2009 Fiscal Year Final Research Report
Research and Development of Multi-Layered Sensor/Actuator Devices Utilizing Multi-Ferroic Effects
| Project/Area Number |
19560710
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Structural/Functional materials
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| Research Institution | Kanazawa Institute of Technology |
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Principal Investigator |
KISHI Yoichi Kanazawa Institute of Technology, 工学部, 准教授 (70265370)
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| Co-Investigator(Kenkyū-buntansha) |
SAKUDO Noriyuki 金沢工業大学, 工学部, 教授 (20267719)
YAJIMA Zenjiro 金沢工業大学, 工学部, 教授 (60148145)
IKENAGA Noriaki 金沢工業大学, ものづくり研究所, 研究員 (30512371)
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| Project Period (FY) |
2007 – 2009
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| Keywords | インテリジェント材料 / 非平衡相薄膜 / 金属物性 / マルテンサイト変態 |
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| Research Abstract |
An RF magnetron sputtering apparatus equipped with four separate confocal sources as well as with a heating and ion-irradiating system for substrates was developed to make the films crystalline. Without using the system, the films showed amorphous if the substrate temperature is below 400℃. However, crystallized film is obtained even at 200℃ of substrate temperature by ion-irradiating. Crystallized film deposited on a polyimide sheet shows two-way motion by thermal cycle. With the results mentioned above, multi-layered ferroics devices can be fabricated at low substrate temperature for variety of purposes in the near future.
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