Research about ultra-high hermetic seal bonding for microcavity by quantum sensing

2021 Fiscal Year Final Research Report

• Project/Area Number: 19H02045
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 18020:Manufacturing and production engineering-related
• Research Institution: National Institute of Advanced Industrial Science and Technology
• Principal Investigator: Yuichi Kurashima 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 研究グループ長 (70408730)
• Co-Investigator(Kenkyū-buntansha): 松前 貴司 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 (10807431) ; 柳町 真也 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 上級主任研究員 (70358216)
• Project Period (FY): 2019-04-01 – 2022-03-31
• Keywords: MEMS / 気密封止 / 接合 / 量子干渉 / 脱ガス

Outline of Final Research Achievements

We developed a hermetic sealing technique that minimizes pressure change due to degassing after encapsulation, and evaluated a pressure inside the cavity of a Cs gas cell by the CPT (coherent population trapping) resonance phenomenon based on quantum interference effects. As a result, it was found that Cs can be hermetically sealed at a high level. Although the CPT resonance frequency changed slightly, it was considered to be dominated by a collision shift temperature dependence rather than a collision shift pressure dependence. Therefore, it is important that the hermetic sealed cavity was measured in a high-precision thermostatic chamber for measurement of inside pressure more precisely.

Free Research Field

気密封止接合

Academic Significance and Societal Importance of the Research Achievements

キャビティの内部圧力を一定に担保できる気密封止接合技術及び量子干渉効果に基づくCPT共鳴現象を元にした封止性の評価は新原理や高性能なマイクロデバイスを実現する上で社会的意義があるだけでなく、封止接合のミクロのメカニズム解明や気密性の評価手法の追求は学術的意義があり、最終的には気体分子レベルでの気密性の評価につながると考えている。