simultaneous monitoring of multi-metallic atoms on sputtering process

2008 Fiscal Year Final Research Report

• Project/Area Number: 19760508
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Material processing/treatments
• Research Institution: Wakayama University
• Principal Investigator: OHTA Takayuki Wakayama University, システム工学部, 助教 (10379612)
• Project Period (FY): 2007 – 2008
• Keywords: プラズマ診断 / スパッタリング / 吸収分光法

Research Abstract

スパッタプロセスは, 非常に幅広い薄膜プロセスに用いられている. 本研究では, 高機能薄膜を高品質に形成するために, スパッタプラズマ中の数種類の金属原子密度を同時にモニタリングする技術の開発を目的とした. 具体的には, 金属原子密度測定用の吸収分光用光源の開発し, 透明導電膜製膜スパッタプラズマ中のInとZn原子密度の同時モニタリングを行い, 金属原子の絶対密度計測に成功した.

Research Products

• [Journal Article] Simultaneous monitoring of metallic atom densities in sputtering process using multi-micro hollow cathode lamp (2007)
  • Author(s): Ohta, M. Ito, Y. Tachibana, S. Taneda, S. Takashima, M. Hori, H. Kano, S. Den
  • Journal Title: Appl. Phys. Lett. 90 Pages: 251502-1-25102-3
  • Peer Reviewed
• [Presentation] マイクロホローカソードプラズマを用いた複数金属同時測定用吸収分光光源の開発 (2009)
  • Author(s): 太田貴之
  • Organizer: 電気学会研究フォーラム先端プラズマ技術を利用したナノテクノロジーおよびバイオ分野への応用に関する研究, 第3回 : 大気圧および液体中におけるプラズマ生成と応用, 招待講演
  • Place of Presentation: 静岡大学
  • Year and Date: 2009-01-14
• [Presentation] Simultaneous monitoring of absolute densities of In and Zn atoms in indium zinc oxide sputtering process (2008)
  • Author(s): T.Ohta, N. Takota, Y. Tachibana, M. Ito, Y. Higashijima, H. Kano, S. Den, M. Hori
  • Organizer: The International Union of Materials Research Societies International Conference in Asia 2008(IUMRS-ICA2008), 招待講演
  • Place of Presentation: Nagoya, Japan
  • Year and Date: 20081209-13
• [Presentation] Simultaneous monitoring of absolute densities of multi metallic atoms in magnetron sputtering employing micro hollow cathode lamp (2008)
  • Author(s): T. Ohta, Y. Tachibana, N. Takota, M. Ito, S. Takashima, Y. Higashijima, H. Kano, S. Den, M. Hori
  • Organizer: 11th international conference on plasma surface engineering
  • Place of Presentation: Garmisch-Partenkirchen, Germany
  • Year and Date: 20080915-19
• [Presentation] Effects of cathode dimension on plasma charactristics of multi-micro hollow cathode lamp (2008)
  • Author(s): T. Ohta, Y. Tachibana, N. Takota, M. Ito, S. Takashima, Y. Higashijima, H. Kano, S. Den, M. Hori
  • Organizer: 19th European Conference on Atomic & Molecular Physics of Ionized Gases
  • Place of Presentation: Granada, Spain
  • Year and Date: 20080715-19
• [Presentation] plasma diagnostics on multi-micro hollow light source (2007)
  • Author(s): T. Ohta, Y. Tachibana, M. Ito, S. Takashima, Y. Higashijima, H. Kano, S. Den, M. Hori
  • Organizer: 18th international symposium on plasma chemistry
  • Place of Presentation: Kyoto, Japan
  • Year and Date: 20070826-31
• [Presentation] Development of multi metallic emission array using micro hollow cathode plasma (2007)
  • Author(s): T. Ohta, Y. Tachibana, M. Ito, S. Takashima, Y. Higashijima, H. Kano, S. Den, M. Hori
  • Organizer: XXVIII International Conference on Phenomena in Ionized Gases
  • Place of Presentation: Prague, Czech Republic
  • Year and Date: 20070715-20
• [Remarks] ホームページ等
  • URL: http://www.sys.wakayama-u.ac.jp/om/photonics/