Development of charged particles process simulator for two-dimensional materials in a chemical reaction field

2021 Fiscal Year Final Research Report

• Project/Area Number: 19K05192
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 28010:Nanometer-scale chemistry-related
• Research Institution: National Institute of Technology, Toyama College
• Principal Investigator: TADA KAZUHIRO 富山高等専門学校, その他部局等, 准教授 (90579731)
• Co-Investigator(Kenkyū-buntansha): 平井 義彦 大阪府立大学, 工学(系)研究科(研究院), 教授 (50285300)
• Project Period (FY): 2019-04-01 – 2022-03-31
• Keywords: 分子動力学 / 二次元材料 / 表面物理 / 加工プロセス

Outline of Final Research Achievements

Extending the molecular simulation of electron irradiation to ion beams, we investigated the barrier performance of graphene coating on two-dimensional MoS2 to protect it from charged particle beams under different coating conditions. The filming conditions were that one or both sides of the two-dimensional MoS2 were coated with graphene. As a result, it was found that under the condition of electron beam irradiation perpendicular to the sample film, the film on the side far from the irradiation source has a protective effect against electron beam damage to the sample, while the film on the side near the irradiation source shows no protective effect at all. It was also found that changing the irradiation angle of the electron beam also produced significant differences in protective performance.

Free Research Field

分子シミュレーション

Academic Significance and Societal Importance of the Research Achievements

本研究により開発されたプロセスシミュレーターは、実験だけでは確立が難しい、グラフェンや二次元MoS2などの二次元材料の形状加工を実現するプロセス条件の確立に向けた基礎的知見を提示しており、今後二次元材料を用いた集積回路等の電子デバイスの開発における要素技術となりえる。