カーボンナノチューブの超精密位置・成長制御によるナノ構造デバイスの研究

2009 Fiscal Year Annual Research Report

• Project/Area Number: 19360160
• Research Institution: Shizuoka University
• Principal Investigator: 中本 正幸 Shizuoka University, 電子工学研究所, 教授 (10377723)
• Keywords: NEMS / 微小電子源 / CNT

Research Abstract

本研究では、微小電子源エミッタ材料の選択性が極めて高く、先鋭で均一な作製法である転写モールド法とカーボンナノチューブ(CNT)作製技術を融合させ、精密位置制御・成長制御された転写モールド法CNT微小電子源の開発を目的とする。
まず、触媒突起型基板を用いた精密位置制御・成長制御された転写モールド法CNT微小電子源の試作を試みた。転写モールド法Ni突起基板に厚さ50nmのTiN層を形成し、NH_3プラズマ処理によりTiNをエッチングした。基板加熱によりNi原子が転写モールド法Ni突起の頂点部のみに拡散しCNT成長のための触媒となる。PECVD法を用いてC_2H_2ガスとNH_3ガスによりCNTがNi触媒部分に成長し、精密位置制御・成長制御された転写モールド法CNT微小電子源を試作した。試作した転写モールド法CNT微小電子源のアスペクト比は0.93となり、転写モールド法Ni微小電子源の0.71と比較して31%大きくなった。次に、試作した転写モールド法CNT微小電子源の電界電子放出特性を調べた。転写モールド法CNT微小電子源のturn-on電界は12.5V/μmとなり、転写モールド法Ni微小電子源の14.9V/μmと比較して16%turn-on電界が低くなった。精密位置制御・成長制御された転写モールド法CNT微小電子源の開発に成功した。
一方、突起型基板上にCNT超精細電気鍍金微小電子源の試作も試みた。CNTが分散した電解質液を円筒容器に入れ、陽極から20～30mm離して陰極側に突起型基板を装着する。Niイオン濃度25g/L、ホウ酸7.5～15g/L、水素イオン濃度pH6.0±0.5、CNT濃度100mg/L等の条件で鍍金を行うことで、突起部先端にCNTを固着させ、大面積で、しかも低価格の精密位置制御・成長制御された転写モールド法CNT微小電子源の試作に成功した。

