2021 Fiscal Year Final Research Report
Fabrication Method for Micro Systems by Using 3-Dimensional Compliant Mechanism
| Project/Area Number |
19K04278
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Review Section |
Basic Section 20010:Mechanics and mechatronics-related
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| Research Institution | Shibaura Institute of Technology |
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Principal Investigator |
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| Project Period (FY) |
2019-04-01 – 2022-03-31
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| Keywords | マイクロロボット / コンプライアント・メカニズム / MEMS / 折り紙構造 / 形状記憶合金アクチュエータ / 積層型静電容量角度センサ / ポリマーアクチュエータ |
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| Outline of Final Research Achievements |
In micro systems that have moving joints such as a micro robot, assembling parts is difficult. When assembling micro systems, grasping such small parts tightly, alignment them to correct position and direction are necessary. As a solution to this problem, a compliant mechanism that integrates soft deformed parts and hard structural parts has been proposed, and it makes the small parts assembling simple.
Using MEMS (Micro-Electro-Mechanical Systems) techniques, a three-dimensional compliant mechanism that can be used in a micro system was realized. A small 6-legged robot using this compliant mechanism was designed and evaluated.
During the research period, 4 peer-reviewed international papers were published and presentations in 9 international conferences and 10 domestic conferences were performed.
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| Free Research Field |
MEMS，ロボティクス，メカトロニクス
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| Academic Significance and Societal Importance of the Research Achievements |
本研究成果の学術的意義はマイクロシステムの部品組立を簡単化するコンプライアント・メカニズムの設計手法とＭＥＭＳによる製造プロセスを確立したことである．センサやアクチュエータなどを含めた集積化も実施した．
本研究の製造プロセスでは，真空プロセスが不要でプロセス時間が短縮されるため，設計変更が容易である．例えば医療用マイクロシステムではカスタマイズの容易さ・迅速さは大きなメリットである．飲む胃カメラシステムやカテーテル手術用器具など，利用者の身体的特徴や必要な検査に応じて，筐体サイズや形状，センサやアクチュエータ，バッテリ容量等を最適設計でき，それがすぐに利用者の下に届く便利なシステムが期待できる．
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