UHV in-situ and Cs-corrected HR(S)TEM Studies of structures and growth process of Ge nanodots formed on faintly oxidized Si surfaces

2008 Fiscal Year Final Research Report

• Project/Area Number: 19560023
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Nagoya University
• Principal Investigator: TANAKA Nobuo Nagoya University, エコトピア科学研究所, 教授 (40126876)
• Project Period (FY): 2007 – 2008
• Keywords: 電子顕微鏡

Research Abstract

本研究では、実空間かつ原子レベルでその場観察できるUHV in-situ HR-profile TEM(UHV in-situ high-resolution transmission electron microscopy in the profile-imaging geometry)と、試料の原子コラムレベル毎の組成分析や原子コラム位置を直視観察できるHAADF-STEM(high angle annular dark field-scanning resolution transmission electron microscopy)を用いて、Si基板に形成した極薄Si酸化膜上でのGeナノドットの形成過程と、GeナノドットとSi界面近傍における微細構造、および原子拡散現象などを詳細に評価した。その結果、本系におけるGeナノドット成長様式およびGeナノドット直下にGe-rich layerの存在する新しい構造モデルを提案することができた

Research Products

• [Journal Article] In-situ monitoring of nucleation and evolution of Ge nanodots on faintly oxidized Si(111) surfaces (2008)
  • Author(s): Sung-Pyo Cho, Shinji Kawano and Nobuo Tanaka
  • Journal Title: App. Sur. Sci 254 Pages: 7868
  • Peer Reviewed
• [Journal Article] Spherical aberration corrected STEM studies of Ge nanodots grown on Si(001) surfaces with an ultrathin SiO2 coverage (2008)
  • Author(s): N. Tanaka, S.-P. Cho, A. A. Shklyaev J. Yamasaki, E. Okunishi and M. Ichikawa
  • Journal Title: App. Sur. Sci 254 Pages: 7569
  • Peer Reviewed
• [Journal Article] UHV in-situ とCs corrected HRTEMによる極薄Si酸化膜上でのGeナノドットの核形成・成長、および微細構造の評価 (2007)
  • Author(s): 趙星彪, 川野晋司, 齋藤晃, 山崎順, 田中信夫
  • Journal Title: 日本結晶成長学会誌 Vol.34, No.3 Pages: 10
  • Peer Reviewed
• [Presentation] UHV in-situ TEMによる極薄Si酸化膜付Si基板上に成長するGeナノドットの歪み評価 (2009)
  • Author(s): 趙星彪, 藤林裕明, 田中信夫
  • Organizer: 日本物理学会第64回年次大会
  • Place of Presentation: 東京 (立教大)
  • Year and Date: 2009-03-27
• [Presentation] Cs-corrected STEM Studies of Ge Nanodots Grown on Slightly Oxidized Si(111) Surfaces (2008)
  • Author(s): N Tanaka, S-P Cho, A A Shklyaev, J Yamasaki, E Okunishi and M Ichikawa
  • Organizer: Microscopy & Microanalysis 2008
  • Place of Presentation: New Mexico, USA
  • Year and Date: 20080803-07
• [Presentation] Studies of Ge Quantum Dots on Slightly Oxidized Si(111) Surfaces by Cs-corrected TEM/STEM (2008)
  • Author(s): N. Tanaka, S. -P. Cho, A. A. Shklyaev, J. Yamasaki, E. Okunishi, and M. Ichikawa
  • Organizer: The 1st International Symposium on Advanced Microscopy and Theoretical Calculations (AMTC 1)
  • Place of Presentation: Nagoya, Japan
  • Year and Date: 20080629-30
• [Presentation] 極薄酸化膜付きSi上に成長するGe量子ドットに含まれる歪分布の定量的評価 (2008)
  • Author(s): 藤林裕明, 趙星彪, 田中信夫
  • Organizer: 日本顕微鏡学会第64回学術講演会
  • Place of Presentation: 京都(国立京都国際会館)
  • Year and Date: 2008-05-22
• [Presentation] Spherical aberration corrected STEM studies of Ge nanodots grown on Si(001) surfaces with an ultrathin SiO_2 coverage (2007)
  • Author(s): N. Tanaka, S.-P. Cho, A. A. Shklyaev J. Yamasaki, E. Okunishi and M. Ichikawa
  • Organizer: ACSIN-9(9th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures)
  • Place of Presentation: Tokyo, Japan
  • Year and Date: 20071111-15
• [Presentation] In-situ monitoring of nucleation and evolution of Ge nanodots on faintly oxidized Si(111) surfaces November11-15 (2007)
  • Author(s): Sung-Pyo Cho, Shinji Kawano and Nobuo Tanaka
  • Organizer: 2007, ACSIN-9(9th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures)
  • Place of Presentation: Tokyo, Japan
  • Year and Date: 20070000
• [Presentation] 極薄Si酸化膜を用いたSi(001)表面上のGeナノドットの微細構造および組成の評価 (2007)
  • Author(s): 趙星彪, Alexander A Shklyaev, 山崎順, 奥西栄治, 市川昌和, 田中信夫
  • Organizer: 日本物理学会第62回年次大会
  • Place of Presentation: 札幌 (北海道大)
  • Year and Date: 2007-09-23
• [Presentation] 極薄Si酸化膜上でのGeナノドットの核形成・成長、および微細構造の評価 (2007)
  • Author(s): 趙星彪, 川野晋司, 田中信夫
  • Organizer: 日本顕微鏡学会第63回学術講演会
  • Place of Presentation: 新潟(新潟コンベンションセンター)
  • Year and Date: 2007-05-20
• [Remarks]
  • URL: http://sirius.esi.nagoya-u.ac.jp/~tanakalab/