Research Products

• [Journal Article] Low work function nanometer-order controlled transfer mold field-emitter arrays (2010)
  • Author(s): Masayuki Nakamoto, et al.
  • Journal Title: J.Vac.Sci.Technol.B 28(2) Pages: C2B1-C2B5
  • Peer Reviewed
• [Journal Article] Properties of surface treated transparent conducting single walled carbon nanotube films (2010)
  • Author(s): S.Manivannan, et al.
  • Journal Title: J Mater Sci : Mater Electron 21 Pages: 72-77
  • Peer Reviewed
• [Journal Article] Field Emission Displays "From Vacuum Tube to Vacuum Nanoelectronics (2010)
  • Author(s): Masayuki Nakamoto
  • Journal Title: J. the Institute of Electronics, Information and Communication 93, No. 1 Pages: 23-28
  • Peer Reviewed
• [Journal Article] Uniform and Stable Transfer Mold Field Emitter Arrays in Hash Environment (2010)
  • Author(s): Masayuki Nakamoto
  • Journal Title: Proc. of Ecole Polytechniue-Kyung Hee University the 7^<th> Joint Workshop Pages: 28-30
  • Peer Reviewed
• [Journal Article] (2010)
  • Author(s): Masayuki Nakamoto
  • Journal Title: Display Materials and Functional Dyes(CMC Publishing Inc.) Pages: 191-225
• [Journal Article] High Response Time Piezoelectric Micromirror MEMS Display (2009)
  • Author(s): Masayuki Nakamoto, et al.
  • Journal Title: Proc. of the 29th International Display Research Conference, Sep. 14-17 Pages: 342-345
  • Peer Reviewed
• [Journal Article] Low work function nanometer-order controlled transfer mold field emitter arrays (2009)
  • Author(s): Masayuki Nakamoto, et al.
  • Journal Title: Technical Digest of 2009 22nd International Vacuum Nanotechnology Conference, Jul. 20-24 Pages: 29-30
  • Peer Reviewed
• [Journal Article] High Response Micromirror MEMS Displays Using PZT Gratings (2009)
  • Author(s): Jonghyun Moon, et al.
  • Journal Title: Proc. of the 16th International Display Workshop, 16 Pages: 1441-1444
  • Peer Reviewed
• [Journal Article] Newly Developed Transfer Mold FEA using Vacuum In-situ Fabrication and Evaluation Method (2009)
  • Author(s): Kazuhisa Eto, et al.
  • Journal Title: Proc. of the 16th International Display Workshop, 16 Pages: 1489-1492
  • Peer Reviewed
• [Journal Article] 40 years history of display technologies and the vision for future displays (2009)
  • Author(s): H.Okumura, et al.
  • Journal Title: IEICE Tranaction on Electronics J92-C, No. 8 Pages: 433-453
  • Peer Reviewed
• [Journal Article] Low Work Function Transfer Mold Nano Field Emitter (2009)
  • Author(s): Masayuki Nakamoto, et al.
  • Journal Title: Proc. of the 1st Korea- Japan Vacuum Nanoelectronics Workshop, Nov. 5-7 Pages: 26-27
  • Peer Reviewed
• [Journal Article] Nanometer-order base length, sharp and uniform field emitter arrays fabricated by transfer mold method (2009)
  • Author(s): Masayuki Nakamoto, et al.
  • Journal Title: Technical Digest of 2009 22^<nd> International Vacuum Nanotechnology Conference, Jul. 20-24 Pages: 167-168
  • Peer Reviewed
• [Journal Article] Uniform and stable emission characteristics for amorphous carbon coated transfer mold nickel field emitter arrays in hash environment (2009)
  • Author(s): Jonghyun Moon, et al.
  • Journal Title: Technical Digest of 2009 22^<nd> International Vacuum Nanotechnology Conference, Jul. 20-24 Pages: 41-42
  • Peer Reviewed
• [Journal Article] Transfer mold FEA using the new fabrication and evaluation method through vacuum in-situ process (2009)
  • Author(s): Kazuhisa Eto, et al.
  • Journal Title: Technical Digest of 2009 22^<nd> International Vacuum Nanotechnology Conference, Jul. 20-24 Pages: 165-166
  • Peer Reviewed
• [Journal Article] Strong atmospheric stability of carbon nanotubes under high temperature annealing (2009)
  • Author(s): Han Eol Lim, et al.
  • Journal Title: Technical Digest of 2009 22^<nd> International Vacuum Nanotechnology Conference, Jul. 20-24 Pages: 23-24
  • Peer Reviewed
• [Journal Article] A simple process of growing vertically aligned carbon nanotube emitter on metal foil for X-ray source (2009)
  • Author(s): Je Hwang Ryu, et al.
  • Journal Title: Technical Digest of 2009 22^<nd> International Vacuum Nanotechnology Conference, Jul. 20-24 Pages: 23-24
  • Peer Reviewed
• [Presentation] 高均一、高アスペクト比、低動作電圧の精密位置制御カーボンナノチューブ転写モールド法エミッタアレイ (2010)
  • Author(s): 中本正幸, 文宗鉉, 白鳥硬次
  • Organizer: 第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学
  • Year and Date: 2010-03-17
