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2009 Fiscal Year Final Research Report

Study of Frequency-Change-Type High-Sensitivity Two-Axis Acceleration Sensor

Research Project

  • PDF
Project/Area Number 19560047
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied physics, general
Research InstitutionIshinomaki Senshu University

Principal Investigator

SUGAWARA Sumio  Ishinomaki Senshu University, 理工学部, 教授 (00007197)

Co-Investigator(Kenkyū-buntansha) KUDO Subaru  石巻専修大学, 理工学部, 教授 (20214968)
Project Period (FY) 2007 – 2009
Keywords加速度センサ / 力センサ / 横振動子 / 軸力 / 有限要素法 / 周波数変化 / 2軸センサ / 折り曲げ支持棒
Research Abstract

The construction of a frequency-change-type two-axis acceleration sensor is proposed and is designed using the finite-element method. The analyzed relationship between the applied acceleration and the resonance frequency change becomes linear in this construction. Moreover, methods for realizing high sensitivity are proposed. Selecting the axis to apply the acceleration and using bent support bars are both effective methods to increase sensor sensitivity. The sensor characteristics are measured in the gravitational field. As a result, the analyzed characteristics of the sensor agreed with the experimental ones.

  • Research Products

    (11 results)

All 2009 2008 2007

All Journal Article (7 results) (of which Peer Reviewed: 4 results) Presentation (4 results)

  • [Journal Article] Finite Analysis of Sensitivity of Frequency-Change Force Sensor2009

    • Author(s)
      Sumio Sugawara, Masaki Yamakawa, Subaru Kudo
    • Journal Title

      Jpn. J. Appl. Phys. Vol.48

      Pages: 07GF04-1-07GF04-5

    • Peer Reviewed
  • [Journal Article] 周波数変化型単結晶シリコン加速度センサの傾斜角センサへの応用2009

    • Author(s)
      菅原澄夫
    • Journal Title

      月刊「化学工業」 Vol.60,No.9

      Pages: 45-49

  • [Journal Article] 周波数変化型単結晶シリコン2軸加速度センサの高感度化に関する研究2008

    • Author(s)
      菅原澄夫
    • Journal Title

      超音波TECHNO Vol.20,No.3

      Pages: 64-66

  • [Journal Article] 周波数変化型単結晶シリコン加速度センサの傾斜角センサへの応用2008

    • Author(s)
      菅原澄夫
    • Journal Title

      超音波TECHNO Vol.20,No.4

      Pages: 74-76

  • [Journal Article] Application of Frequency-Change-Type Single-Crystal Silicon Acceleration Sensors to Inclination Angle Sensor2008

    • Author(s)
      Sumio Sugawara, Tokiharu Watanabe, Jiro Terada
    • Journal Title

      Jpn. J. Appl. Phys. Vol.47,No.5

      Pages: 4048-4051

    • Peer Reviewed
  • [Journal Article] Theoretical Studies of Realizing High Sensitivity for Frequency-Chage-Type Single-Crystal Silicon Two-Axis Acceleration Sensor2008

    • Author(s)
      Sumio Sugawara, Jumpei Koike
    • Journal Title

      Jpn. J. Appl. Phys. Vol.47,No.8

      Pages: 6578-6582

    • Peer Reviewed
  • [Journal Article] Construction of Frequency-Change-Type Single-Crystal Silicon Two-Axis Acceleration Sensor2007

    • Author(s)
      Sumio Sugawara, Hiroyuki SUZUKI, Takashi Saito
    • Journal Title

      Jpn. J. Appl. Phys. Vol.46,No.7B

      Pages: 4652-4655

    • Peer Reviewed
  • [Presentation] Experimental Study of Sensitivity of Frequency-Change-Type Two-Axis Acceleration Sensor2009

    • Author(s)
      Sumio Sugawara, Yu Kajiwara
    • Organizer
      Symp. on Ultrason. Electron.
    • Place of Presentation
      Kyoto
    • Year and Date
      20091100
  • [Presentation] A Study on Sensitivity of Frequency-Change-Type Force Sensor2008

    • Author(s)
      Sumio Sugawara, Masaki Yamakawa
    • Organizer
      Proc. of Symp. on Ultrason. Electron.
    • Year and Date
      20081100
  • [Presentation] Application of Frequency-Change-Type Single-Crystal Silicon Acceleration Sensors to Inclination Angle Sensor2007

    • Author(s)
      Sumio Sugawara, Tokiharu Watanabe
    • Organizer
      Symp. on Ultrason. Electron.
    • Place of Presentation
      Tsukuba
    • Year and Date
      20071100
  • [Presentation] Realization of High Sensitivity of Frequency-Chang-Type Single-Crystal Silicon Two-Axis Acceleration Sensor2007

    • Author(s)
      Sumio Sugawara, Jumpei Koike
    • Organizer
      Symp. on Ultrason. Electron
    • Place of Presentation
      Tsukuba
    • Year and Date
      20071100

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Published: 2011-06-18   Modified: 2013-06-11  

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