2009 Fiscal Year Final Research Report
Deposition of hetero-structure layered low-k amorphous fluorinated carbon films under sequence control of gas feed and plasma power
| Project/Area Number |
19540517
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Plasma science
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| Research Institution | Hokkaido University |
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Principal Investigator |
SUGAWARA Hirotake Hokkaido University, 大学院・情報科学研究科, 准教授 (90241356)
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| Co-Investigator(Kenkyū-buntansha) |
SUDA Yoshiyuki 北海道大学, 大学院・情報科学研究科, 助教 (70301942)
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| Project Period (FY) |
2007 – 2009
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| Keywords | プラズマ / 化学気相堆積法 / フッ化炭素 / 低誘電率 / 絶縁膜 / 波状化 |
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| Research Abstract |
Amorphous fluorocarbon (a-C:F) films, which are applicable to insulation of electrical power equipment and integrated circuits, were deposited by plasma-enhanced chemical vapor deposition using a C_8F_<18> feedstock. When the a-C:F films were composed at a low plasma power, the thermal tolerance of the films was weak for less bondings between molecular chains in the a-C:F films (loose films). The dielectric constant of these a-C:F films had a tendency to be lower than that of conventional a-C:F films with dense bondings between molecular chains (firm films). This feature is desirable for reduction of the dielectric energy loss in power equipment and the delay of the signal transmission in the integrated circuits. In addition, we found a waving phenomenon of the firm film due to the heat given during the deposition of the firm film on a loose film. The voids made under the wavy film are also expected to contribute to the reduction of the dielectric constant of the a-C:F films.
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[Presentation] Formation of Winding surface of amorphous fluorocarbon films composed by perfluorooctane plama-enhanced chemical vapor deposition, Proc2008
Author(s)
K. Mizuno, H. Sugawara, (発表者), T. Yamauchi, H. Koike, Y. Suda, Y. Saka
Organizer
XIX Europhysi Conference on Atom-Molecular Phenomena, in Ionized Gases (ISBN2-914771-04-5, Vol. 32-A), No. 1-61 (2 pages)
Place of Presentation
Granada, Spain(CD-ROM)
Year and Date
20080715-20080719
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