2011 Fiscal Year Final Research Report
Understanding and Control of Electronic Properties of Nanometer-thick Dielectric Films
| Project/Area Number |
19106005
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| Research Category |
Grant-in-Aid for Scientific Research (S)
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| Allocation Type | Single-year Grants |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | The University of Tokyo |
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Principal Investigator |
TORIUMI Akira 東京大学, 大学院・工学系研究科, 教授 (50323530)
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| Co-Investigator(Kenkyū-buntansha) |
KITA Koji 東京大学, 大学院・工学系研究科, 准教授 (00343145)
NISHIMURA Tomonori 東京大学, 大学院・工学系研究科, 技術専門職員 (10396781)
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| Co-Investigator(Renkei-kenkyūsha) |
KITA Koji 東京大学, 大学院・工学系研究科, 准教授 (00343145)
NISHIMURA Tomonori 東京大学, 大学院・工学系研究科, 技術専門職員 (10396781)
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| Project Period (FY) |
2007 – 2011
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| Keywords | 電気・電子材料 / 誘電体物性 / 超薄膜 / 表面・界面物性 |
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| Research Abstract |
The gate insulator thickness is required to be thinned for enhancing semiconductor device performances. This project has aimed at the thinning the insulator thickness electrically by increasing the dielectric constant of the films instead of thinning the physical thickness. Through this research, the energy barrier heights of the insulator films with regard to Si have been obtained systematically. In addition, the stability of dielectric constant, the dipoles formed at interfaces between such films and conventional insulator(SiO_2) have been deeply investigated and modeled in terms of atom kinetics in the bulk films and at the interfaces. Furthermore, hygroscopic properties of rare-earth metal oxides have been characterized thermodynamically and the defect generation origin in GeO_2 which will be a new insulator for new semiconductor(Ge) has been also experimentally clarified.
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