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2007 Fiscal Year Annual Research Report

面発光レーザフォトニクスの新展関

Research Project

Project/Area Number 19206012
Research InstitutionTokyo Institute of Technology

Principal Investigator

小山 二三夫  Tokyo Institute of Technology, 精密工学研究所, 教授 (30178397)

Co-Investigator(Kenkyū-buntansha) 坂口 孝浩  東京工業大学, 精密工学研究所, 助教 (70215622)
松谷 晃宏  東京工業大学, 精密工学研究所, 技術専門員 (40397047)
Keywords面発光レーザ / 光デバイス / マイクロマシン / 光信号処理
Research Abstract

本研究では,面発光レーザの波長制御技術開拓と面発光レーザ構造を用いた位相・偏光状態制御の光信号処理を目的として研究を進め,以下の成果を得た.
(1)多波長面発光レーザアレイ
凹凸基板を用いた多波長面発光レーザの波長間隔の精度向上を目指して,ドライエッチングプロセスによる凹凸基板形成を行い,波長間隔精度を15%以内に抑えることに成功した.また,多波長VCSELアレイの出力を1本の光ファイバへ合波する合波回路として,テーパ中空導波路を応用することを提案し,マルチモードファイバへ直接結合する事が可能であることを示した.反射面に高反射率(≧99.5%)であるBragg反射鏡を導入することにより,挿入損失1dB以下の低損失化と,VCSELアレイのピッチを縮小化し,テーパ角を最適化することにより,高密度VCSELアレイの合波への適用・更なる多チャンネル化に対応可能であることを示した.
(2)光位相シフタとその光ファイバ非線形効果の補償
面発光レーザ構造を用いて入射光強度に対して大きな負の位相シフトを与える位相シフタを製作し,その10ピコ秒クラスの高速応答を実証して,光ファイバ伝送中の非線形効果を光学的に補償する新手法の提案し,実際に10psec幅の短パルスに対して,光ファイバ中の自己位相変調を光学的に補償できる可能性を示した.
(3)金属ナノ構造による面発光レーザの偏光制御
金属ナノロッドを表面に装荷した面発光レーザの偏光制御手法を提案し,ナノロッドの形状制御により面発光レーザの偏光特性を自在に制御できることを実証した.
(4)面発光レーザ構造を用いたスローライト光デバイス
面発光レーザ構造を用いて,高反射率で形成された導波路で光を減速したスローライトを生成し,大幅に光回路を微小化するスローライト光回路を提案し,大きさ20ミクロンの超小型光変調器,光検出器の実証に成功した.また,スローライトを用いた超小型光スイッチを提案し,その小型化の設計とスイッチング特性を提示した.

  • Research Products

    (32 results)

All 2008 2007

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (28 results)

  • [Journal Article] High Speed Response of Nonlinear Optical Phase-shifter Based on Vertical Micro-Cavity Saturable Absorber2008

    • Author(s)
      S. Suda, F. Koyama, N. Nishiyama, C. Caneau and C.E. Zah
    • Journal Title

      IEICE ELEX vol.5

      Pages: 131-135

    • Peer Reviewed
  • [Journal Article] Proposal of total-internal-reflection optical switch with slowing light in Bragg reflector waveguide2008

    • Author(s)
      A. Fuchida and F. Koyama
    • Journal Title

      IEICE ELEX vol.5(印刷中)

    • Peer Reviewed
  • [Journal Article] Polarization control of 1.15μm vertical-cavity surface-emitting lasers usingautocloned photonic crystal polarizer2007

    • Author(s)
      Padullaparthi Babu Dayal, Naoto Kitabayashi, Tomoyuki Miyamoto and Fumio Koyama
    • Journal Title

      Appl. Phys. Lett Vol.91

      Pages: 041110

    • Peer Reviewed
  • [Journal Article] Polarization control of 0.85μm vertical-cavity surface-emitting lasers integrated with gold nanorod arrays2007

    • Author(s)
      Padullaparthi Babu Dayal and Fumio Koyama
    • Journal Title

      Appl. Phys. Lett vol.91

      Pages: 111107

    • Peer Reviewed
  • [Presentation] Recent advances of VCSEL photonics2008

    • Author(s)
      Fumio Koyama
    • Organizer
      The 2008 Spring Meeting of the German Physical Society
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      20080225-20080229
  • [Presentation] Dry Etching of CaF_2by Solid Source H_2O (ice) Plasma2007

