2021 Fiscal Year Final Research Report
Surface measurement with sub-nano order resolution by using Spin Hall effect of light generated by optical frequency comb
| Project/Area Number |
19H02154
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Review Section |
Basic Section 21030:Measurement engineering-related
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| Research Institution | Osaka University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
高谷 裕浩 大阪大学, 工学研究科, 教授 (70243178)
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| Project Period (FY) |
2019-04-01 – 2022-03-31
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| Keywords | 光スピンホール効果 / 表面粗さ / 薄膜計測 / エリプソメトリ / 偏光計測 / 弱値増大効果 |
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| Outline of Final Research Achievements |
The spin Hall effect of light (SHEL) associated with spin-orbit interactions, describes a transport phenomenon with optical spin-dependent splitting, while the splitting shift is corresponded to the polarization state of light. Since the core of ellipsometry is calculating surface qualities according to polarization state of optical probe, we proposed a new ellipsometry based on SHEL shift. According to weak measurement and ellipsometry theory, we can realize the evaluation of surface roughness variation by the measurement of SHEL shift. The special texture detected obtained by 2D distribution figures seem to provide a possibility for roll-off areas and polishing marks detection.
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| Free Research Field |
精密計測，生産工学
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| Academic Significance and Societal Importance of the Research Achievements |
量子光学的な効果として注目されているスピンホール効果を産業応用を可能としたことは意義深い．また，偏光計測に関しても，従来は，測定精度はある程度得られていたが長期的な安定性が欠けるため２次元的なデータを取得するのが困難であった．それに対して，従来よりも高感度かつ安定的にデータを得ることができるようになったため，２次元データを取得できるだけでなく，水分子の層なども検出できるようになった．社会的には，より高精度な検査手法として導入が可能になる点で意義がある．
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