2023 Fiscal Year Final Research Report
Quantitative measurements of electron collision cross section to realize the high precise plasma modelings
| Project/Area Number |
19K03812
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Review Section |
Basic Section 14030:Applied plasma science-related
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| Research Institution | Sophia University |
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Principal Investigator |
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| Project Period (FY) |
2019-04-01 – 2024-03-31
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| Keywords | 電子衝突 / 衝突断面積 / プラズマ素過程 |
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| Outline of Final Research Achievements |
In order to realize a high precise plasma modeling, which is used to elucidate the behavior of semiconductor processes and fusion plasmas, it is necessary to quantitatively measure and evaluate collision cross-section data in electron collisions with atoms and molecules. Therefore, we aimed to experimentally evaluate and verify the collision cross-section, which has until now included large uncertainties.
As a result, we proposed several new methods for obtaining highly reliable electron collision integral cross-section data in this project, derived to succeed in constructing cross-section datasets for various target molecules, and finally we reported the results. It is expected that this research will be useful in updating the database of plasma-related molecules and improving the accuracy of plasma modellings.
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| Free Research Field |
原子分子物理学
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| Academic Significance and Societal Importance of the Research Achievements |
近年、我々の日常生活で欠かせないあらゆる電子機器に搭載される半導体はプラズマを使って生成される。そこではプラズマの挙動を解明するためのプラズマモデリングが行われ、その入力データとして電子衝突断面積データセットが利用されるが、大半が理論計算による予測が使われてきた。
本課題において、プラズマモデリングに必要不可欠な電子衝突断面積を実験的に精密測定、評価、理論計算の有用性をあらゆる面から詳細に検証し、衝突断面積データベースの構築に成功した。その結果、これまで以上の高精度かつ現実に近いプラズマモデリングの実現が期待され、学術面における基礎データの提供に加え、社会的な貢献も果たすことができた。
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