Hybrid composite films deposited by Aerosol deposition

2021 Fiscal Year Final Research Report

• Project/Area Number: 19K04477
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 21050:Electric and electronic materials-related
• Research Institution: Doshisha University
• Principal Investigator: SATO Yuuki 同志社大学, 理工学部, 教授 (20512693)
• Project Period (FY): 2019-04-01 – 2022-03-31
• Keywords: エアロゾルデポジション / 酸化インジュウム / 透明導電性薄膜 / ハイブリッド複合膜

Outline of Final Research Achievements

A hybrid composite thin film was formed by simultaneously supplying two species of fine particles by the aerosol deposition method. 　ITO thin films are widely used as a liquid crystal display, etc., in spite of containing Indium, which is a rare metal. A hybrid composite thin film reduces the amount of In used by mixing Al2O3 fine particles.
When Al2O3 fine particles were gradually mixed with the ITO fine particles to form a film, the optical transmittance showed a value similar to that of the commercially available ITO thin film. On the other hand, the electrical conductivity was as high as that of a thin film with ITO of 100% until about 66% of Al2O3 fine particles, which are insulators. By mixing alumina, ITO/ Al2O3 composite thin films can be reduced the In by about 1/3, and thin film with high mechanical strength can be formed.

Free Research Field

電気電子材料

Academic Significance and Societal Importance of the Research Achievements

AD法で作製したITO-Al2O3複合体薄膜の, 可視光透過率, 導電率, 構成している結晶子サイズなどを評価した。今回は１つの２種類のITO, Al2O3微粒子を攪拌・混合し同時にエアロゾル化して成膜したが, 形成された薄膜は各微粒子が偏ることなく均一に分散していることがEDS等から確認した。絶縁体であるアルミナを66%含んでも導電性が確保できること, 高い可視光透過性を示すことが明らかにした。希少金属であるInを大幅に削減できること、アルミナの機械的強度を持つ薄膜を形成できることを示唆している。また、AD法はプラスチックなどの低融点材料にも堆積できるので工業的な応用範囲が広いと考えられる