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2008 Fiscal Year Annual Research Report

ネオシリコンの集積配列制御と量子情報デバイスの試作

Research Project

Project/Area Number 19206035
Research InstitutionTokyo Institute of Technology

Principal Investigator

小田 俊理  Tokyo Institute of Technology, 量子ナノエレクトロニクス研究センター, 教授 (50126314)

Co-Investigator(Kenkyū-buntansha) 水田 博  東京工業大学, 大学院・理工学研究科, 連携教授 (90372458)
内田 建  東京工業大学, 大学院・理工学研究科, 准教授 (30446900)
Keywordsナノ結晶シリコン / LB膜法 / 分散溶液 / 量子情報デバイス / 3重nc-Si量子ドット / 微小電荷検出
Research Abstract

ナノ結晶シリコン(以下nc-Si)形成条件を詳細に検討して、VHFプラズマパワーを最適化することにより、粒径5nmのnc-Siを実現できた。ナノ結晶に不純物(りん)ドーピングを行い、nc-Si表面の酸化膜形成速度が増加すること、磁気共鳴の超微細構造分裂幅から、りんがnc-Si中のシリコン原子を置換していることを明らかにした。Siナノワイヤに加えてGeナノワイヤも低温で形成できることを明らかにして、表面を窒素ラジカルで処理することにより水溶性で不安定な酸化膜形成を防止できることが分かった。nc-Siの2次元集積配列技術に関しては、シランカップリング剤の表面修飾条件を最適化して、従来の5μm四方から10mm四方へと飛躍的に大面積化を実現した。
ネオシリコン量子情報素子の作製と電子輸送評価に関しては、多重結合量子ドットを形成して、低温での電気測定結果と等価回路シミュレーションの比較検討を行った。その結果、3重結合量子ドットが実現できていることを世界で初めて観測した。これは、量子情報デバイスにおいて極めて重要なステップである。さらに量子ドットの制御性を向上するため、不純物ドーピング領域を制限して、トップゲート構造による2次元反転電荷を利用する事により、ポテンシャル揺らぎによる偶発的な量子ドットの形成を抑制する新しいデバイス構造を設計し、プロセスを検討したところ、良好なデバイス作製に成功した。

  • Research Products

    (46 results)

All 2008 Other

All Journal Article (19 results) (of which Peer Reviewed: 19 results) Presentation (25 results) Book (1 results) Remarks (1 results)

  • [Journal Article] Single-electron tunnelling via quantum dot cavities built on a silicon suspension nanobridge2008

    • Author(s)
      J. Ogi, S. Oda, et al.
    • Journal Title

      Microelectronics Engineering 85

      Pages: 1410-1412

    • Peer Reviewed
  • [Journal Article] Synthesis of Assembled Nanocrystalline Si Dots Film by the Langmuir-Blodgett Technique2008

    • Author(s)
      A. Tanaka, S. Oda, et, al.
    • Journal Title

      Japanese Journal of Applied Physics 47

      Pages: 3731-3734

    • Peer Reviewed
  • [Journal Article] Impact of key circuit parameters on signal-to-noise ratio characteristics for the radio-frequency single electron transistors2008

    • Author(s)
      M. Manoharan, S. Oda, et al.
    • Journal Title

      IEEE Transactions on Nanotechnology 7

      Pages: 266-272

    • Peer Reviewed
  • [Journal Article] Observation of Quantum Level Spectrum for Silicon Double Single-Electron Transistors2008

    • Author(s)
      Y. Kawata, S. Oda, et al.
    • Journal Title

      Applied Physics Express 1

      Pages: 051401

    • Peer Reviewed
  • [Journal Article] Control of Electrostatic Coupling Observed for Silicon Double Quantum Dot Structures2008

    • Author(s)
      G. Yamahata, S. Oda, et al.
    • Journal Title

      Japanese Journal of Applied Physics 47

      Pages: 4820-4826

    • Peer Reviewed
  • [Journal Article] Size-Dependent Structural Characterization of Silicon Nanowires2008

