2021 Fiscal Year Final Research Report
Computational analyses on asymmetric directional electron transport and partial resonance originating in the arrangement of electric and magnetic fields in inductively coupled magnetized plasmas
| Project/Area Number |
19K03780
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Review Section |
Basic Section 14010:Fundamental plasma-related
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| Research Institution | Hokkaido University |
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Principal Investigator |
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| Project Period (FY) |
2019-04-01 – 2022-03-31
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| Keywords | 電子エネルギー利得 / 電子サイクロトロン共鳴 / 部分共鳴 / 平均電子速度 / 交流電界応答 / 非対称性 / 指向性 |
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| Outline of Final Research Achievements |
Electron motion in magnetized plasmas for material processing was simulated focusing on the partial resonance as a process of the electron energy gain (EEG). Fundamental understanding for design and control of practical plasma reactors was obtained by evaluation of the EEG under various arrangements of the magnetic coils, the power-source antenna and the magnetic field strengths. New measures for the EEG and the asymmetry of electron flow caused by the arrangement of the electric and magnetic fields were introduced as weighting various effects of the parameters determining the electron motion. This simplified the seeking task for desirable conditions for the partial resonance. The ac response of the average electron velocity vector, that governs the EEG and the directional electron flow, was analyzed under field conditions extended to arbitrary angles between the electric and magnetic fields. Its basic features were validated by a theory based on a constant-collision-frequency model.
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| Free Research Field |
プラズマエレクトロニクス
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| Academic Significance and Societal Importance of the Research Achievements |
不均一磁界下高周波プラズマ中で起こる一時的電子サイクロトロン共鳴により電子がエネルギーを得る部分共鳴現象には多くの変数が関わり，その発現機構の詳細解明と適した条件の探索は学術と技術の両面で興味深い課題である。部分共鳴を電磁界配位由来の電子流非対称性と関連付ける本研究のような試みは希で，新論点を提起したものである。
部分共鳴が励起源アンテナから離れた領域でも生じた解析結果はプラズマによる材料処理等の産業技術において遠隔領域の制御性や広範囲一様化など新機能の種となる可能性を示唆している。解析で得た条件依存性と交流電界応答特性は磁化プラズマに関する基礎知見として実機の設計制御に資するものと期待される。
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