Structural analysis and mechanical property evaluation of amorphous alloy films with nanoclusters of noble gas atom

2022 Fiscal Year Final Research Report

• Project/Area Number: 19K05104
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 26050:Material processing and microstructure control-related
• Research Institution: Osaka Research Institute of Industrial Science and Technology
• Principal Investigator: Kobata Junpei 地方独立行政法人大阪産業技術研究所, 和泉センター, 主任研究員 (00566424)
• Project Period (FY): 2019-04-01 – 2023-03-31
• Keywords: アンバランスドマグネトロンスパッタリング / 非晶質合金 / 希ガス / ナノクラスター / イオン注入 / X線吸収微細構造 / 走査型透過電子顕微鏡 / ナノインデンテーション

Outline of Final Research Achievements

The structure and film properties of rare gas-containing metallic glass films formed by unbalanced magnetron sputtering were clarified. It was found that the rare gas atoms contained in the film at the time of film formation by the energy of several hundred eV exist dispersedly in the amorphous structure as solid-state clusters with nanoscale size. It was also found that this structure is formed regardless of the types of noble gases (Ar and Ne). Noble gas nanoclusters enabled plastic deformation without shear band formation for room temperature deformation of metallic glass films.

Free Research Field

表面処理

Academic Significance and Societal Importance of the Research Achievements

希ガス元素は金属材料の機能性を向上させる元素として注目されてこなかったが、固体状態のナノクラスターとして存在させることで、材料の変形メカニズムを変化させ、被成形性の向上に役立つことが分かった。この手法は薄膜分野における熱ナノインプリント膜やＭＥＭＳ膜の機能性向上に応用できる。