Nano-defect super-resolution measurement of next-generation micro-functional structures using localized optical fields with dynamic phase control

2022 Fiscal Year Final Research Report

• Project/Area Number: 19H02036
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 18020:Manufacturing and production engineering-related
• Research Institution: The University of Tokyo
• Principal Investigator: Takahashi Satoru 東京大学, 先端科学技術研究センター, 教授 (30283724)
• Co-Investigator(Kenkyū-buntansha): 門屋 祥太郎 東京大学, 先端科学技術研究センター, 助教 (60880234) ; 道畑 正岐 東京大学, 大学院工学系研究科(工学部), 准教授 (70588855) ; 西川 正俊 法政大学, 生命科学部, 准教授 (30444516)
• Project Period (FY): 2019-04-01 – 2022-03-31
• Keywords: 超解像 / ナノ計測 / 微細機能構造

Outline of Final Research Achievements

We focused on structural illumination microscopy (SIM), which has been developed as a highly practical super-resolution method, and aimed to establish a super-resolution defect measurement technique for next-generation microfunctional structures that enables super-resolution observation even under coherent imaging by combining it with phase-locked reference light waves. As a result, we have succeeded in developing a method for detecting microdefects in next-generation optical devices in which the amplitude is constant and only the phase fluctuates periodically.

Free Research Field

光応用計測

Academic Significance and Societal Importance of the Research Achievements

研究成果により，VRゴーグル内の光学系に代表される，微細位相変調を活用する次世代光学デバイスの直接検査・評価が可能になる．これにより，スマホに匹敵するとされる，新しい技術デバイスの社会実装に大きく貢献することが期待される．