• [Presentation] 耐環境性転写モールドTiNエミッタアレイの電界放出電流安定性 (2010)
  • Author(s): 文宗鉉, 中本正幸, 白鳥硬次
  • Organizer: 第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学
  • Year and Date: 2010-03-17
• [Presentation] 苛酷環境下における転写モールド窒化チタンフィールドエミッタアレイ (2010)
  • Author(s): 文宗鉉, 中本正幸, 白鳥硬次
  • Organizer: 第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学
  • Year and Date: 2010-03-17
• [Presentation] エミッタ温度を変化させた場合の真空一貫エミッタ作製評価法及び大気曝露下における転写モールド法Ni-FEAの電界電子放出特性 (2010)
  • Author(s): 衛藤和久, 他
  • Organizer: 第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学
  • Year and Date: 2010-03-17
• [Presentation] 耐苛酷環境性転写モールド法エミッタアレイの研究 (2010)
  • Author(s): 中本正幸, 他
  • Organizer: 第7回真空ナノエレクトロニクスシンポジウム
  • Place of Presentation: 静岡大学
  • Year and Date: 2010-03-03
• [Presentation] Uniform and Stable Transfer Mold Field Emitter Arrays in Hash Environment (2010)
  • Author(s): 中本正幸
  • Organizer: Ecole Polytechniue-Kyung Hee University the 7^<th> Joint Workshop
  • Place of Presentation: Seoul, Korea
  • Year and Date: 2010-02-01
• [Presentation] High Response Micromirror MEMS Displays Using PZT Gratings (2009)
  • Author(s): Jong Hyun Moon, et al.
  • Organizer: 16^<th> International Display Workshops
  • Place of Presentation: World Convention Center Summit Miyazaki
  • Year and Date: 2009-12-10
• [Presentation] Newly Developed Transfer Mold FEA Using Vacuum In-Situ Fabrication and Evaluation Method (2009)
  • Author(s): 衛藤和久, et al.
  • Organizer: 16^<th> International Display Workshops
  • Place of Presentation: World Convention Center Summit Miyazaki
  • Year and Date: 2009-12-10
• [Presentation] Stable Operation Voltage and Low Work Function Transfer Mold Field Emitter Arrays in Harsh Environment (2009)
  • Author(s): Jonghyun Moon, et al.
  • Organizer: the 11th Takayanagi Kenjiro Memorial Symposium
  • Place of Presentation: Hamamatsu, Japan
  • Year and Date: 2009-11-30
• [Presentation] Low Work Function Transfer Mold Nano Field Emitters (2009)
  • Author(s): 中本正幸, et al.
  • Organizer: the 1st Korea- Japan Vacuum Nanoelectronics Workshop
  • Place of Presentation: Korea University, Korea
  • Year and Date: 2009-11-06
• [Presentation] High Response Time Piezoelectric Micromirror MEMS Display (2009)
  • Author(s): 中本正幸, et al.
  • Organizer: the 29th International Display Research Conference
  • Place of Presentation: Rome, Italy
  • Year and Date: 2009-09-16
• [Presentation] Low work fanction nanometer-order controlled transfer mold field emitter arrays (2009)
  • Author(s): 中本正幸, et al.
  • Organizer: 2009 22^<nd> International Vacuum Nanotechnology Conference
  • Place of Presentation: Congress Center, Act city Hamamatsu
  • Year and Date: 2009-07-22
• [Presentation] Uniform and stable emission characteristics for amorphous carbon coated transfer mold nickel fied emitter arrays in hash envieoment (2009)
  • Author(s): Jonghyun Moon, et al.
  • Organizer: 2009 22^<nd> International Vacuum Nanotechnology Conference
  • Place of Presentation: Congress Center, Act city Hamamatsu
  • Year and Date: 2009-07-22
• [Presentation] Strong atmospheric stability of carbon nanotubes under high temperature annealing (2009)
  • Author(s): Han Eol Lim, et al.
  • Organizer: 2009 22^<nd> International Vacuum Nanotechnology Conference
  • Place of Presentation: Congress Center, Act city Hamamatsu
  • Year and Date: 2009-07-22
• [Presentation] A simple process of growing vertically aligned carbon nanotube emitter on metal foil for X-ray source (2009)
  • Author(s): Je Hwang Ryu, et al.
  • Organizer: 2009 22^<nd> International Vacuum Nanotechnology Conference
  • Place of Presentation: Congress Center, Act city Hamamatsu
  • Year and Date: 2009-07-22
• [Presentation] Transfer mold FEA using the new fabrication and evaluation method through vacuum in-situ process (2009)
  • Author(s): 衛藤和久, et al.
  • Organizer: 2009 22^<nd> International Vacuum Nanotechnology Conference
  • Place of Presentation: Congress Center, Act city Hamamatsu
  • Year and Date: 2009-07-21
• [Presentation] Nanometer-order base length, sharp and uniform field emitter arrays fabrication by transfer mold method (2009)
  • Author(s): 中本正幸, et al.
  • Organizer: 2009 22^<nd> International Vacuum Nanotechnology Conference
  • Place of Presentation: Congress Center, Act city Hamamatsu
  • Year and Date: 2009-07-21
• [Remarks]
  • URL: http://www.rie.shizuoka.ac.jp/advancednanomachining.html