    • Author(s)
      Saeed Akhtar, S, Oda, et al.
    • Journal Title

      Japanese Journal of Applied Physics 47

      Pages: 5053-5056

    • Peer Reviewed
  • [Journal Article] Influence of nanocrystal size on conduction mechanism across silicon nanocrystals2008

    • Author(s)
      X. Zhou, S. Oda, et al.
    • Journal Title

      Journal of Applied Physics 104

      Pages: 024518

    • Peer Reviewed
  • [Journal Article] The impacts of surface conditions on the vapor-liquid-solid growth of germanium nanowires on Si (100)substrate2008

    • Author(s)
      C. B. Li, S. Oda, et al.
    • Journal Title

      Applied Physics Letters 93

      Pages: 041917

    • Peer Reviewed
  • [Journal Article] Design optimization of NEMS switches for suspended-gate single-electron transistor applications2008

    • Author(s)
      B. Pruvost, S. Oda, et al.
    • Journal Title

      IEEE Transactions on Nanotechnology 8

      Pages: 174-184

    • Peer Reviewed
  • [Journal Article] Electron transport through silicon serial triple quantum dots2008

    • Author(s)
      G. Yamahata, S. Oda, et al.
    • Journal Title

      Solid State Electronics (In press)

    • Peer Reviewed
  • [Journal Article] Spontaneous Emission Control of Silicon Nanocrystals by Silicon Three-Dimensional Photonic Crystal Structure Fabricated by Self-Aligned Two-Directional Electrochemical Etching Method2008

    • Author(s)
      D. Hippo, S. Oda, et al.
    • Journal Title

      Materials Chemistry and Physics (In press)

    • Peer Reviewed
  • [Journal Article] Formation Mechanism of 100 nm-Scale Periodic-Structures in Silicon Using Magnetic-Field-Assisted Anodization2008

    • Author(s)
      D. Hippo, S. Oda, et al.
    • Journal Title

      Japanese Journal of Applied Physics 47

      Pages: 7398-7402

    • Peer Reviewed
  • [Journal Article] Study of Single-Charge Polarization on a Pair of Charge Qubits Integrated onto Silicon Double Single-Electron Transistor Readout2008

    • Author(s)
      Y. Kawata, S. Oda, et al.
    • Journal Title

      IEEE Transactions on Nanotechnology 7

      Pages: 617-623

    • Peer Reviewed
  • [Journal Article] Impact of channel constrictions on the formation of multiple tunnel junctions in heavily doped silicon single electron transistors2008

    • Author(s)
      M. Manoharan, S. Oda, et al.
    • Journal Title

      Applied Physics Letters 93

      Pages: 112107

    • Peer Reviewed
  • [Journal Article] Visible Electroluminescence from Spherical-shaped Silicon Nanocrystals2008

    • Author(s)
      H-J Cheong, S. Oda, et al.
    • Journal Title

      Japanese Journal of Applied Physics 47

      Pages: 8137-8140

    • Peer Reviewed
  • [Journal Article] Influence of the Crystal Orientation of Substrate on Low Temperature Synthesis of Silicon Nanowires from Si2H62008

    • Author(s)
      Saeed Akhtar, S. Oda, et al.
    • Journal Title

      Thin Solid Films 517

      Pages: 317-319

    • Peer Reviewed
  • [Journal Article] Silicon-on-Insulator-Based Radio Frequency Single-Electron Transistors Operating at Temperatures above 4.2 K2008

    • Author(s)
      M. Manoharan, S. Oda, et al.
    • Journal Title

      Nano Letters 8

      Pages: 4648-4652

    • Peer Reviewed
  • [Journal Article] Field-dependant hopping conduction in silicon nanocrystal films2008

    • Author(s)
      M. A. Rafiq, S, Oda, et al.
    • Journal Title

      Journal of Applied Physics 104

      Pages: 123710

    • Peer Reviewed
  • [Journal Article] Position-Controllable Ge Nanowires Growth on Patterned Au Catalyst Substrate2008

