A Study on High-Resolution Micro-Focus X-ray Devices Using Nanostructured Electron Sources

2021 Fiscal Year Final Research Report

• Project/Area Number: 19K04530
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 21060:Electron device and electronic equipment-related
• Research Institution: Shizuoka University
• Principal Investigator: MOON Jonghyun 静岡大学, 電子工学研究所, 助教 (30514947)
• Project Period (FY): 2019-04-01 – 2022-03-31
• Keywords: 子デバイスおよび電子機器関連 / MEMS・NEMS / マイクロフォーカスエックス線 / 転写モールド法エミッタ作製方法

Outline of Final Research Achievements

Stable and high-resolution micro-focus X-ray devices have been developed by using nanostructured electron sources and Transfer Mold emitter fabrication method to realize highly efficient and high-resolution x-ray sources. Nanostructured Transfer Mold emitter arrays have the base-length, emitter-tip size and emission current fluctuations of as low as 41 nm, 2.8 nm, and 1.3%, respectively. Moreover, extremely stable and high-resolution micro-focus X-ray devices have as low as stability of 1% and microlevel focal size.

Free Research Field

電子デバイスおよび電子機器関連

Academic Significance and Societal Importance of the Research Achievements

高安定性・数十μmレベルの焦点サイズを持つナノ微細構造電界放出アレイを用いた高分解能マイクロフォーカスエックス線源の基礎研究により、先進的医療機器の創出の可能性を秘めており、医学と工学の発展に寄与するという学術的・学際的に大きな意義がある。