Creation of molecular flow devices for environmental gas exchange by self-standing thin films with nano through holes

2022 Fiscal Year Final Research Report

• Project/Area Number: 19K05274
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 29020:Thin film/surface and interfacial physical properties-related
• Research Institution: Osaka Metropolitan University (2022); Osaka Prefecture University (2019-2021)
• Principal Investigator: Kawata Hiroaki 大阪公立大学, 大学院工学研究科, 客員研究員 (90186099)
• Project Period (FY): 2019-04-01 – 2023-03-31
• Keywords: ナノ貫通孔 / ナノインプリント / 樹脂薄膜 / 分子流

Outline of Final Research Achievements

In nano pipes around 100nm diameter gas molecules are transported while colliding with the pipe walls, and gas flow becomes the molecular flow. Filters made of nano pipes can be applied in environmental gas exchange devices. For obtaining nono pipe filters, we have developed a new imprint process for fabricating popular resin films with fine through-holes. We have developed a water-soluble sacrificial layer process, a low-temperature thermal imprint process, and an imprint-photolithography hybrid process, by which the aspect ratio of fine patterns can be enhanced. As a result, a free-standing acrylic film with a diameter of 0.5 μm and a thickness of 1 μm was produced over a diameter of 5 mm without damage. In addition, we also fabricated an optical device using pitch variable grating by applying the mechanical stress using the self-supporting resin film fabrication technology.

Free Research Field

微細加工を用いた素子作製

Academic Significance and Societal Importance of the Research Achievements

直径100nm程度のナノパイプからなるフィルターは気体分子のながれは大気圧下でも分子流となり部屋の圧力によらず高密度の気体を選択的に排出できる環境素子となる。このようなフィルターを汎用樹脂で作製するために必要なプロセスの開発を行なった。直径500nm、厚さ1μmの貫通孔付アクリルのフィルターを作製した。これにより分子流フィルター実現の基本プロセスを確立した。さらに機械的にピッチ可変なグレーテイングを有する光学素子も作製し、その動作を確認した。