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2010 Fiscal Year Final Research Report

Nanostructure creation and its functionalization

Research Project

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Project/Area Number 19206016
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionThe University of Tokyo

Principal Investigator

ISHIHSRA Sunao  The University of Tokyo, 大学院・工学系研究科, 教授 (00422329)

Co-Investigator(Kenkyū-buntansha) YAMAGUCHI Hiroshi  日本電信電話株式会社, NTT物性科学基礎研究所, 研究部長 (60374071)
WARISAWA ShinーIchi  東京大学, 大学院・工学系研究科, 准教授 (20262321)
DELAUNEY JeanーJacques  東京大学, 大学院・工学系研究科, 准教授 (80376516)
KOMETANI Reo  東京大学, 大学院・工学系研究科, 助教 (90466780)
Project Period (FY) 2007 – 2010
Keywordsナノメカニクス / 三次元ナノ構造 / ナノ振動子 / センシングデバイス / ナノ加工 / ナノ計測 / 機械振動共振特性 / 電子ビーム・イオンビーム加工
Research Abstract

Due to their small scales, nanomechanical structures have great potential in realizing innovative mechanical devices and machines utilizing new properties and functions. Towards pioneering mechanical engineering research field named Na"nomechanics", fundamental investigations into fabrication, measurement and characterization technologies to evaluate the dynamic properties of nanomachanical resonators and their applications to resonator-based sensing devices were conducted.

  • Research Products

    (28 results)

All 2010 2009 2008 2007 Other

All Journal Article (10 results) Presentation (13 results) Remarks (1 results) Patent(Industrial Property Rights) (4 results)

  • [Journal Article] Piezoresistive effect in the three-dimensional diamondlike carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      J.Vac.Sci.Technol.B 28

      Pages: C6F38

  • [Journal Article] Dynamic Characteristics Design System for 3D Nanostructure Fabricated by FIB-CVD2010

    • Author(s)
      S.Nishi, R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      J.Adv.Mech.Des.Sys.Man. 4

      Pages: 948

  • [Journal Article] Evaluation of Resonance Characteristics Change of Silicon Resonators Due to Surface Treatment2010

    • Author(s)
      H.Shimizu, J.-J.Delaunay, R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 49

      Pages: "06GN13-1"-"06GN13-4"

  • [Journal Article] The 3D nanostructure growth evaluations by the real-time current monitoring on focusedion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Microelectronic Eng. 87

      Pages: 1044-1048

  • [Journal Article] Evaluating Method for Quality Factor of Nano-resonator by Electron Beam2009

    • Author(s)
      H.Ashiba, S.Warisawa, S.Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 48

      Pages: "06FG08-1"-"06FG08-5"

  • [Journal Article] Evaluation of Thermal-mechanical Vibration Amplitude and Mechanical Properties for Carbon Nanopillars Using Scanning Electron Microscopy2009

    • Author(s)
      K.Nonaka, K.Tamaru, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 48

      Pages: "06FG076-1"-"06FG076-5"

  • [Journal Article] Direct Actuation of GaAs Membrane with the Microprobe of Scanning Probe Microscopy2009

    • Author(s)
      K.Tamaru, K.Nonaka, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 48

      Pages: "06FG06-1"-"06FG06-5"

  • [Journal Article] Nanoelectromechanical device fabrications by 3-D nanotechnology using focused-ion beams2009

    • Author(s)
      R.Kometani, S.Ishihara
    • Journal Title

      Sci.Technol.Adv.Mater. 10

      Pages: "034501-1"-"034501-7"

  • [Journal Article] Height dependence of Young's Modulus for Carbon Nanopillars Grown by Focused Ion Beam Induced Chemical Vapor Deposition2008

    • Author(s)
      K.Nonaka, K.Tamaru, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 47

      Pages: 5116-5119

  • [Journal Article] Improved resonance characteristics of GaAs beam resonators by epitaxially induced strain2008

    • Author(s)
      H.Yamaguchi, K.Kato, Y.Nakai, K.Onomitsu, S.Warisawa, S.Ishihara
    • Journal Title

      App.Phys.Lett. 92

      Pages: "251913-1"-"251913-3"

  • [Presentation] Vibration Characteristics of Monolayer Graphene Resonator2010

    • Author(s)
      T.Hatakeyama, R.Kometani, M.Nagase, S.Warisawa, S.Ishihara
    • Organizer
      The 54^<th> Intn'l Conf.on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2010).
    • Place of Presentation
      Anchorage, Alaska
    • Year and Date
      2010-06-03
  • [Presentation] The piezoresistive effect in the 3-D diamond-like carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani, K.Yusa, S.Warisawa, S.Ishihara
    • Organizer
      The 54^<th> Intn'l Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2010)
    • Place of Presentation
      Anchorage, Alaska
    • Year and Date
      2010-06-02
  • [Presentation] Non Core-Shell Nanostructure Deposition on Focused-Ion-Beam Chemical Vapor Deposition2009

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      22nd International Microprocesses and Nanotechnology Conf.(MNC2009)
    • Place of Presentation
      Sapporo
    • Year and Date
      2009-11-19
  • [Presentation] Evaluation of Resonance Characteristics Change of Silicon Resonators due to Surface Treatment2009

