Elucidation of the effect of a trace amount of oxygen addition on the decomposition and removal of polymer materials using hydrogen radicals

2022 Fiscal Year Final Research Report

• Project/Area Number: 19K04543
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 21060:Electron device and electronic equipment-related
• Research Institution: Kagawa National College of Technology
• Principal Investigator: Yamamoto Masashi 香川高等専門学校, 電気情報工学科, 准教授 (60733821)
• Co-Investigator(Kenkyū-buntansha): 堀邊 英夫 大阪公立大学, 大学院工学研究科, 教授 (00372243) ; 長岡 史郎 香川高等専門学校, 電子システム工学科, 教授 (30300635)
• Project Period (FY): 2019-04-01 – 2023-03-31
• Keywords: ラジカル / ポリマー / 酸素添加 / レジスト / PAC介在架橋

Outline of Final Research Achievements

In this study, we clarified the reactivity and interaction of various radicals generated by decomposing gases such as H2 and O2 with a heated filament and the effect and the cause of the addition of a small amount of oxygen in the decomposition and removal of polymer materials using hydrogen radicals. When a chemically stable filament was used, highly reactive OH radicals were generated while maintaining enough production of hydrogen radicals. Consequently, the removal rate was improved in polymers with a benzene ring structure into which CH3 groups were introduced. On the other hand, in the case of filament with low chemical stability, the population of hydrogen radicals decreased when adding oxygen, and then the removal rate was remarkably declined in the polymers having a benzene ring structure with OH group introduced. This decline may be ascribed to crosslinking and/or hardening induced by decreasing in hydrogen radicals.

Free Research Field

電気電子材料

Academic Significance and Societal Importance of the Research Achievements

ベンゼン環構造を有するポリマーは，半導体製造プロセスやデバイス品質・信頼性の向上のために不可欠な材料であるが，その構造の化学的安定性のため廃棄処理が大きな課題である。本研究成果の学術的意義は，このようなポリマーの分解・除去において，H2とO2を原料として生成される各種ラジカルの役割や効果，ポリマーの化学構造とラジカルの反応性について明らかにした点である。また，本研究成果の社会的意義は，環境にやさしい方法でポリマーを分解・除去する点である。本研究手法は，半導体分野だけでなく，地球規模での環境問題の解決にも貢献できるようなポリマー分解・リサイクル技術の開発につながると考えている。