Measurement and control of internal stress in thin film metallic glass using combinatorial technology

2022 Fiscal Year Final Research Report

• Project/Area Number: 19H02040
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 18020:Manufacturing and production engineering-related
• Research Institution: Nagoya University
• Principal Investigator: HATA SEIICHI 名古屋大学, 工学研究科, 教授 (50293056)
• Co-Investigator(Kenkyū-buntansha): 櫻井 淳平 名古屋大学, 工学研究科, 准教授 (40345385) ; 岡 智絵美 名古屋大学, 工学研究科, 助教 (70823285) ; 山崎 貴大 名古屋大学, 工学研究科, 学振特別研究員(PD) (40847240)
• Project Period (FY): 2019-04-01 – 2023-03-31
• Keywords: 内部応力 / 薄膜 / コンビナトリアル技術 / アニール / 薄膜金属ガラス

Outline of Final Research Achievements

The aim of this study was to investigate the internal stress of thin film metallic glasses using combinatorial techniques, elucidate the relationship between deposition conditions and internal stress of thin film metallic glasses, and demonstrate the fabrication of diaphragm structures with a diameter ranging from 400 nm to 800 um, allowing for precise control of the internal stress within a range of ±200 MPa. In particular, we developed a differential exhaust combinatorial opposing target sputtering apparatus, established a thin film library for evaluating internal stress, and explored the correlation between annealing conditions and internal stress. Consequently, we successfully devised a novel method for measuring internal stress and unveiled the relationship between internal stress and annealing conditions for Ru-based and Ni-based thin film metallic glasses. Moreover, we accomplished the fabrication of diaphragm structures with meticulously controlled internal stress.

Free Research Field

機械工学

Academic Significance and Societal Importance of the Research Achievements

MEMS構造の一部は基板から分離しており，材料内の応力により形状が変わり破壊されることがある．Si系材料は成膜条件等により内部応力を制御できるが，小型化や高機能化には限界があるため，代替材料が求められている．この状況に着目し，薄膜金属ガラスを利用したMEMS構造と内部応力制御を実現した．近年，薄膜金属ガラスをMEMSに適用する事例が増えてきたため，内部応力を解明し制御する必要性が浮かび上がってきた．この研究では，薄膜金属ガラスの内部応力を体系的かつ効率的に解明し，制御可能かを明らかにするために行われた．