    • Author(s)
      H.Shimizu, J.-J.Delaunay, R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      22nd Intn'l Microprocesses and Nanotechnology Conf. (MNC2009)
    • Place of Presentation
      Sapporo
    • Year and Date
      2009-11-18
  • [Presentation] Vibration Characteristics-Tunable Resonator Fabrication by Focused-Ion -Beam Chemical Vapor Deposition2009

    • Author(s)
      S.Nishi, R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      the 22nd Intn'l Microprocesses and Nano- technology Conf. (MNC2009)
    • Place of Presentation
      Sapporo
    • Year and Date
      2009-11-18
  • [Presentation] High-sensitive charge detection using anti-symmetric vibration in coupled micromechanical resonators2009

    • Author(s)
      N.Kitajima, H.Okamoto, T.Kamada, K.Onomitsu, S.Warisawa, S.Ishihara, H.Yamaguchi
    • Organizer
      22nd Intn'l Microprocesses & Nanotechnology Conf. (MNC2009)
    • Place of Presentation
      Sapporo
    • Year and Date
      2009-11-18
  • [Presentation] The 3-D nanostructure growth evaluations by the real-time current monitoring on focused-ionbeam chemical vapor deposition2009

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      The 35th International Conference on Micro & Nano Engineering (MNE2009)
    • Place of Presentation
      Ghent, BelgiumS
    • Year and Date
      2009-09-30
  • [Presentation] Evaluations of The Hopping Growth Characteristics on 3-D Nanostructure Fabrication Using Focused-Ion-Beam2009

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      The 53rd Intn'l Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2009)
    • Place of Presentation
      Marco Island, Florida, USA
    • Year and Date
      2009-05-25
  • [Presentation] Evaluation Method for Quality Factor of Nano-resonator by Electron Beam2008

    • Author(s)
      H.Ashiba, S.Warisawa, S.Ishihara
    • Organizer
      21st Intn'l Microprocesses and Nanotechnology Conf. (MNC2008)
    • Place of Presentation
      Fukuoka
    • Year and Date
      20081127-20081130
  • [Presentation] Evaluation of Thermal-mechanical Vibration Amplitude Using Scanning Electron Microscopy Images2008

    • Author(s)
      K.Nonaka, K.Tamaru, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Organizer
      21st Intn'l Microprocesses and Nanotechnology Conf. (MNC2008)
    • Place of Presentation
      Fukuoka.
    • Year and Date
      20081127-20081130
  • [Presentation] Direct Actuation of GaAs Membrane Using Microprobe of SPM2008

    • Author(s)
      K.Tamaru, K.Nonaka, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Organizer
      21^<st> Microprocesses and Nanotechnology Conf.(MNC2008)
    • Place of Presentation
      Fukuoka
    • Year and Date
      20081127-20081130
  • [Presentation] Drastic Improvement in mechanical properties of micromechanical resonators using a strain-engineered heterostructure2008

    • Author(s)
      K.Kato, K.Onomitsu, S.Warisawa, S.Ishihara, H.Yamaguchi
    • Organizer
      15^<th> International Conference on Molecular Beam Epitaxy (MBE2008)
    • Place of Presentation
      at the University of British Columbia, Vancouver, Canada
    • Year and Date
      20080803-20080808
  • [Presentation] Control of Young's Modulus for Carbon Nanopillars Grown by Focused Ion Beam Induced Chemical Vapor Deposition2007

    • Author(s)
      K.Nonaka, K.Tamaru, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Organizer
      20^<th> Intn'l Microprocesses and Nanotechnology Conf.(MNC2007)
    • Place of Presentation
      Kyoto
    • Year and Date
      20071106-20071108
  • [Remarks] ホームページ等

    • URL

      http://www.nanome.t.u-tokyo.ac.jp

  • [Patent(Industrial Property Rights)] 微小構造体の作製方法2010

    • Inventor(s)
      米谷玲皇, 石原直, 割澤伸一, 遊佐幸樹, 山口浩司, 永瀬雅夫, 岡本創
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Industrial Property Number
      特許,特願2010-122423
    • Filing Date
      2010-05-28
  • [Patent(Industrial Property Rights)] 微小構造体の製造方法2010

    • Inventor(s)
      米谷玲皇, 石原直, 割澤伸一, 黒田耕平, 山口浩司, 永瀬雅夫, 岡本創
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Industrial Property Number
      特許,特願2010-141690
    • Filing Date
      2010-06-22
  • [Patent(Industrial Property Rights)] 薄膜振動子およびその製造方法2009

    • Inventor(s)
      永瀬雅夫, 山口浩司, 石原直, 割澤伸一, 田丸耕二郎
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Industrial Property Number
      特許,特願2009-078589
    • Filing Date
      2009-03-27
  • [Patent(Industrial Property Rights)] 微小機械共振器ならびに微小機械検出素子2009

    • Inventor(s)
      石原直, 割澤伸一, 加藤慶一, 山口浩司, 小野満恒二
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Industrial Property Number
      特許,特願2008-70933
    • Filing Date
      2009-03-19

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Published: 2012-01-26   Modified: 2016-04-21  

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