2010 Fiscal Year Final Research Report
Development of a surface gradient integrated profiler for the next generation high accuracy mirror
| Project/Area Number |
19206019
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Osaka University |
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Principal Investigator |
ENDO Katsuyoshi Osaka University, 工学研究科, 教授 (90152008)
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| Co-Investigator(Kenkyū-buntansha) |
HIGASHI Yasuo 大学共同利用機関法人高エネルギー加速器研究機構, 機械工学センター, 准教授 (70208742)
UCHIKOSHI Jyunichi 大阪大学, 工学研究科, 助教 (90273581)
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| Co-Investigator(Renkei-kenkyūsha) |
KUME Tatsuya 大学共同利用機関法人高エネルギー加速器研究機構, 機械工学センター, 助教 (40353362)
ENAMI Kazuhiro 大学共同利用機関法人高エネルギー加速器研究機構, 機械工学センター, 助教 (00370073)
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| Project Period (FY) |
2007 – 2010
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| Keywords | 形状測定 / 高精度ミラー / 非球面光学素子 / 法線ベクトル / 5軸同時制御 / 形状誤差 / 絶対形状測定 / 超精密加工 |
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| Research Abstract |
In order to develop X-ray free electron laser sources, the ultraprecision asymmetric mirrors which realize nano-focusing and high coherence are indispensable. In industry, the high accurate asymmetric mirrors are required for extreme ultraviolet lithography which is a promising fabrication technology for semiconductor devices.
A surface gradient integrated profiler can be developed for the next generation high accuracy asymmetric mirrors. The new profiler is based on the straightness of laser light without a reference surface. The performances of the profiler are as follows. The accuracy of measurement of the mirror profile is 1 nmPV. The resolution of measurement of the rotation angle is 0.17 μrad. And the time of measurement is 5 min/sample. A spherical mirror with a radius of 400 mm is measured by the profiler. The repeatability of two-dimensional profile measurements is less than 1 nm. The profile of the spherical mirror with R = 400 mm to be measured by using the profiler is compared with that measured by using the Fizeau interferometer and coordinate measuring machine. The profile measured by using the profiler coincides with that measured by using other profilers, within approximately 10 nm. These differences of profiles are based on systematic errors, respectively.
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[Journal Article] A simultaneous multiwavelength dispersive X-ray reflectometer for time-resolved reflectometry2009
Author(s)
T.Matsushita, E.Arakawa, Y.Niwa, Y.Inada, T.Hatano, T.Harada, Y.Higashi, K.Hirano, K.Sakurai, M.Ishii, M.Nomura
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Journal Title
The European Physical Journal Special Topics VOL.167
Pages: 113-119
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[Presentation] Time-Resolve X-ray Reflectom ettry in the Multiwavelength Dispersive Geometry2009
Author(s)
Tadasgi.Matsushita, Etsuo Arakawa, Tetsuo Harada, Tadashi Hatano, Yasuo Higashi, York F.Yano, Yasuhiro Niwa, Yasuhiro Inada, Shusaku Nagano, Takahiro Seki
Organizer
SRI09
Place of Presentation
Melbourne, Australia
Year and Date
2009-09-29
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