2009 Fiscal Year Final Research Report
Development of Sequential Self-Assembly Technique for MEMS
| Project/Area Number |
19310088
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Microdevices/Nanodevices
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| Research Institution | Kyoto University |
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Principal Investigator |
TABATA Osamu Kyoto University, 工学研究科, 教授 (20288624)
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| Project Period (FY) |
2007 – 2009
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| Keywords | マイクロファブリケーション / セルフ・アセンブル / マイクロシステム / MEMS / 機能コンポーネント / DNA |
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| Research Abstract |
A development of a sequential self-assembly (SSA) technique to assemble functional components on a micro electro mechanical systems (MEMS) by self-assembly with controlling the assembly order was carried out. Feasibility study of several different approaches such as a contact potential difference, optically induced dielectrophoresis, template assisted self-assembly, and DNA mediated self-assembly were performed. Furthermore, a new modeling method of self-assembly for the component size from millimeter to micrometer scale was proposed and its validity was confirmed experimentally. Consequently, DNA mediated SSA technique under controlled ambient temperature was proved to be the most promising approach.
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[Presentation]
Author(s)
G. Lopez, T. Tanemura, R. Sato, T. Saeki, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata, M. Fujita, , M. Maeda
Organizer
The 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Place of Presentation
Xiamen, China
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