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2021 Fiscal Year Final Research Report

Research of Electron pulse compression with THz resonator and development for femtosecond visualizing technique using scanning electron microscopy

Research Project

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Project/Area Number 19H00847
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Review Section Medium-sized Section 28:Nano/micro science and related fields
Research InstitutionUniversity of Tsukuba

Principal Investigator

Fujita Jun-ichi  筑波大学, 数理物質系, 教授 (10361320)

Co-Investigator(Kenkyū-buntansha) 嵐田 雄介  筑波大学, 数理物質系, 助教 (30715181)
羽田 真毅  筑波大学, 数理物質系, 准教授 (70636365)
吉田 昭二  筑波大学, 数理物質系, 准教授 (90447227)
早田 康成  筑波大学, 数理物質系, 教授 (80837469)
増田 秀樹  筑波大学, 数理物質系, 助教 (10707996)
Project Period (FY) 2019-04-01 – 2022-03-31
Keywordsフェムト秒レーザー / 走査電子顕微鏡 / 電子パルス波 / 超高速可視化 / THz波 / 時間分解 / ポテンシャル変化
Outline of Final Research Achievements

We constructed femtosecond laser-excited ultrafast scanning electron microscope system and demonstrated the ultrafast visualization of transient phenomenon. By irradiating the tip of the ZrO electron gun with the 3rd harmonic (343nm) obtained from the femtosecond laser via the BBO crystal, a few pA can be obtained as the average electron dose. The emitted electron beam pulse spreads to about 260 picoseconds due to the spatial electric field effect while reaching the sample surface 50 cm downstream from the electron gun. Using the electrical pulse synchronization method, we succeeded in capturing the potential change in response to the pulse potential applied to the comb-shaped electrode as a time evolution SEM image at the nanosecond level resolution.

Free Research Field

材料物性、量子ビーム

Academic Significance and Societal Importance of the Research Achievements

本研究の結果、市販汎用SEMの簡易な改良によって、フェムト秒レーザーで励起される超短電子パルス波を用いた走査電子顕微鏡が実現できることが実証できた。この装置系を用いることで、SEMだからこそ観測しうる超高速動作のMEMSスイッチング素子の動作形態の観察、実空間における電荷やプラズモン伝搬の時間発展観測が可能となった。関連する物理計測、化学反応解析など多くの学術分野で幅広く利用され得る科学基盤技術になると期待される。

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Published: 2023-01-30  

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