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki and Fumio Koyama
    • Organizer
      20th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      20071105-08
  • [Presentation] Thermal Resistance Reduction of GaAs-based Vertical Cavity Surface Emitting Lasers by Thickness Modulated Distributed Bragg Reflector2007

    • Author(s)
      Tomohiro Nishina, Yoshihiro Kashihara, Syuutarou Ishida, Tomoyuki Miyamoto and Fumio Koyama
    • Organizer
      MOC '07
    • Place of Presentation
      Kagawa, Japan
    • Year and Date
      20071029-31
  • [Presentation] Total-lnternal-Reflection Optical Switch with Slowing Light in Bragg Reflector Waveguide2007

    • Author(s)
      Ayumi Fuchida and Fumio Koyama
    • Organizer
      LEOS2007
    • Place of Presentation
      Florida, USA
    • Year and Date
      20071022-25
  • [Presentation] Slowing Light in Bragg Reflector Waveguide with Tilt Coupling Scheme2007

    • Author(s)
      Go Hirano and Fumio Koyama
    • Organizer
      LEOS2007
    • Place of Presentation
      Florida, USA
    • Year and Date
      20071022-25
  • [Presentation] VCSEL Photonics - Athermalization and Slowing Down-2007

    • Author(s)
      Fumio Koyama
    • Organizer
      AOE 2007
    • Place of Presentation
      Shanghai, China
    • Year and Date
      20071017-19
  • [Presentation] Theoretical design of carrier injection rate and recombination rate in tunnel injection quantum well lasers2007

    • Author(s)
      Yasutaka Higa, Tomoyuki Miyamoto, Hiroshi Nakajima, Kosuke Fujimoto and Fumio Koyama
    • Organizer
      ISSC2007
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      20071015-18
  • [Presentation] Transient Behavior of Nonlinear Optical Compensator Based on Vertical Micro-Cavity Saturable Absorber2007

    • Author(s)
      Satoshi Suda, Fumio Koyama, Nobuhiko Nishiyama, Catherine Caneau and Chung-En Zah
    • Organizer
      ECOC07
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      20070916-21
  • [Presentation] Slow Light Waveguide Detector Slowing Light in Bragg Reflector Waveguide2007

    • Author(s)
      Keisuke Kuroki, Go Hirano, Fumio Koyama, Koichi Hasebe and Takahiro Sakaguchi
    • Organizer
      ECOC07
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      20070916-21
  • [Presentation] Decreasing of Residual Oxygen by using Si Solid Source in Cl2-ICP Etching of Al2007

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki and Fumio Koyama
    • Organizer
      ISPC18
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      20070826-31
  • [Presentation] Reduction of Spacer Layer Thickness of InAs Quantum Dots Using GaNAs Strain Compensation Layer2007

    • Author(s)
      Ryoichiro Suzuki, Tomoyuki Miyamoto and Fumio Koyama
    • Organizer
      CLEO/Pacific Rim 2007
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      20070826-30
  • [Presentation] New Functions and Challenges of VCSEL-related Photonic Devices2007

    • Author(s)
      Fumio Koyama
    • Organizer
      INOW 2007
    • Place of Presentation
      Beijin and Lanzhou, China
    • Year and Date
      20070729-0811
  • [Presentation] High Speed Response of Optical Nonlinear Phase Shifter Based on 1.55μm VCSEL2007

    • Author(s)
      Satoshi Suda and Fumio Koyama
    • Organizer
      INOW 2007
    • Place of Presentation
      Beijin and Lanzhou, China
    • Year and Date
      20070729-0811
  • [Presentation] Modeling of Optical Nonlinear-Effect Compensator With Vertical-Cavity Saturable Absorber2007

    • Author(s)
      Satoshi Suda and Fumio Koyama
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      20070709-13
  • [Presentation] Etching Characteristics of Low-k Polymer for Wide Modulation Bandwidth VCSELs2007