    • Author(s)
      C. B. Li, S. Oda, et al.
    • Journal Title

      Applied Physics Express 2

      Pages: 015004

    • Peer Reviewed
  • [Presentation] Electron transport and photonic properties of Si nanocrystals prepared by VHF plasma processes (invited)2008

    • Author(s)
      S. Oda
    • Organizer
      2nd International Workshop on Semiconducting Nanoparticles
    • Place of Presentation
      Duisburg
    • Year and Date
      2008-12-12
  • [Presentation] Silicon nanocrystals light-emitters for optical interconnects2008

    • Author(s)
      H-J Cheong
    • Organizer
      214th Meeting of The Electrochemical Society
    • Place of Presentation
      Honolulu
    • Year and Date
      2008-10-14
  • [Presentation] Silicon radio frequency single-electron transistors operating at above 4.2K2008

    • Author(s)
      M. Manoharan
    • Organizer
      Solid State Devices and Materials Conference
    • Place of Presentation
      Tsukuba
    • Year and Date
      2008-09-26
  • [Presentation] Phosphorous-doping in silicon nanocrystals2008

    • Author(s)
      N. Inaba
    • Organizer
      34th International Conference on Micro- and Nano-Engineering
    • Place of Presentation
      Athens
    • Year and Date
      2008-09-18
  • [Presentation] Enhanced tunnel conductance due to QCA cotunneling processes observed for silicon serial triple quantum dots2008

    • Author(s)
      G. Yamahata
    • Organizer
      ESSDERC
    • Place of Presentation
      Edinburgh
    • Year and Date
      2008-09-16
  • [Presentation] Detection of Single-Charge Polarisation in Silicon Double Quantum Dots by Using Serially-Connected Multiple Single-Electron Transistors2008

    • Author(s)
      Y. Kawata
    • Organizer
      ESSDERC
    • Place of Presentation
      Edinburgh
    • Year and Date
      2008-09-16
  • [Presentation] Silicon quantum dots : the future of electronics and photonics? (invited)2008

    • Author(s)
      S. Oda
    • Organizer
      Nano Korea 2008
    • Place of Presentation
      Seoul
    • Year and Date
      2008-08-27
  • [Presentation] The influence of surface condition on the growth of germanium nanowire on Si substrate2008

    • Author(s)
      C. B. Li
    • Organizer
      29^<th> International Conference on Physics of Semiconductors
    • Place of Presentation
      Rio de Janeiro
    • Year and Date
      2008-07-29
  • [Presentation] Silicon nanochains : Electron transport properties and applications2008

    • Author(s)
      M. A. Rafiq
    • Organizer
      29^<th> International Conference on Physics of Semiconductors
    • Place of Presentation
      Rio de Janeiro
    • Year and Date
      2008-07-29
  • [Presentation] Size effect on hopping conduction in silicon nanocrystals2008

    • Author(s)
      X. Zhou
    • Organizer
      29^<th> International Conference on Physics of Semiconductors
    • Place of Presentation
      Rio de Janeiro
    • Year and Date
      2008-07-29
  • [Presentation] Silicon quantum dot devices (invited)2008

    • Author(s)
      S. Oda
    • Organizer
      Japan-Brazil Memorial Symposium on Science and Technology for the Celebration of 100 years of Japanese Immigration to Brazil
    • Place of Presentation
      Sao Paulo
    • Year and Date
      2008-06-24
  • [Presentation] Design optimization of NEMS switches for single-electron logic applications2008

    • Author(s)
      B. Pruvost
    • Organizer
      IEEE Silicon Nanoelectrinics Workshop
    • Place of Presentation
      Honolulu
    • Year and Date
      2008-06-15
  • [Presentation] Controlled Ge nanowire growth on patterned Au catalyst substrate2008

    • Author(s)
      C. B. Li
    • Organizer
      IEEE Silicon Nanoelectrinics Workshop
    • Place of Presentation
      Honolulu
    • Year and Date
      2008-06-15
  • [Presentation] Electron transport through silicon multiple quantum dot array devices2008

