Development of a method for surface chemical analysis with atomic-depth resolution using multi-charge ions

2008 Fiscal Year Final Research Report

• Project/Area Number: 19360016
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Tokyo University of Agriculture and Technology
• Principal Investigator: MOTOHASHI Kenji Tokyo University of Agriculture and Technology, 大学院・共生科学技術研究院, 助教 (50251583)
• Co-Investigator(Kenkyū-buntansha): KANAI Yasuyuki 独立行政法人理化学研究所, 山崎原子物理研究室, 先任研究員 (00177487)
• Co-Investigator(Renkei-kenkyūsha): KANAI Yasuyuki 独立行政法人理化学研究所, 山崎原子物理研究室, 先任研究員 (00177487)
• Project Period (FY): 2007 – 2008
• Keywords: ビーム応用

Research Abstract

表面の原子層を選別しながら、表面構成原子の種類を高感度に特定できる表面分析法(表面化学分析法)を実現するため、多価イオンを用いた散乱粒子・二次粒子同時測定装置を開発した。多価イオンの持つ反応性の高さと状態選択性の高さを利用することにより、極めて少ない入射イオン量でありながら、表面第1層と第2層を区別しながら表面原子の種類を特定することに成功した。

Research Products

• [Journal Article] Surface Chemical Analysis usingMultiply Charged Ions (2009)
  • Author(s): K. Motohashi
  • Journal Title: e-J.Surf. Sci. Nanotech 7 Pages: 21-24
  • Peer Reviewed
• [Journal Article] Protonsputtering from polycrystalline Al surface interactingwith highly charged ions at grazing incidence angle (2007)
  • Author(s): K. Motohashi and S. Tsurubuchi
  • Journal Title: Nucl Instrum. Meth. Phys. Res. B 264 Pages: 15-22
  • Peer Reviewed
• [Journal Article] Analyses of GaN (0001)and (0001) surfaces by highly-charged ions (2007)
  • Author(s): K. Motohashi, K. Hosoya, M. Imano, S.Tsurubuchi, and A. Koukitu
  • Journal Title: Surf.Sci 601 Pages: 5304-5308
  • Peer Reviewed
• [Journal Article] Secondary-Ion Emission in Grazing Collisions between Highly Charged Ions and Surfaces (2007)
  • Author(s): K. Motohashi, S. Tsurubuchi, and A. Koukitu
  • Journal Title: J.Phys. : Conf. Ser 80 Pages: 012015-1-012015-8
  • Peer Reviewed
• [Journal Article] 小特集多価イオン原子過程の基礎と拡がる応用研究2.2多価イオン-原子・分子・固体表面 (2007)
  • Author(s): 本橋健次
  • Journal Title: プラズマ・核融合学会誌 83 Pages: 665-670
  • Peer Reviewed
• [Journal Article] Coincidence measurements ofsecondary ions and scattered ions in collision betweenslow Ar^<6+> and a GaN(0001) surface, s
  • Author(s): K. Motohashi
  • Journal Title: J. Phys Conf.Ser. (accepted for publication)
  • Peer Reviewed
• [Journal Article] Fragmentation and desorption inlow-energy highly charged ion collisions withmolecules and surfaces
  • Author(s): K. Motohashi
  • Journal Title: J.Phys. : Conf. Ser. accepted for publication
  • Peer Reviewed
• [Journal Article] Secondary-ion emission from GaN(0001) anddodecanethiol/Au(111) surfaces irradiated with Ar^<q+> (q=4-8)
  • Author(s): K. Motohashi, M. Flores and Y. Kanai
  • Journal Title: J.Phys. : Conf. Ser. accepted for publication
  • Peer Reviewed
• [Presentation] 低速多価イオン-固体表面衝突における二次粒子放出 (2009)
  • Author(s): 本橋健次
  • Organizer: 日本物理学会第64回年次大会
  • Place of Presentation: 立教学院池袋キャンパス
  • Year and Date: 2009-03-28
• [Presentation] Sputtering with slow highlycharged ions under glancing incidence (2008)
  • Author(s): Kenji Motohashi
  • Organizer: The 8^<th> AsianInternational Seminar on Atomic and Molecular Physics
  • Place of Presentation: University of WesternAustralia(Perth, Australia)
  • Year and Date: 2008-11-25
• [Presentation] Surface chemical analysis using multiply charged ions (2008)
  • Author(s): Kenji Motohashi
  • Organizer: International Symposium on Surface Science and Nanotechnology
  • Place of Presentation: Waseda University(Japan)
  • Year and Date: 2008-11-11
• [Presentation] 多価イオンのすれすれ角衝突によるチオール自己組織化単分子膜表面からの二次イオン放出 (2008)
  • Author(s): 本橋健次, M. Flores, 金井保之, 山崎泰規
  • Organizer: 日本物理学会2008年秋季大会
  • Place of Presentation: 岩手大学
  • Year and Date: 2008-09-21
• [Presentation] 多価イオンを用いた表面原子層選別SIMSの開発I (2008)
  • Author(s): 本橋健次
  • Organizer: 第55回応用物理学関係連合講演会
  • Place of Presentation: 日本大学船橋キャンパス
  • Year and Date: 2008-03-27
• [Presentation] 低速多価イオン-固体表面衝突における散乱粒子の二次元検出 (2007)
  • Author(s): 本橋健次
  • Organizer: 日本物理学会第62回年次大会
  • Place of Presentation: 北海道大学札幌キャンパス
  • Year and Date: 2007-09-21
• [Presentation] 多価イオン照射固体表面からの散乱原子と二次粒子の同時計測 (2007)
  • Author(s): 本橋健次
  • Organizer: 第68回応用物理学会学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-07
• [Presentation] Surface chemical analysis bymulticharge ion induced desorption (2007)
  • Author(s): Kenji Motohashi
  • Organizer: The 10^<th> AsiaPacific Physics Conference
  • Place of Presentation: POSTECH(Pohang, Korea)
  • Year and Date: 2007-08-23
• [Book] ISSP10(Proceedings of the 10^<th> ISSP International Symposium in Nanoscience at Surfaces) (2007)
  • Author(s): K. Motohashi, K. Hosoya, M. Imano, S. Tsurubuchi,and A. Koukitu
  • Total Pages: 5304-5308
  • Publisher: ELSEVIER