2011 Fiscal Year Final Research Report
Study of optical micro systems by monolithic integration of silicon with nitride semiconductor
| Project/Area Number |
19106007
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| Research Category |
Grant-in-Aid for Scientific Research (S)
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| Allocation Type | Single-year Grants |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Tohoku University |
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Principal Investigator |
HANE Kazuhiro 東北大学, 大学院・工学研究科, 教授 (50164893)
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| Co-Investigator(Kenkyū-buntansha) |
HU Fangren 東北大学, 大学院・工学研究科, 助教 (50396545)
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| Co-Investigator(Renkei-kenkyūsha) |
KANAMORI Yoshiaki 東北大学, 大学院・工学研究科, 准教授 (10333858)
SASAKI Minoru 豊田工業大学, 工学部, 教授 (70282100)
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| Project Period (FY) |
2007 – 2011
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| Keywords | 光デバイス / 集積化 / MEMS |
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| Research Abstract |
Integrating GaN light source devices with Si three-dimensional structures and micro actuators monolithically, functional micro-electro-mechanical systems (MEMS)for optical applications were developed. Crystal growth of GaN-LED on Si substrate, GaN crystal growth on micro-machined GaN/Si substrate, integration of GaN-LED with Si actuator, and fabrication of GaN actuator were carried out. Integrating GaN-LED with Si-MEMS, a variable lightning device, a micro fluorescent analysis chip etc. were demonstrated.
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