    • Author(s)
      G. Yamahata
    • Organizer
      IEEE Silicon Nanoelectrinics Workshop
    • Place of Presentation
      Honolulu
    • Year and Date
      2008-06-15
  • [Presentation] Anomalous suppression of single-electron tunneling observed for Si nano bridge transistors with a suspended quantum dot cavity2008

    • Author(s)
      J. Ogi
    • Organizer
      IEEE Silicon Nanoelectrinics Workshop
    • Place of Presentation
      Honolulu
    • Year and Date
      2008-06-15
  • [Presentation] Is it possible to avoid uncontrolled multiple tunnel junctions induced by random dopants in heavily-doped silicon single-electron transistors?2008

    • Author(s)
      M. Manoharan
    • Organizer
      IEEE Silicon Nanoelectrinics Workshop
    • Place of Presentation
      Honolulu
    • Year and Date
      2008-06-15
  • [Presentation] Atomic study of phonon states in hydrogen-terminated Si ultra-thin films2008

    • Author(s)
      S. Sawai
    • Organizer
      IEEE Silicon Nanoelectrinics Workshop
    • Place of Presentation
      Honolulu
    • Year and Date
      2008-06-15
  • [Presentation] Transient response anlaysis of programming/readout characteristics for NEMS memory2008

    • Author(s)
      T. Nagami
    • Organizer
      IEEE Silicon Nanoelectrinics Workshop
    • Place of Presentation
      Honolulu
    • Year and Date
      2008-06-15
  • [Presentation] P-type Si nanocrystal thin-film transistor2008

    • Author(s)
      X. Zhou
    • Organizer
      IEEE Silicon Nanoelectrinics Workshop
    • Place of Presentation
      Honolulu
    • Year and Date
      2008-06-15
  • [Presentation] Observation of quantum level spectrum for silicon double single-electron transistors2008

    • Author(s)
      Y. Kawata
    • Organizer
      IEEE Silicon Nanoelectrinics Workshop
    • Place of Presentation
      Honolulu
    • Year and Date
      2008-06-15
  • [Presentation] Switching properties of electromechanically bistable and multistable bridges for nonvolatile memory applications2008

    • Author(s)
      Y. Tsuchiya
    • Organizer
      IEEE Silicon Nanoelectrinics Workshop
    • Place of Presentation
      Honolulu
    • Year and Date
      2008-06-15
  • [Presentation] Silicon quantum dot devices (invited)2008

    • Author(s)
      S. Oda
    • Organizer
      26th International Conference on Microelectronics
    • Place of Presentation
      Nis, Serbia
    • Year and Date
      2008-05-12
  • [Presentation] Silicon-based Quantum Information Devices2008

    • Author(s)
      Gento Yamahata
    • Organizer
      Forth International Nanotechnology Conference on Communication and Cooperation (INC-4)
    • Place of Presentation
      Tokyo
    • Year and Date
      2008-04-14
  • [Presentation] Integration, Assembly and Doping of Nanocrystalline Silicon Quantum Dots2008

    • Author(s)
      T. Ishikawa
    • Organizer
      Forth International Nanotechnology Conference on Communication and Cooperation (INC-4)
    • Place of Presentation
      Tokyo
    • Year and Date
      2008-04-14
  • [Presentation] NEMS Memory Devices for Future Integrated Systems2008

    • Author(s)
      T. Nagami
    • Organizer
      Forth International Nanotechnology Conference on Communication and Cooperation (INC-4)
    • Place of Presentation
      Tokyo
    • Year and Date
      2008-04-14
  • [Book] Device Applications of Silicon Nanocrystals and Nanostructures (Nanostructure Science and Technology)2008

    • Author(s)
      H. Mizuta, S. Uno, N. Mori, S. Oda, N. Koshida
    • Total Pages
      197-222
    • Publisher
      Springer
  • [Remarks]

    • URL

      http://odalab.pe.titech.ac.jp/

URL: 

Published: 2010-06-11   Modified: 2016-04-21  

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