2021 Fiscal Year Final Research Report
Omni-directional Vibrating MEMS Energy Harvester with Shock Direction Conversion Mechanism by Magnetic Repulsive Force
| Project/Area Number |
19K04533
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Review Section |
Basic Section 21060:Electron device and electronic equipment-related
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| Research Institution | University of Hyogo |
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Principal Investigator |
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| Project Period (FY) |
2019-04-01 – 2022-03-31
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| Keywords | エナジーハーベスティング / MEMS / 磁性薄膜 |
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| Outline of Final Research Achievements |
This study aims to realize a low-profile harvester that converts out-of-plane external vibrations into in-plane power generation vibrations and generates electricity by redirecting the unidirectional vibrations required for operation of a high-performance vibration-type MEMS energy harvester by a non-contact redirection mechanism using magnetic repulsive force. By optimizing the structure of the redirection mechanism, we will also explore the possibility of an omnidirectional vibration-type energy harvester that operates a unidirectional power generation device by omni-directional external vibration. This will dramatically increase the degree of freedom in the direction of vibration application and the location of installation of the vibrating energy harvester, thereby improving its performance and expanding its range of applications.
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| Free Research Field |
MEMS
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| Academic Significance and Societal Importance of the Research Achievements |
電力を完全に自給自足する省エネ技術のための超小型発電デバイスを，MEMS技術で実現する振動型エナジーハーベスタの研究が注目されている。一般にMEMSエナジーハーベスタは，高性能化のために平板状デバイスの内部でマス（おもり）が面内方向（長手方向）に振動することで発電するため，発電に必要な衝撃（加速度）の方向を面内方向に一致させる必要があり，デバイスの固定方法，設置方向や応用分野に大きな制限をもたらしていた。本研究では，独自の磁性体加工技術で振動方向を転換することにより，設置場所を選ばない振動型エナジーハーベスタの性能向上，応用範囲の拡大に取り組んだ。
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