Development of low-energy molecular sensors with nanosale thermal-aware device design and operand spectroscopy

2022 Fiscal Year Final Research Report

• Project/Area Number: 19H00756
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Medium-sized Section 21:Electrical and electronic engineering and related fields
• Research Institution: The University of Tokyo
• Principal Investigator: Uchida Ken 東京大学, 大学院工学系研究科(工学部), 教授 (30446900)
• Co-Investigator(Kenkyū-buntansha): 近藤 寛 慶應義塾大学, 理工学部(矢上), 教授 (80302800)
• Project Period (FY): 2019-04-01 – 2023-03-31
• Keywords: 分子センサ / ジュール熱 / オペランド分光 / 電子輸送 / 準大気圧XPS

Outline of Final Research Achievements

As the Internet of Things era is going to be realized, long-term sensing of various kinds of information around us is becoming increasingly important. However, it is difficult to continuously measure the concentration and kinds of low-molecular-weight gases floating in our living space and environments. In this research project, we have developed a technique for activating the surface of a noble metal nanosheet sensor by self-Joule heating, which can activate the sensor surface with higher reliability and lower energy. We have also investigated the principle of sensor operation by utilizing in-situ measurement of the sensor surface reaction (operando measurement technique). As a result, we succeeded in developing an alloy molecular sensor that can detect molecules at low energy for a long period of time.

Free Research Field

電子デバイス，集積回路工学

Academic Significance and Societal Importance of the Research Achievements

分子センサの開発では，ジュール加熱による低エネルギーの分子センサを実現するとともに，ジュール加熱に直流バイアスを用いた場合と比較して，交流バイアスでは周波数を高くするほど寿命が長くなることを明らかにした．また，Ptナノシートセンサの抵抗値が，Pt表面におけるガス分子の結合状態に大きな影響を受けることを，センサ動作時の表面状態の観察（オペランド計測）で示し，さらに2つの元素からなる二元合金を用いることで，分子センサの性能が向上することを実証した．長寿命かつ高性能な分子センサの実現は，日常的な健康状態チェックなどに使える可能性があり，社会に大きなインパクトを与えると期待できる．