |
New replication methods of large-area multi-layered micro/nanostructures were developed. We proposed and demonstrated two methods ; iterative imprint method in which thin films are molded and bonded repeatedly and high-speed shearing method in which multilayered thin films preliminarily deposited are sheared together. We also developed roller-imprinting that continuously replicates micro/nanostructures.
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Research Products
(14 results)