    • Author(s)
      Akihiro Matsutani, Naoki Jogan, Fumio Koyama and Kohroh Kobayashi
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      20070709-13
  • [Presentation] Tapered Hollow Waveguide Multiplexer for Multi-wavelength VCSEL array2007

    • Author(s)
      Naoto Kitabayashi, Akihiro Imamura, Akihiro Matsutani and Fumio Koyama
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      20070709-13
  • [Presentation] Transvers-mode and Polarization Characteristics of 1.55μm Micromachined VCSELs2007

    • Author(s)
      Koichi Hasebe, Wiganes Janto, Nobuhiko Nishiyama, Catherine Caneau, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama and Chung-En Zah
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama. Japan
    • Year and Date
      20070709-13
  • [Presentation] Modeling of Slow Light Modulator with Tilt Coupling Scheme2007

    • Author(s)
      Keisuke Kuroki, Go Hirano and Fumio Koyama
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      20070709-13
  • [Presentation] Analysis of Large Kink Mechanism in I-L Characteristics of Tunnel Injection Lasers2007

    • Author(s)
      Hiroshi Nakajima, Tomoyuki Miyamoto, Takahiro Iwasaki, Yasutaka Higa and Fumio Koyama
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      20070709-13
  • [Presentation] Tapered Hollow Waveguide Multiplexer for Multi-wavelength VCSEL array," 12th Optoelectronics and Communications Conference/16th International Conference on Integrated Optics and Optical Fiber Communication2007

    • Author(s)
      Naoto Kitabayashi, Akihiro Imamura, Akihiro Matsutani and Fumio Koyama
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      20070709-13
  • [Presentation] Transverse-mode and Polarization Characteristics of 1.55μm Micromachined VCSELs2007

    • Author(s)
      Koichi Hasebe, Wiganes Janto, Nobuhiko Nishiyama, Catherine Caneau, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama and Chung-En Zah
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      20070709-13
  • [Presentation] Fabrication and characterization of tunable chromatic dispersion compensator based on hollow waveguide2007

    • Author(s)
      Tomofumi Takeishi, Takahiroi Sakaguchi and Fumio Koyama
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      20070709-13
  • [Presentation] Reduction of spacer layer thickness of InAs quantum dots using GaNAs strain compensation laye2007

    • Author(s)
      Ryoichiro Suzuki, Tomoyuki Miyamoto and Fumio Koyama
    • Organizer
      EMS-26
    • Place of Presentation
      Shiga, Japan
    • Year and Date
      20070704-06
  • [Presentation] Plasma characterization of H20-inductively coupled plasma for dry etching2007

    • Author(s)
      A.Matsutani, H.Ohtsuki and F.Koyama
    • Organizer
      IVC-17
    • Place of Presentation
      Stockholm, Sweden
    • Year and Date
      20070702-06
  • [Presentation] Post-Annealing Effects on Emission Characteristics of InAs Quantum Dots on GaNAs Buffer Layer2007

    • Author(s)
      Ryoichiro Suzuki, Tomoyuki Miyamoto and Fumio Koyama
    • Organizer
      IPRM2007
    • Place of Presentation
      Matsue, Japan
    • Year and Date
      20070514-18
  • [Presentation] Recent Advances of VCSEL Technologies," International Conference on Indium Phosphide and Related Materials2007

    • Author(s)
      Fumio Koyama and Tomoyuki Miyamoto
    • Organizer
      IPRM2007
    • Place of Presentation
      Matsue, Japan
    • Year and Date
      20070514-18
  • [Presentation] Polarization Controlled 0.85 μm VCSELs with Plasmonic Nanorods2007

    • Author(s)
      Padullaparthi Babu Dayal and Fumio Koyama
    • Organizer
      CLEO 2007
    • Place of Presentation
      Baltimore, USA
    • Year and Date
      20070508-10
  • [Presentation] High Speed Response of Optical Nonlinear Phase Shifter Based on 1.55 μm VCSEL2007

    • Author(s)
      Satoshi Suda, Fumio Koyama, Nobuhiko Nishiyama, Catherine Caneau, Chung-En Zah
    • Organizer
      CLEO 2007
    • Place of Presentation
      Baltimore, USA
    • Year and Date
      20070508-10

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Published: 2010-02-04   Modified: 2012-08-22  

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