Development of fine feed mechanism that provides table floating support and precision positioning with squeezed-air effect

2022 Fiscal Year Final Research Report

• Project/Area Number: 19K04106
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 18020:Manufacturing and production engineering-related
• Research Institution: Kyushu Institute of Technology
• Principal Investigator: Tamaru Yuma 九州工業大学, 大学院工学研究院, 助教 (30284590)
• Project Period (FY): 2019-04-01 – 2023-03-31
• Keywords: スクイーズ効果 / 位置決め / 微動 / 非接触支持 / ピエゾ素子

Outline of Final Research Achievements

A unique table was fabricated to achieve both support and fine feed. The table was floating supported using the squeeze effect. Fine feed was possible by adjusting the floating pressure. In the excitation mechanism, the inclination angle of the excitation surface can be adjusted. This increased the parallelism between the table's facing surface and the excitation surface of the excitation units. Long-stroke, small-step, and high-resolution feed experiments were conducted. Their positioning abilities were evaluated in comparison with the estimated displacements calculated based on geometrical approaches.

Free Research Field

機械要素

Academic Significance and Societal Importance of the Research Achievements

位置決めは加工に不可欠な技術要素である．最近のセンサや電子部品は微細加工技術に頼っており位置決めの高度化に対する要求は厳しい．
本研究では位置決めを非接触で実現させる目標のもと，スクイーズ効果を用いた支持と微動が可能であることを示し，摺動摩擦の排除によって高精度の位置決めが達成される基本性能を提供した．また，本効果は自律的に空気圧力を生成するため省スペース，省コスト化に貢献する．