Energy scavenging experiment from standard time radio wave by using by a high-Q MEMS resonator

2021 Fiscal Year Final Research Report

• Project/Area Number: 19H02570
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 28050:Nano/micro-systems-related
• Research Institution: Shizuoka University
• Principal Investigator: Hashiguchi Gen 静岡大学, 電子工学研究所, 教授 (70314903)
• Project Period (FY): 2019-04-01 – 2022-03-31
• Keywords: MEMS振動子 / エレクトレット / 電波発電 / 誘電分離構造

Outline of Final Research Achievements

We have examined an energy scavenging technique from standard time radio wave by using a high-Q MEMS resonator. We developed a ring vibration device having the quality factor of over 20000 in vacuum operation. Using the first trial device, the voltage boosting factor of about 4 was confirmed for the receiving signal via a pseudo antenna. Furthermore, we adopted a new dielectric separation structure in the handle layer of a SOI wafer, and established very small parasitic capacitance between electrodes of the MEMS vibrator. We have conducted the charging experiment by connecting a full-wave rectifier under resonance condition of the developed MEMS vibrator and observed the charging voltage boosting of about 1.86 compared to that under non-resonance condition. However, these results were not enough to usage of actual use as a power source. We have continued development of the MEMS resonator with electrostatic transformer function to boost up the radio wave signal.

Free Research Field

MEMS

Academic Significance and Societal Importance of the Research Achievements

標準電波からの蓄電を、高いQ値を有するMEMS共振子を利用した試みた初めての実験である。目標値には達していないが、MEMS共振子を用いて、アンテナ信号の電圧を昇圧できることを実証できた。素子の作製において、MEMS共振子の寄生容量を減少させるための、埋め込み酸化膜構造を新たに開発したが、この手法はMEMSデバイスの寄生容量を大きく減少させることのできる手法として有用であり、MEMSデバイスの感度向上や省エネルギーに寄与できるものと考える。