Development of ultra high-speed silicon image sensor with temporal resolution of 10Gfps and its application to advanced measurement technology

2022 Fiscal Year Final Research Report

• Project/Area Number: 19H02204
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 21060:Electron device and electronic equipment-related
• Research Institution: Ritsumeikan University
• Principal Investigator: Shimonomura Kazuhiro 立命館大学, 理工学部, 教授 (80397679)
• Co-Investigator(Kenkyū-buntansha): 江藤 剛治 立命館大学, 総合科学技術研究機構, 教授 (20088412) ; 安藤 妙子 立命館大学, 理工学部, 教授 (70335074)
• Project Period (FY): 2019-04-01 – 2022-03-31
• Keywords: 超高速撮像 / 撮像素子 / マルチ電荷収集ゲート撮像素子

Outline of Final Research Achievements

We have proposed a Backside Illuminated Multi-Collection-Gate Image Sensor and developed an ultra high-speed image sensor with a temporal resolution of 100 Mfps. In this study, we proposed a branching structure that branches the charge collection gates in each pixel, and showed that horizontal mixing of electrons in the center of the pixel, which can be a factor of limitation of the temporal resolution, can be suppressed by employing resistive gates in this structure. Furthermore, we have shown through simulation that the use of germanium as a photodiode, which has a higher absorption coefficient than that of silicon, can significantly improve the temporal resolution in the photoelectric conversion layer. The combination of these elements shows the prospect of achieving a temporal resolution of 100 ps.

Free Research Field

画像センシング

Academic Significance and Societal Importance of the Research Achievements

撮像素子の理論的限界時間分解能を示し，それに迫るための要素技術を提案した．超高速撮像素子は，蛍光寿命計測や飛行時間計測のような時間計測型の先端分析機器を時空間計測型へと進化させ，FLIM（蛍光寿命顕微法）やDPSP（ダイナミック感圧塗料計測），TOF-MS（飛行時間型質量分析）などの発展に寄与する．